US5260519A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multilayer ceramic substrate with graded vias
Assignee: International Business Machines Corp
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Filing: 1992-09-23
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Granted: 1993-11-09
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Expires: 2012-09-23
Abstract
Abstract Disclosed is a multilayer ceramic substrate for electronic applications including: (a) at least one internal layer having vias filled with a metallic material; (b) at least one sealing layer having vias filled with a composite material that is a mixture of ceramic and metallic materials; and (c) at least one transition layer located between the internal and sealing layers having vias filled with a composite material that is a mixture of ceramic and metallic materials but having less ceramic and more metallic material than the sealing layer vias and less metallic material than the internal layer vias. Also disclosed is a method of forming the multilayer ceramic substrate.
Inventors
- 👤 John U. Knickerbocker
- 👤 Charles H. Perry
- 👤 Donald R. Wall
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:00
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/4038; H05K3/4053; H05K3/4061; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/095; H10W70/60; H10W70/611; H10W70/62; H10W70/63; H10W70/635; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K2201/00; H05K2201/02; H05K2201/0203; H05K2201/0263; H05K2201/0269; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/096; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
131 words
A multilayer ceramic substrate for electronic applications comprising: (a) at least one internal layer having vias filled with a metallic material; (b) at least one sealing layer having vias filled with a composite material that is a mixture of ceramic and metallic materials; and (c) at least one transition layer located between the internal and sealing layers having vias filled with a composite material that is a mixture of ceramic and metallic materials but having less ceramic and more metallic material than the sealing layer vias and less metallic material than the internal layer vias, wherein the vias from the at least one sealing layer, the vias from the at least one transition layer, and the vias from the at least one internal layer, respectively, are in alignment with each other.
Claim 2
Dependent Claim
131 words
A multilayer ceramic substrate for electronic applications comprising: (a) at least one internal layer having vias filled with a metallic material; (b) at least one sealing layer having vias filled with a composite material that is a mixture of ceramic and metallic materials; and (c) at least one transition layer located between the internal and sealing layers having vias filled with a composite material that is a mixture of ceramic and metallic materials but having less ceramic and more metallic material than the sealing layer vias and less metallic material than the internal layer vias, wherein the vias from the at least one sealing layer, the vias from the at least one transition layer, and the vias from the at least one internal layer, respectively, are in alignment with each other.
Claim 3
Dependent Claim
28 words
The ceramic substrate of claim 1 wherein the internal layer vias further comprise a ceramic material in an amount less than that present in the transition layer vias.
Claim 4
Dependent Claim
63 words
The ceramic substrate of claim 1 wherein the ceramic substrate further comprises a top surface and a bottom surface and each of the top and bottom surfaces comprise at least internal, transition and sealing layers with the layers arranged so that the internal layers are internal to the ceramic substrate and the sealing layers are toward the outer periphery of the ceramic substrate.
Claim 5
Dependent Claim
14 words
The ceramic substrate of claim 1 wherein there are a plurality of internal layers.
Claim 6
Dependent Claim
14 words
The ceramic substrate of claim 1 wherein there are a plurality of sealing layers.
Claim 7
Dependent Claim
14 words
The ceramic substrate of claim 1 wherein there are a plurality of transition layers.
Claim 8
Dependent Claim
19 words
The ceramic substrate of claim 6 wherein the vias in the plurality of transition layers have the same composition.
Claim 9
Dependent Claim
73 words
The ceramic substrate of claim 6 wherein the vias in each of the transition layers have compositions that differ from the vias in each of the other transition layers and are arranged in order so that the transition layer vias with the least amount of ceramic material are adjacent to the internal layer vias and the transition layer vias with the greatest amount of ceramic material are adjacent to the sealing layer vias.
Claim 10
Dependent Claim
54 words
The ceramic substrate of claim 1 further comprising: at least one additional internal layer having vias filled with a metallic material; and at least one additional transition layer adjacent to said additional internal layer, the additional transition layer having vias filled with a composite material that is a mixture of ceramic and metallic materials.
Claim 11
Dependent Claim
135 words
A multilayer glass ceramic substrate for electronic applications comprising: (a) at least one internal layer having vias filled with a metallic material; (b) at least one sealing layer having vias filled with a composite material that is a mixture of glass ceramic and metallic materials; and (c) at least one transition layer located between the internal and sealing layers having vias filled with a composite material that is a mixture of glass ceramic and metallic materials but having less glass ceramic and more metallic material than the sealing layer vias and less metallic material than the internal layer vias, wherein the vias from the at least one sealing layer, the vias from the at least one transition layer, and the vias from the at least one internal layer, respectively, are in alignment with each other.
Claim 12
Dependent Claim
135 words
A multilayer glass ceramic substrate for electronic applications comprising: (a) at least one internal layer having vias filled with a metallic material; (b) at least one sealing layer having vias filled with a composite material that is a mixture of glass ceramic and metallic materials; and (c) at least one transition layer located between the internal and sealing layers having vias filled with a composite material that is a mixture of glass ceramic and metallic materials but having less glass ceramic and more metallic material than the sealing layer vias and less metallic material than the internal layer vias, wherein the vias from the at least one sealing layer, the vias from the at least one transition layer, and the vias from the at least one internal layer, respectively, are in alignment with each other.
Claim 13
Dependent Claim
28 words
The ceramic substrate of claim 10 wherein the internal layer vias further comprise a ceramic material in an amount less than that present in the transition layer vias.
Claim 14
Dependent Claim
17 words
The ceramic substrate of claim 11 wherein the ceramic material in the internal layer vias is alumina.
Claim 15
Dependent Claim
18 words
The ceramic substrate of claim 11 wherein the ceramic material in the internal layer vias is glass ceramic.
Claim 16
Dependent Claim
63 words
The ceramic substrate of claim 10 wherein the ceramic substrate further comprises a top surface and a bottom surface and each of the top and bottom surfaces comprise at least internal, transition and sealing layers with the layers arranged so that the internal layers are internal to the ceramic substrate and the sealing layers are toward the outer periphery of the ceramic substrate.
Claim 17
Dependent Claim
14 words
The ceramic substrate of claim 10 wherein there are a plurality of internal layers.
Claim 18
Dependent Claim
14 words
The ceramic substrate of claim 10 wherein there are a plurality of sealing layers.
Claim 19
Dependent Claim
14 words
The ceramic substrate of claim 10 wherein there are a plurality of transition layers.
Claim 20
Dependent Claim
19 words
The ceramic substrate of claim 17 wherein the vias in the plurality of transition layers have the same composition.
Claim 21
Dependent Claim
75 words
The ceramic substrate of claim 17 wherein the vias in each of the transition layers have compositions that differ from the vias in each of the other transition layers and are arranged in order so that the transition layer vias with the least amount of glass ceramic material are adjacent to the internal layer vias and the transition layer vias with the greatest amount of glass ceramic material are adjacent to the sealing layer vias.
Claim 22
Dependent Claim
54 words
The ceramic substrate of claim 10 further comprising: at least one additional internal layer having vias filled with a metallic material; and at least one additional transition layer adjacent to said additional internal layer, the additional transition layer having vias filled with a composite material that is a mixture of glass and metallic materials.
Claim 23
Dependent Claim
31 words
The ceramic substrate of claim 10 wherein the via composition of the sealing layer vias comprises 40 to 90 volume % glass ceramic and 60 to 10 volume % metallic material.
Claim 24
Dependent Claim
22 words
The ceramic substrate of claim 21 wherein the metallic material is selected from the group consisting of copper, silver, palladium and gold.
Claim 25
Dependent Claim
25 words
The ceramic substrate of claim 10 wherein the via composition of the transition layer vias comprises at least about 6 volume % glass ceramic material.
Claim 26
Dependent Claim
21 words
The ceramic substrate of claim 10 wherein the glass ceramic material is selected from the group consisting of cordierite and spodumene.
Claim 27
Independent Claim
147 words
A method of fabricating a multilayer ceramic substrate for electronic applications, the multilayer ceramic substrate comprising at least one internal layer having vias filled with a metallic material and at least one sealing layer having vias filled with a composite material that is a mixture of ceramic and metallic materials, the method comprising the step of: interposing at least one transition layer between the internal layer and the sealing layer, the transition layer having vias filled with a composite material that is a mixture of ceramic and metallic materials but having less ceramic and more metallic material than the sealing layer vias and less metallic material than the internal layer vias, wherein the vias from the at least one sealing layer, the vias from the at least one transition layer, and the vias from the at least one internal layer, respectively, are in alignment with each other.
Claim 28
Independent Claim
147 words
A method of fabricating a multilayer ceramic substrate for electronic applications, the multilayer ceramic substrate comprising at least one internal layer having vias filled with a metallic material and at least one sealing layer having vias filled with a composite material that is a mixture of ceramic and metallic materials, the method comprising the step of: interposing at least one transition layer between the internal layer and the sealing layer, the transition layer having vias filled with a composite material that is a mixture of ceramic and metallic materials but having less ceramic and more metallic material than the sealing layer vias and less metallic material than the internal layer vias, wherein the vias from the at least one sealing layer, the vias from the at least one transition layer, and the vias from the at least one internal layer, respectively, are in alignment with each other.
Claim 29
Dependent Claim
27 words
The method of claim 25 wherein the internal layer vias further comprise a ceramic material in an amount less than that present in the transition layer vias.
Claim 30
Dependent Claim
62 words
The method of claim 25 wherein the ceramic substrate further comprises a top surface and a bottom surface and each of the top and bottom surfaces comprise at least internal, transition and sealing layers with the layers arranged so that the internal layers are internal to the ceramic substrate and the sealing layers are toward the outer periphery of the ceramic substrate.
Claim 31
Dependent Claim
13 words
The method of claim 25 wherein there are a plurality of internal layers.
Claim 32
Dependent Claim
13 words
The method of claim 25 wherein there are a plurality of sealing layers.
Claim 33
Dependent Claim
13 words
The method of claim 25 wherein there are a plurality of transition layers.
Claim 34
Dependent Claim
18 words
The method of claim 30 wherein the vias in the plurality of transition layers have the same composition.
Claim 35
Dependent Claim
72 words
The method of claim 30 wherein the vias in each of the transition layers have compositions that differ from the vias in each of the other transition layers and are arranged in order so that the transition layer vias with the least amount of ceramic material are adjacent to the internal layer vias and the transition layer vias with the greatest amount of ceramic material are adjacent to the sealing layer vias.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-08 | 1997-05-10 | 1997-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-08 | 2001-05-10 | 2001-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-08 | 2005-05-10 | 2005-11-09 | $7700.00 | Window Closed / Lapsed |