US5262001A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dry etching method for perovskite oxide film
Assignee: Sharp Corp
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Filing: 1992-09-17
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Granted: 1993-11-16
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Expires: 2012-09-17
Abstract
Abstract A dry etching method for perovskite oxide film includes introduction of a hydrogen gas and an acetylacetone- or n-butyl acetate gas into an electron cyclotron resonance plasma etching system simultaneously so as to etch a perovskite oxide film.
Inventors
- 👤 Daisuke Takehara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 03:58
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P50/285
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
36 words
A dry etching method for perovskite oxide film, comprising introducing hydrogen gas and acetylacetone gas or n-butyl acetate gas into an electron cyclotron resonance plasma etching system simultaneously so as to etch a perovskite oxide film.
Claim 2
Dependent Claim
36 words
A dry etching method for perovskite oxide film, comprising introducing hydrogen gas and acetylacetone gas or n-butyl acetate gas into an electron cyclotron resonance plasma etching system simultaneously so as to etch a perovskite oxide film.
Claim 3
Dependent Claim
23 words
A method as set forth in claim 1, wherein said perovskite oxide film includes a Pb-Zr-TiO 3 film and a Pb-La-Zn-TiO 3 film.
Claim 4
Dependent Claim
32 words
A method as set forth in claim 1, wherein the hydrogen gas is introduced into said electron cyclotron resonance plasma etching system at a flow rate of from 5 to 20 SCCM.
Claim 5
Dependent Claim
36 words
A method as set forth in claim 1, wherein the acetylacetone gas or n-butyl acetate gas is introduced into said electron cyclotron resonance plasma etching system at a flow rate of from 10 to 100 SCCM.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-15 | 1997-05-17 | 1997-11-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-15 | 2001-05-17 | 2001-11-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-15 | 2005-05-17 | 2005-11-16 | $7700.00 | Window Closed / Lapsed |