US5262842A
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US
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Optical sensor having a wave guide substrate with interferometer integrated therein
Assignee: IOT Entwicklungsgesellschaft fur integrierte Optiktechnologie mb
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Filing: 1991-10-18
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Granted: 1993-11-16
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Expires: 2011-10-18
Abstract
Abstract A sensor for detecting substances including hydrocarbons includes an integrated optical interferometer in the form of a Mach-Zehnder interferometer having a measuring arm and a comparison arm in a wave guide substrate. A polymer such as polysiloxane is applied as a superstrate to the wave guide in the region of the measuring arm. This superstrate can be penetrated by the substance to be detected. Swelling response, gas absorption, refractive index of the polymer and doping with chromophores or fluorophores, layer thickness and layer length are all parameters which can be adapted for a substance-selective performance. Other means of selection include various superstrates on a number of interferometers mounted parallel on a chip and polychrome measurements in combination with methods of pattern recognition constitute further means of selection.
Inventors
- 👤 Gunter Gauglitz
- 👤 Jan Ingenhoff
- 👤 Norbert Fabricius
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:07
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/75; G01N21/77; G01N21/7703; G01N21/17; G01N21/41; G01N21/45; G01J; G01J9/00; G01J9/02; G01J2009/0226; G01J2009/023; G01N2021/7769; G01N2021/7779
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
66 words
An optical sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; and, said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate.
Claim 2
Dependent Claim
66 words
An optical sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; and, said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate.
Claim 3
Dependent Claim
38 words
The sensor of claim 1, wherein said polysiloxane polymer and said wave guide have respective indices of refraction with the index of refraction of said polysiloxane polymer being less than the index of refraction of said wave guide.
Claim 4
Dependent Claim
28 words
The sensor of claim 1, wherein a polychrome light source is used and the spectral dependence of the action of the substance on the measurement arm is evaluated.
Claim 5
Dependent Claim
29 words
The sensor of claim 1, wherein the polysiloxane polymer contains, as a functional group, a material selected from the group consisting of vinyl, mercaptopropyl, acryl, phenyl, ethyl and hydrogen.
Claim 6
Dependent Claim
11 words
The sensor of claim 1, wherein the substances detected are alkanes.
Claim 7
Dependent Claim
17 words
The sensor of claim 1, wherein the substances detected are hydrocarbons including oxygenated hydrocarbons and halogenated hydrocarbons.
Claim 8
Dependent Claim
18 words
The sensor of claim 1, wherein said polysiloxane polymer is cured to have a predetermined index of refraction.
Claim 9
Dependent Claim
74 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrated by said substance and defining a superstrate on said wave guide substrate; and, said polysiloxane polymer swelling when penetrated by said substance.
Claim 10
Dependent Claim
74 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrated by said substance and defining a superstrate on said wave guide substrate; and, said polysiloxane polymer swelling when penetrated by said substance.
Claim 11
Dependent Claim
71 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrate by said substance and defining a superstrate on said wave guide substrate; and, said interferometer being a Mach-Zehnder interferometer.
Claim 12
Dependent Claim
71 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrate by said substance and defining a superstrate on said wave guide substrate; and, said interferometer being a Mach-Zehnder interferometer.
Claim 13
Dependent Claim
89 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrate by said substances and defining a superstrate on said wave guide substrate; a tunable light source for illuminating said interferometer; and, means for evaluating the spectral dependence of the action of the substance on the measurement arm.
Claim 14
Dependent Claim
89 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrate by said substances and defining a superstrate on said wave guide substrate; a tunable light source for illuminating said interferometer; and, means for evaluating the spectral dependence of the action of the substance on the measurement arm.
Claim 15
Dependent Claim
86 words
An optical sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate; and, a plurality of interferometers having different polymer superstrates over the measuring arms thereof the combined on an integrated optical chip.
Claim 16
Dependent Claim
86 words
An optical sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate; and, a plurality of interferometers having different polymer superstrates over the measuring arms thereof the combined on an integrated optical chip.
Claim 17
Dependent Claim
108 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; a plurality of interferometers optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate; said plurality of interferometers having different polymer substrates over the measuring arms thereof and being combined on an integrated optical chip; and, the substance producing different effects in said plurality of interferometers and pattern recognition methods being utilized to identify the substance.
Claim 18
Dependent Claim
108 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; a plurality of interferometers optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate; said plurality of interferometers having different polymer substrates over the measuring arms thereof and being combined on an integrated optical chip; and, the substance producing different effects in said plurality of interferometers and pattern recognition methods being utilized to identify the substance.
Claim 19
Dependent Claim
80 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate; and, the sensitivity to the substance being adjusted by varying the polymerization of the polymer superstrate.
Claim 20
Dependent Claim
80 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate; and, the sensitivity to the substance being adjusted by varying the polymerization of the polymer superstrate.
Claim 21
Dependent Claim
74 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate; and, chromophores or fluorophores being included in said polymer superstrate.
Claim 22
Dependent Claim
74 words
A sensor for detecting a substance, the sensor comprising: a wave guide substrate; an interferometer optically integrated in said wave guide substrate and having a measuring arm and a comparison arm; a polysiloxane polymer applied to said wave guide substrate in the region of said measuring arm; said polysiloxane polymer being penetrable by said substance and defining a superstrate on said wave guide substrate; and, chromophores or fluorophores being included in said polymer superstrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-11-15 | 1997-05-17 | 1997-11-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-15 | 2001-05-17 | 2001-11-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-15 | 2005-05-17 | 2005-11-16 | $7700.00 | Window Closed / Lapsed |