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US5265114A
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System and method for selectively laser processing a target structure of one or more materials of a multimaterial, multilayer device
Assignee: Electro Scientific Industries Inc
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Filing: 1992-09-10
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Granted: 1993-11-23
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Expires: 2012-09-10
Abstract
Abstract A laser system and processing method exploits the absorption contrast between the materials from which a link (12) and an underlying substrate (22) are made to effectively remove the link from the substrate. Laser output in a wavelength range of 1.2 to 2.0 μm (30) optimizes the absorption contrast between many high conductivity materials (e.g., metals) and silicon substrates and permits the use of laser output in a wider range of energy or power levels, pulse widths, without risking damage to the silicon substrates or adjacent circuit structures. Existing link processing laser systems can be readily modified to operate in the 1.2 to 3.0 μm range.
Inventors
- 👤 Yunlong Sun
- 👤 Craig D. Hutchens
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:24
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/0643; B23K26/351; B23K26/36; B23K26/361; B23K26/40; H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/067; H10W20/068; B23K2101/00; B23K2101/34; B23K2103/00; B23K2103/08; B23K2103/10; B23K2103/12; B23K2103/14; B23K2103/16; B23K2103/166; B23K2103/172; B23K2103/18; B23K2103/26; B23K2103/50; H01; H01S; H01S3/00; H01S3/02; H01S3/025; H01S3/04; H01S3/0401; H01S3/09; H01S3/091; H01S3/094; H01S3/0941; H01S3/09415; H01S3/10; H01S3/11; H01S3/1123; H01S3/14; H01S3/16; H01S3/1601; H01S3/1603; H01S3/1611; H01S3/163; H01S3/1645; H01S3/1653; Y; Y10; Y10S; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
121 words
A method for selectively processing a multilayer, multimaterial device that includes a substrate and a high conductivity target structure having respective first and second wavelength sensitive light absorption characteristics, the first and second absorption characteristics having different light absorption properties that provide different light absorption contrasts for different wavelengths of light, comprising: generating at a predetermined wavelength a laser output having predetermined spatial dimensions; and directing the laser output to illuminate the target structure, the predetermined wavelength having a value that represents a sufficiently large absorption contrast between the target structure and the substrate to change a physical property of the target structure but leave substantially unchanged the physical property of the substrate within the spatial dimension of the laser output.
Claim 2
Independent Claim
121 words
A method for selectively processing a multilayer, multimaterial device that includes a substrate and a high conductivity target structure having respective first and second wavelength sensitive light absorption characteristics, the first and second absorption characteristics having different light absorption properties that provide different light absorption contrasts for different wavelengths of light, comprising: generating at a predetermined wavelength a laser output having predetermined spatial dimensions; and directing the laser output to illuminate the target structure, the predetermined wavelength having a value that represents a sufficiently large absorption contrast between the target structure and the substrate to change a physical property of the target structure but leave substantially unchanged the physical property of the substrate within the spatial dimension of the laser output.
Claim 3
Dependent Claim
17 words
The method of claim 1 in which the target structure comprises metal and the substrate comprises silicon.
Claim 4
Dependent Claim
23 words
The method of claim 1 in which the wavelength of the laser output is in about the 1.2 μm to 3.0 μm range.
Claim 5
Dependent Claim
23 words
The method of claim 2 in which the wavelength of the laser output is in about the 1.2 μm to 3.0 μm range.
Claim 6
Dependent Claim
24 words
The method of claim 1 in which the target structure has a width that is smaller than the spatial dimension of the laser output.
Claim 7
Dependent Claim
21 words
The method of claim 2 in which the laser output is directed toward the target structure in an oxygen rich environment.
Claim 8
Dependent Claim
31 words
The method of claim 1 in which the target structure comprises multiple layers and the laser output comprises energy in excess of that which is required to process the target structure.
Claim 9
Dependent Claim
18 words
The method of claim 1 in which the laser output is generated by a Q-switched, diode-pumped, solid-state laser.
Claim 10
Dependent Claim
32 words
The method of claim 3 in which the target structure comprises a metal or combination of metals selected from the group of aluminum, titanium, nickel, copper, tungsten, platinum, gold, and the like.
Claim 11
Dependent Claim
99 words
A laser system for selectively processing a target structure of a multilayer, multimaterial device including a substrate, the target structure and substrate having wavelength sensitive properties, comprising: a pumping source; and a lasant positioned in a resonator cavity adapted to be pumped by the pumping source to provide a laser output having critical dimensions, power, and wavelength selected to exploit differences in the wavelength sensitive properties of the target structure and the substrate such that the target structure within the critical dimensions is effectively processed and the substrate within the critical dimensions is relatively undamaged by the laser output.
Claim 12
Dependent Claim
99 words
A laser system for selectively processing a target structure of a multilayer, multimaterial device including a substrate, the target structure and substrate having wavelength sensitive properties, comprising: a pumping source; and a lasant positioned in a resonator cavity adapted to be pumped by the pumping source to provide a laser output having critical dimensions, power, and wavelength selected to exploit differences in the wavelength sensitive properties of the target structure and the substrate such that the target structure within the critical dimensions is effectively processed and the substrate within the critical dimensions is relatively undamaged by the laser output.
Claim 13
Dependent Claim
18 words
The laser system of claim 10 in which the target structure comprises metal and the substrate comprises silicon.
Claim 14
Dependent Claim
24 words
The laser system of claim 10 in which the wavelength of the laser output is in about the 1.2 μm to 3.0 μm range.
Claim 15
Dependent Claim
24 words
The laser system of claim 11 in which the wavelength of the laser output is in about the 1.2 μm to 3.0 μm range.
Claim 16
Dependent Claim
25 words
The laser system of claim 10 in which the target structure has a width that is smaller than the critical dimensions of the laser output.
Claim 17
Dependent Claim
18 words
The laser system of claim 11 in which the target structure is processed in an oxygen rich environment.
Claim 18
Dependent Claim
31 words
The method of claim 12 in which the target structure comprises multiple layers and the laser output comprises energy in excess of that which is required to process the target structure.
Claim 19
Dependent Claim
16 words
The laser system of claim 10 further comprising a Q-switched, diode-pumped or arc-lamp pumped, solid-state laser.
Claim 20
Dependent Claim
59 words
The laser system of claim 10 in which the lasant is selected from the group of Nd:YAG, Nd:YLF, Nd:YAP, and Nd:YVO 4 , and in which the resonator cavity employs resonator mirrors that are highly transmissive to a conventional wavelength of the lasant but have desired reflectivity at a wavelength within a wavelength range of 1.2 to 3.0 μm.
Claim 21
Dependent Claim
39 words
The laser system of claim 10 in which the lasant comprises YAG doped with holmium or erbium and the resonator cavity is adapted to generate laser output at a wavelength within a wavelength range of 1.2 to 3.0 μm.
Claim 22
Independent Claim
56 words
A method for employing a laser system to process high conductivity link structures forced on a silicon substrate, comprising: generating laser output in a wavelength range of about 1.2 μm to 3.0 μm; and directing the laser output at a high conductivity link structure such that it is effectively processed but the substrate is relatively undamaged.
Claim 23
Independent Claim
56 words
A method for employing a laser system to process high conductivity link structures forced on a silicon substrate, comprising: generating laser output in a wavelength range of about 1.2 μm to 3.0 μm; and directing the laser output at a high conductivity link structure such that it is effectively processed but the substrate is relatively undamaged.
Claim 24
Dependent Claim
34 words
The method of claim 20 in which the high conductivity link structure has a width, and the laser output has a diameter that is larger than the width of the high conductivity link structure.
Claim 25
Dependent Claim
18 words
The method of claim 20 in which the high conductivity link structure comprises a metal or metal alloy.
Claim 26
Dependent Claim
20 words
The laser system of claim 22 in which the high conductivity link structure is processed in an oxygen rich environment.
Claim 27
Dependent Claim
35 words
The method of claim 20 in which the high conductivity link structure comprises multiple layers and the laser output comprises energy in excess of that which is required to process the high conductivity link structure.
Claim 28
Independent Claim
84 words
A method for employing a laser system to process a highly conductive material of a target structure forced on a substrate; comprising: positioning the target structure in an environment having an oxygen concentration; generating a laser output having energy sufficient to process the material of the target structure; and directing the laser output to process the target material within the environment, wherein the oxygen concentration is sufficient to substantially convert any slag resulting from processing of the target structure to a substantially non-conductive oxide.
Claim 29
Independent Claim
84 words
A method for employing a laser system to process a highly conductive material of a target structure forced on a substrate; comprising: positioning the target structure in an environment having an oxygen concentration; generating a laser output having energy sufficient to process the material of the target structure; and directing the laser output to process the target material within the environment, wherein the oxygen concentration is sufficient to substantially convert any slag resulting from processing of the target structure to a substantially non-conductive oxide.
Claim 30
Dependent Claim
20 words
The method of claim 25 in which the target material comprises metal and the oxygen concentration is at least 50%.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-22 | 1997-05-24 | 1997-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-22 | 2001-05-24 | 2001-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-22 | 2005-05-24 | 2005-11-23 | $7700.00 | Window Closed / Lapsed |