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US5258685A Expired / Lapsed US ⏱️ 0.0 years remaining

Field emission electron source employing a diamond coating

Assignee: Motorola Solutions Inc
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Filing: 1992-05-15
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Granted: 1993-11-02
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Expires: 2012-05-15
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Abstract

Abstract A field emission electron emitter including a coating of diamond material disposed on a surface of a selectively formed conductive/semiconductive electrode wherein carbon ions are implanted at a surface of the electrode to function as nucleation sites for the diamond formation. A second field emission electron emitter is constructed by implanting carbon ions at a surface of a selectively shaped substrate to function as nucleation sites for the diamond formation. A conductive layer is deposited over the diamond and the substrate is removed to leave an electron emitter with a diamond coating.

Inventors

  • 👤 James E. Jaskie
  • 👤 Robert C. Kane

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 02:48
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; B; B82; B82Y; B82Y15/00; H01J1/00; H01J1/02; H01J1/30; H01J1/304; H01J1/3042; H01J2201/00; H01J2201/30; H01J2201/304; H01J2201/30446; H01J2201/30453; H01J2201/30457

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 57 words
A field emission electron emitter comprising: a selectively formed conductive/semiconductive electrode having a major surface; a plurality of ion implanted nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and at least a diamond crystallite disposed on the major surface of the conductive/semiconductive electrode and at a nucleation site of the plurality of nucleation sites.
Claim 2
Dependent Claim 57 words
A field emission electron emitter comprising: a selectively formed conductive/semiconductive electrode having a major surface; a plurality of ion implanted nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and at least a diamond crystallite disposed on the major surface of the conductive/semiconductive electrode and at a nucleation site of the plurality of nucleation sites.
Claim 3
Dependent Claim 51 words
A field emission electron emitter comprising: a selectively formed conductive/semiconductive electrode having a major surface; a plurality of ion implanted nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and a substantialIy uniform diamond coating disposed on at least a part of the major surface of the conductive/semiconductive electrode.
Claim 4
Dependent Claim 51 words
A field emission electron emitter comprising: a selectively formed conductive/semiconductive electrode having a major surface; a plurality of ion implanted nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and a substantialIy uniform diamond coating disposed on at least a part of the major surface of the conductive/semiconductive electrode.
Claim 5
Dependent Claim 95 words
A field emission electron device comprising: a field emission electron emitter including a selectively formed conductive/semiconductive electrode having a major surface; and a plurality of ion implanted nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and at least a first diamond crystallite disposed on the major surface of the conductive/semiconductive electrode and at a nucleation site of the plurality of nucleation sites; an emission controlling electrode proximally disposed with respect to the electron emitter for controlling the emission rate of electrons from the electron emitter; and an anode for collecting emitted electrons.
Claim 6
Dependent Claim 95 words
A field emission electron device comprising: a field emission electron emitter including a selectively formed conductive/semiconductive electrode having a major surface; and a plurality of ion implanted nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and at least a first diamond crystallite disposed on the major surface of the conductive/semiconductive electrode and at a nucleation site of the plurality of nucleation sites; an emission controlling electrode proximally disposed with respect to the electron emitter for controlling the emission rate of electrons from the electron emitter; and an anode for collecting emitted electrons.
Claim 7
Dependent Claim 92 words
A field emission electron device comprising: a field emission electron emitter including a selectively formed conductive/semiconductive electrode having a major surface; a plurality of ion implanted nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and a substantially uniform diamond coating disposed on at least a part of the major surface of the conductive/semiconductive electrode; an emission controlling electrode proximally disposed with respect to the electron emitter for controlling the emission rate of electrons from the electron emitter; and an anode for collecting at least some of any emitted electrons.
Claim 8
Dependent Claim 92 words
A field emission electron device comprising: a field emission electron emitter including a selectively formed conductive/semiconductive electrode having a major surface; a plurality of ion implanted nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and a substantially uniform diamond coating disposed on at least a part of the major surface of the conductive/semiconductive electrode; an emission controlling electrode proximally disposed with respect to the electron emitter for controlling the emission rate of electrons from the electron emitter; and an anode for collecting at least some of any emitted electrons.
Claim 9
Dependent Claim 58 words
An electron emitter comprising: a selectively formed conductive/semiconductive electrode having a major surface; a plurality of ion implanted carbon nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and at least a diamond crystallite disposed on the major surface of the conductive/semiconductive electrode and at a carbon nucleation site of the plurality of carbon nucleation sites.
Claim 10
Dependent Claim 58 words
An electron emitter comprising: a selectively formed conductive/semiconductive electrode having a major surface; a plurality of ion implanted carbon nucleation sites disposed on the major surface of the conductive/semiconductive electrode; and at least a diamond crystallite disposed on the major surface of the conductive/semiconductive electrode and at a carbon nucleation site of the plurality of carbon nucleation sites.
Claim 11
Dependent Claim 27 words
A field emission electron emitter comprising: a layer of conductive/semiconductive material; and a diamond coating disposed on at least a part of the layer of conductive/semiconductive material.
Claim 12
Dependent Claim 27 words
A field emission electron emitter comprising: a layer of conductive/semiconductive material; and a diamond coating disposed on at least a part of the layer of conductive/semiconductive material.
Claim 13
Dependent Claim 37 words
A field emission electron emitter as claimed in claim 6 wherein the layer of conductive/semiconductive material is formed with a relatively sharp projection having an extended tip and the diamond coating is disposed on the extended tip.
Claim 14
Dependent Claim 23 words
A field emission electron emitter as claimed in claim 6 wherein the diamond coating includes a substantially uniformly distributed plurality of diamond crystallites.

References Cited (Backward Citations)

US3921022A Cited
US4084942A Cited
US4835438A Cited

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