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US5260265A
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US
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Production of oxide superconducting films by multilayer deposition
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1992-01-10
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Granted: 1993-11-09
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Expires: 2012-01-10
Abstract
Abstract An Improved method of manufacturing superconducting ceramics in the form of a thin film are described. The thin film is first formed of a superimposed structure composed of three films which contain a rare earth metal, an alkalline earth metal and copper respectively. Then the superimposed thin film is fired to convert to a superconducting film.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:49
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/731; Y10S505/732; Y10S505/739; Y10S505/741; Y10S505/742
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
62 words
A method of forming a superconducting ceramic film comprising: forming at least one layer on a surface to be coated, said layer consisting of a plurality of superimposed thin films, each of which contains a different metallic constituent of a superconducting ceramic material; and firing said layer in an oxidizing gas containing atmosphere and transforming the same to said superconducting ceramic film.
Claim 2
Independent Claim
62 words
A method of forming a superconducting ceramic film comprising: forming at least one layer on a surface to be coated, said layer consisting of a plurality of superimposed thin films, each of which contains a different metallic constituent of a superconducting ceramic material; and firing said layer in an oxidizing gas containing atmosphere and transforming the same to said superconducting ceramic film.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein said thin films are formed by vacuum evaporation deposition, sputtering, printing, or vapor phase method.
Claim 4
Independent Claim
77 words
A method of forming a film of superconducting, metallic oxide ceramic comprising: forming a layer on a surface to be coated, said layer including different metallic constituents of a superconducting ceramic material, wherein said layer is initially formed from a plurality of thin films, each of which containing at least one of said metallic constituents, and firing said layer in an oxygen containing atmosphere and transforming the same to said film of said superconducting, metallic oxide ceramic.
Claim 5
Independent Claim
77 words
A method of forming a film of superconducting, metallic oxide ceramic comprising: forming a layer on a surface to be coated, said layer including different metallic constituents of a superconducting ceramic material, wherein said layer is initially formed from a plurality of thin films, each of which containing at least one of said metallic constituents, and firing said layer in an oxygen containing atmosphere and transforming the same to said film of said superconducting, metallic oxide ceramic.
References Cited (Backward Citations)
US5100863A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-08 | 1997-05-10 | 1997-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-08 | 2001-05-10 | 2001-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-08 | 2005-05-10 | 2005-11-09 | $7700.00 | Window Closed / Lapsed |