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US5263250A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of manufacturing nozzle plate for ink jet printer

Assignee: Canon Inc
•
Filing: 1991-04-25
•
Granted: 1993-11-23
•
Expires: 2011-04-25
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Abstract

Abstract A plurality of elongated beams are generated by dividing a laser beam, said plurality of beams being respectively applied to corresponding lens elements of a flyeye lens array. The structure is arranged in such a manner that the diameter of the plurality of the beams in the shorter direction is made smaller than that of each of the lens elements, so that the plurality of beams are further divided into a plurality of elongated secondary beams by the flyeye lens. The plurality of the secondary beams are bundled on a diaphragm in such a manner that their lengthwise directions substantially coincide with each other so that a beam pattern is formed. A row of openings arranged in the lengthwise direction of the beam pattern and formed in the diaphragm member are uniformly and efficiently irradiated with the thus-formed beam pattern. Then, the image of the row of openings is projected onto a plastic plate or the like so that a multiplicity of holes are formed in the plate. As a result, a nozzle plate of an ink jet printer head can be accurately and quickly manufactured.

Inventors

  • 👤 Masayuki Nishiwaki
  • 👤 Jun Koide

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 08:02
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/09; G02B27/0938; G02B27/0988; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/066; B23K26/067; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/162; B41J2/1621; B41J2/1632; B41J2/1634; G02B27/0905; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49401

Claims Analysis

Total Claims: 40
Claim 1
Independent Claim 154 words
A method of manufacturing a nozzle plate for an ink jet printer head by applying to a plate a plurality of secondary beams from a flyeye lens including an array of lens elements, the method comprising the steps of: dividing a laser beam to provide a plurality of linear beams, each beam having a width smaller than a corresponding lens element; applying the plurality of linear beams to corresponding lens elements to generate the plurality of linear secondary beams; superposing the plurality of secondary beams on a diaphragm member so they substantially coincide to form a linear beam pattern on the diaphragm member, the lengthwise direction of the beam pattern being disposed in a direction in which openings are arranged in the diaphragm member; and projecting the image of the openings illuminated by the beam pattern onto the surface of the plate, whereby holes are formed therein to provide nozzles for ink jet printing.
Claim 2
Independent Claim 154 words
A method of manufacturing a nozzle plate for an ink jet printer head by applying to a plate a plurality of secondary beams from a flyeye lens including an array of lens elements, the method comprising the steps of: dividing a laser beam to provide a plurality of linear beams, each beam having a width smaller than a corresponding lens element; applying the plurality of linear beams to corresponding lens elements to generate the plurality of linear secondary beams; superposing the plurality of secondary beams on a diaphragm member so they substantially coincide to form a linear beam pattern on the diaphragm member, the lengthwise direction of the beam pattern being disposed in a direction in which openings are arranged in the diaphragm member; and projecting the image of the openings illuminated by the beam pattern onto the surface of the plate, whereby holes are formed therein to provide nozzles for ink jet printing.
Claim 3
Dependent Claim 26 words
A method according to claim 1, wherein at least one of the linear beams includes plural optical components, each of which corresponds to a lens element.
Claim 4
Dependent Claim 16 words
A method according to claim 1, wherein the laser beam is provided by an excimer laser.
Claim 5
Dependent Claim 19 words
A method according to claim 1, wherein the diaphragm member comprises a glass substrate having a chrome pattern thereon.
Claim 6
Dependent Claim 18 words
A method according to claim 1, wherein the diaphragm member comprises a metal plate having a hole therein.
Claim 7
Independent Claim 163 words
A method of manufacturing a printer head for an ink jet printer by applying to a plate a plurality of secondary beams from a flyeye lens including an array of lens elements and affixing the plate to a printer head body, the method comprising the steps of: dividing a laser beam to provide a plurality of linear beams, each said beam having a width smaller than a corresponding lens element; applying the plurality of linear beams to corresponding lens elements to generate the plurality of linear secondary beams; superposing the plurality of secondary beams on a diaphragm member so they substantially coincide to form a linear beam pattern on the diaphragm member, the lengthwise direction of the beam pattern being disposed in a direction in which openings are arranged in the diaphragm member; and projecting the image of the openings illuminated by the beam pattern onto the surface of the plate, whereby holes are formed therein to provide nozzles for ink jet printing.
Claim 8
Independent Claim 163 words
A method of manufacturing a printer head for an ink jet printer by applying to a plate a plurality of secondary beams from a flyeye lens including an array of lens elements and affixing the plate to a printer head body, the method comprising the steps of: dividing a laser beam to provide a plurality of linear beams, each said beam having a width smaller than a corresponding lens element; applying the plurality of linear beams to corresponding lens elements to generate the plurality of linear secondary beams; superposing the plurality of secondary beams on a diaphragm member so they substantially coincide to form a linear beam pattern on the diaphragm member, the lengthwise direction of the beam pattern being disposed in a direction in which openings are arranged in the diaphragm member; and projecting the image of the openings illuminated by the beam pattern onto the surface of the plate, whereby holes are formed therein to provide nozzles for ink jet printing.
Claim 9
Dependent Claim 26 words
A method according to claim 6, wherein at least one of the linear beams includes plural optical components, each of which corresponds to a lens element.
Claim 10
Dependent Claim 16 words
A method according to claim 6, wherein said laser beam is provided by an excimer laser.
Claim 11
Dependent Claim 19 words
A method according to claim 6, wherein the diaphragm member comprises a glass substrate having a chrome pattern thereon.
Claim 12
Dependent Claim 18 words
A method according to claim 6, wherein the diaphragm member comprises a metal plate having a hole therein.
Claim 13
Independent Claim 156 words
A method of manufacturing an ink jet printer by applying to plate a plurality of secondary beams from a flyeye lens including an array of lens elements and affixing the plate to a printer head body, the method comprising the steps of: dividing a laser beam to provide a plurality of linear beams, each beam having a width smaller than a corresponding lens element; applying the plurality of linear beams to corresponding lens elements to generate the plurality of linear secondary beams; superposing the plurality of secondary beams on a diaphragm member so they substantially coincide to form a linear beam pattern on the diaphragm member, the lengthwise direction of the beam pattern being disposed in a direction in which openings are arranged in the diaphragm member; and projecting the image of the openings illuminated by the beam pattern onto the surface of plate, whereby holes are formed therein to provide nozzles for ink jet printing.
Claim 14
Independent Claim 156 words
A method of manufacturing an ink jet printer by applying to plate a plurality of secondary beams from a flyeye lens including an array of lens elements and affixing the plate to a printer head body, the method comprising the steps of: dividing a laser beam to provide a plurality of linear beams, each beam having a width smaller than a corresponding lens element; applying the plurality of linear beams to corresponding lens elements to generate the plurality of linear secondary beams; superposing the plurality of secondary beams on a diaphragm member so they substantially coincide to form a linear beam pattern on the diaphragm member, the lengthwise direction of the beam pattern being disposed in a direction in which openings are arranged in the diaphragm member; and projecting the image of the openings illuminated by the beam pattern onto the surface of plate, whereby holes are formed therein to provide nozzles for ink jet printing.
Claim 15
Dependent Claim 26 words
A method according to claim 11, wherein at least one of the linear beams includes plural optical components, each of which corresponds to a lens element.
Claim 16
Dependent Claim 16 words
A method according to claim 11, wherein the laser beam is provided by an excimer laser.
Claim 17
Dependent Claim 19 words
A method according to claim 11, wherein the diaphragm member comprises a glass substrate having a chrome pattern thereon.
Claim 18
Dependent Claim 18 words
A method according to claim 11, wherein the diaphragm member comprises a metal plate having a hole therein.
Claim 19
Independent Claim 94 words
A method of exposing a workpiece to light via an elongated opening or a row of openings formed in a diaphragm member extending in a predetermined direction, the method comprising the steps of: generating a plurality of secondary beam by applying to flyeye lens having a plurality of lens elements a plurality of linear beams, each having a width smaller than a corresponding lens element; and forming a beam pattern extending in the predetermined direction by superimposing the plurality of secondary beams on the diaphragm member so they substantially coincide on the diaphragm member.
Claim 20
Independent Claim 94 words
A method of exposing a workpiece to light via an elongated opening or a row of openings formed in a diaphragm member extending in a predetermined direction, the method comprising the steps of: generating a plurality of secondary beam by applying to flyeye lens having a plurality of lens elements a plurality of linear beams, each having a width smaller than a corresponding lens element; and forming a beam pattern extending in the predetermined direction by superimposing the plurality of secondary beams on the diaphragm member so they substantially coincide on the diaphragm member.
Claim 21
Dependent Claim 14 words
A method according to claim 16, wherein said linear beam are excimer laser beams.
Claim 22
Dependent Claim 21 words
A method according to claim 16, wherein the image of the diaphragm member formed by the beam pattern confronts the workpiece.
Claim 23
Independent Claim 126 words
A method of manufacturing a nozzle plate for an ink jet printer head by applying a plurality of secondary beams from a flyeye lens having a plurality of lens elements to a diaphragm member having a row of openings formed in a predetermined direction, the method comprising the steps of: `generating the plurality of secondary beams by applying a plurality of linear beams to corresponding said lens elements in the flyeye lens, the width of the linear beams being smaller than said corresponding lens elements; and forming a beam pattern extending in the predetermined direction by superposing the secondary beams on the diaphragm member so that the lengthwise directions thereof substantially coincide with each other for application to the row of openings in the diaphragm member.
Claim 24
Independent Claim 126 words
A method of manufacturing a nozzle plate for an ink jet printer head by applying a plurality of secondary beams from a flyeye lens having a plurality of lens elements to a diaphragm member having a row of openings formed in a predetermined direction, the method comprising the steps of: `generating the plurality of secondary beams by applying a plurality of linear beams to corresponding said lens elements in the flyeye lens, the width of the linear beams being smaller than said corresponding lens elements; and forming a beam pattern extending in the predetermined direction by superposing the secondary beams on the diaphragm member so that the lengthwise directions thereof substantially coincide with each other for application to the row of openings in the diaphragm member.
Claim 25
Dependent Claim 14 words
A method according to claim 19, wherein the linear beams are excimer laser beams.
Claim 26
Dependent Claim 42 words
A method according to claim 19, wherein the image of the row of openings formed by applying the beam pattern to the diaphragm member is made to confront a workpiece to have holes formed therein to provide nozzles for ink jet printing.
Claim 27
Independent Claim 141 words
A method of manufacturing a printer head for an ink jet printer by applying a plurality of secondary beams from a flyeye lens having a plurality of lens elements to a diaphragm member having a row of opening formed in a predetermined direction to form a nozzle plate and of fixing the nozzle plate to a printer head body, the method comprising the steps of: generating the plurality of secondary beams by applying a plurality of linear beams to corresponding said lens elements in the flyeye lens, the width of the linear beams being smaller than corresponding said lens elements; and forming a beam pattern extending in the predetermined direction by superposing the secondary beams on the diaphragm member so that the lengthwise directions thereof substantially coincide with each other for application to the row of openings in the diaphragm member.
Claim 28
Independent Claim 141 words
A method of manufacturing a printer head for an ink jet printer by applying a plurality of secondary beams from a flyeye lens having a plurality of lens elements to a diaphragm member having a row of opening formed in a predetermined direction to form a nozzle plate and of fixing the nozzle plate to a printer head body, the method comprising the steps of: generating the plurality of secondary beams by applying a plurality of linear beams to corresponding said lens elements in the flyeye lens, the width of the linear beams being smaller than corresponding said lens elements; and forming a beam pattern extending in the predetermined direction by superposing the secondary beams on the diaphragm member so that the lengthwise directions thereof substantially coincide with each other for application to the row of openings in the diaphragm member.
Claim 29
Dependent Claim 14 words
A method according to claim 22, wherein said linear beams are excimer laser beams.
Claim 30
Dependent Claim 40 words
A method according to claim 22, wherein the image of the row of openings formed by applying the beam pattern to the diaphragm member is made to confront a workpiece to have holes formed therein to provide the nozzle plate.
Claim 31
Independent Claim 136 words
A method of manufacturing an ink jet printer by applying a plurality of secondary beams from a flyeye lens having a plurality of lens elements to a diaphragm member having a row of openings formed in a predetermined direction to form a nozzle plate and affixing the nozzle plate to a printer head body, the method comprising the steps of: generating the plurality of secondary beams by applying a plurality of linear beams to corresponding said lens elements in the flyeye lens, the width of the linear beams being smaller than corresponding said lens elements; and forming a beam pattern extending in the predetermined direction by superposing the secondary beams on the diaphragm member so that the lengthwise directions thereof substantially coincide with each other for application to the row of openings in the diaphragm member.
Claim 32
Independent Claim 136 words
A method of manufacturing an ink jet printer by applying a plurality of secondary beams from a flyeye lens having a plurality of lens elements to a diaphragm member having a row of openings formed in a predetermined direction to form a nozzle plate and affixing the nozzle plate to a printer head body, the method comprising the steps of: generating the plurality of secondary beams by applying a plurality of linear beams to corresponding said lens elements in the flyeye lens, the width of the linear beams being smaller than corresponding said lens elements; and forming a beam pattern extending in the predetermined direction by superposing the secondary beams on the diaphragm member so that the lengthwise directions thereof substantially coincide with each other for application to the row of openings in the diaphragm member.
Claim 33
Dependent Claim 14 words
A method according to claim 25, wherein said linear beams are excimer laser beams.
Claim 34
Dependent Claim 40 words
A method according to claim 25, wherein the image of the row of openings formed by applying the beam pattern to the diaphragm member is made to confront a workpiece to have holes formed therein to provide the nozzle plate.
Claim 35
Independent Claim 96 words
A method of manufacturing a nozzle plate for an ink jet printer head by using a member having a row of openings in a predetermined direction, the method comprising the steps of: generating a plurality of linear beams, each said beam having a lengthwise direction; superposing the plurality of beams so that their lengthwise directions substantially coincide with said predetermined direction; and exposing a plate with the beams through the row of openings in the member to form a plurality of holes in the plate, thus forming the nozzle plate of the ink jet printer head.
Claim 36
Independent Claim 96 words
A method of manufacturing a nozzle plate for an ink jet printer head by using a member having a row of openings in a predetermined direction, the method comprising the steps of: generating a plurality of linear beams, each said beam having a lengthwise direction; superposing the plurality of beams so that their lengthwise directions substantially coincide with said predetermined direction; and exposing a plate with the beams through the row of openings in the member to form a plurality of holes in the plate, thus forming the nozzle plate of the ink jet printer head.
Claim 37
Independent Claim 90 words
A method of manufacturing an ink jet printer head by using a member having a row of openings oriented in a predetermined direction, the method comprising the steps of: generating a plurality of linear beams, each having a lengthwise direction; superposing the plurality of beams so that their lengthwise directions substantially coincide with said predetermined direction; and exposing a plate with the beams through the row of openings in the member to form a plurality of holes in the plate, thus forming a portion of the ink jet printer head.
Claim 38
Independent Claim 90 words
A method of manufacturing an ink jet printer head by using a member having a row of openings oriented in a predetermined direction, the method comprising the steps of: generating a plurality of linear beams, each having a lengthwise direction; superposing the plurality of beams so that their lengthwise directions substantially coincide with said predetermined direction; and exposing a plate with the beams through the row of openings in the member to form a plurality of holes in the plate, thus forming a portion of the ink jet printer head.
Claim 39
Independent Claim 88 words
A method of manufacturing an ink jet printer using a member having a row of openings in a predetermined direction, the method comprising the steps of: generating a plurality of linear beams, each said beam having a lengthwise direction; superposing the plurality of beams so that their lengthwise directions substantially coincide with said predetermined direction; and exposing a plate with the beams through the row of openings in the member to form a plurality of holes in the plate, thus forming a portion of the ink jet printer.
Claim 40
Independent Claim 88 words
A method of manufacturing an ink jet printer using a member having a row of openings in a predetermined direction, the method comprising the steps of: generating a plurality of linear beams, each said beam having a lengthwise direction; superposing the plurality of beams so that their lengthwise directions substantially coincide with said predetermined direction; and exposing a plate with the beams through the row of openings in the member to form a plurality of holes in the plate, thus forming a portion of the ink jet printer.

References Cited (Backward Citations)

JPS57181873A Cited
EP0066432A2 Cited
US4683524A Cited
US4682885A Cited
JPS6123592A Cited
JPS622540A Cited
JPS62115718A Cited
JPS62115719A Cited
JPH01313196A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-11-22 1997-05-24 1997-11-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-11-22 2001-05-24 2001-11-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-11-22 2005-05-24 2005-11-23 $7700.00 Window Closed / Lapsed

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