Semiconductor surface resistivity probe with semiconductor temperature control

Claim 1

An apparatus for measuring the resistivity of a surface of a semiconductor wafer as a function of temperature of the surface, comprising: a heat transfer means thermally coupled to the semiconductor wafer for transferring heat to the semiconductor wafer, said heat transferred to the semiconductor wafer at a rate determined by a heat transfer signal input to said heat transfer means; a temperature sensor thermally coupled to the semiconductor wafer, said temperature sensor outputting a temperature signal indicating a temperature of the surface; a four-point resistivity probe electrically coupled to the surface of the semiconductor wafer, said four-point probe outputting a resistivity signal indicating the resistivity of the surface; and a signal processing means, coupled to receive said resistivity signal and said temperature signal, and coupled to output said heat transfer signal to said heat transfer means, for adjusting said heat transfer signal until said temperature signal indicates the surface of the semiconductor wafer is at a desired temperature, said signal processing means also for outputting a resistivity value corresponding to said resistivity signal when said temperature signal indicates that the surface of the semiconductor wafer is at said desired temperature.

Claim 2

An apparatus for measuring the resistivity of a surface of a semiconductor wafer as a function of temperature of the surface, comprising: a heat transfer means thermally coupled to the semiconductor wafer for transferring heat to the semiconductor wafer, said heat transferred to the semiconductor wafer at a rate determined by a heat transfer signal input to said heat transfer means; a temperature sensor thermally coupled to the semiconductor wafer, said temperature sensor outputting a temperature signal indicating a temperature of the surface; a four-point resistivity probe electrically coupled to the surface of the semiconductor wafer, said four-point probe outputting a resistivity signal indicating the resistivity of the surface; and a signal processing means, coupled to receive said resistivity signal and said temperature signal, and coupled to output said heat transfer signal to said heat transfer means, for adjusting said heat transfer signal until said temperature signal indicates the surface of the semiconductor wafer is at a desired temperature, said signal processing means also for outputting a resistivity value corresponding to said resistivity signal when said temperature signal indicates that the surface of the semiconductor wafer is at said desired temperature.

Claim 6

A method of measuring resistivity as a function of temperature on the surface of a semiconductor wafer, comprising the steps of: mounting a temperature sensor in thermal contact with the semiconductor wafer; applying the contacts of a four-point resistivity probe to the surface of the semiconductor wafer; transferring heat between said semiconductor wafer and a surrounding environment to cause a temperature measured by aid temperature sensor to vary over a desired temperature range; and measuring, at a plurality of measured temperatures within said desired temperature range, a resistivity value using said four-point resistivity probe.

Claim 7

A method of measuring resistivity as a function of temperature on the surface of a semiconductor wafer, comprising the steps of: mounting a temperature sensor in thermal contact with the semiconductor wafer; applying the contacts of a four-point resistivity probe to the surface of the semiconductor wafer; transferring heat between said semiconductor wafer and a surrounding environment to cause a temperature measured by aid temperature sensor to vary over a desired temperature range; and measuring, at a plurality of measured temperatures within said desired temperature range, a resistivity value using said four-point resistivity probe.

Claim 10

A method for measuring resistivity as a function of temperature on the surface of a semiconductor wafer, comprising the steps of: coupling the semiconductor wafer to a heat transfer means, wherein said heat transfer means changes a temperature of the semiconductor wafer by transferring heat between the semiconductor wafer and a surrounding environment; mounting a temperature sensor in thermal contact with the semiconductor wafer; applying the contacts of a four-point resistivity probe to the surface of the semiconductor wafer; holding the semiconductor wafer at a fixed temperature, using said heat transfer means and said temperature sensor; and measuring, at said fixed temperature, a resistivity value using said four-point resistivity probe.

Claim 11

A method for measuring resistivity as a function of temperature on the surface of a semiconductor wafer, comprising the steps of: coupling the semiconductor wafer to a heat transfer means, wherein said heat transfer means changes a temperature of the semiconductor wafer by transferring heat between the semiconductor wafer and a surrounding environment; mounting a temperature sensor in thermal contact with the semiconductor wafer; applying the contacts of a four-point resistivity probe to the surface of the semiconductor wafer; holding the semiconductor wafer at a fixed temperature, using said heat transfer means and said temperature sensor; and measuring, at said fixed temperature, a resistivity value using said four-point resistivity probe.

Claim 12

An apparatus for measuring the resistivity of a surface of a semiconductor wafer as a function of temperature of the surface, comprising: a heat transfer means adapted to transfer heat between said heat transfer means and a semiconductor wafer, said heat transfer means thermally coupled to said semiconductor wafer when said semiconductor wafer is under test, said heat transferred to said semiconductor wafer at a rate determined by a heat transfer signal input to said heat transfer means; a temperature sensor adapted to sense a temperature of said semiconductor wafer, said temperature sensor thermally coupled to said semiconductor wafer when said semiconductor wafer is under test, wherein said temperature sensor outputs a temperature signal indicating said temperature of the surface of said semiconductor wafer; a four-point resistivity probe adapted to supply a test current to said semiconductor wafer and adapted to measure a voltage on said surface of said semiconductor wafer, said four-point resistivity probe electrically coupled to said surface of said semiconductor wafer when said semiconductor wafer is under test, said four-point resistivity probe outputting a resistivity signal indicating a resistivity value of said semiconductor wafer when said semiconductor wafer is under test; and a signal processing means, coupled to receive said resistivity signal and said temperature signal, coupled to supply said test current, and coupled to output said heat transfer signal to said heat transfer means, for adjusting said heat transfer signal until said temperature signal indicates a desired temperature, said signal processing means also for outputting a resistivity value corresponding to said resistivity signal when said temperature signal indicates said desired temperature.

Claim 13

An apparatus for measuring the resistivity of a surface of a semiconductor wafer as a function of temperature of the surface, comprising: a heat transfer means adapted to transfer heat between said heat transfer means and a semiconductor wafer, said heat transfer means thermally coupled to said semiconductor wafer when said semiconductor wafer is under test, said heat transferred to said semiconductor wafer at a rate determined by a heat transfer signal input to said heat transfer means; a temperature sensor adapted to sense a temperature of said semiconductor wafer, said temperature sensor thermally coupled to said semiconductor wafer when said semiconductor wafer is under test, wherein said temperature sensor outputs a temperature signal indicating said temperature of the surface of said semiconductor wafer; a four-point resistivity probe adapted to supply a test current to said semiconductor wafer and adapted to measure a voltage on said surface of said semiconductor wafer, said four-point resistivity probe electrically coupled to said surface of said semiconductor wafer when said semiconductor wafer is under test, said four-point resistivity probe outputting a resistivity signal indicating a resistivity value of said semiconductor wafer when said semiconductor wafer is under test; and a signal processing means, coupled to receive said resistivity signal and said temperature signal, coupled to supply said test current, and coupled to output said heat transfer signal to said heat transfer means, for adjusting said heat transfer signal until said temperature signal indicates a desired temperature, said signal processing means also for outputting a resistivity value corresponding to said resistivity signal when said temperature signal indicates said desired temperature.