US5258236A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi-layer thin film structure and parallel processing method for fabricating same
Assignee: GlobalFoundries Inc
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Filing: 1991-05-03
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Granted: 1993-11-02
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Expires: 2011-05-03
Abstract
Abstract A method and apparatus for releasing a workpiece from a substrate including providing a substrate which is transparent to a predetermined wavelength of electromagnetic radiation; forming, on the substrate, a separation layer which degrades in response to the predetermined radiation; providing the workpiece on the separation layer; and directing the predetermined radiation at the separation layer through the transparent substrate so as to degrade the separation layer and to separate the workpiece from the substrate.
Inventors
- 👤 Gnanalingam Arjavalingam
- 👤 Alina Deutsch
- 👤 Fuad E. Doany
- 👤 Bruce K. Furman
- 👤 Donald J. Hunt
- 👤 Chandrasekhar Narayan
- 👤 Modest M. Oprysko
- 👤 Sampath Purushothaman
- 👤 Vincent Ranieri
- 👤 Stephen Renick
- 👤 Jane M. Shaw
- 👤 Janusz S. Wilczynski
- 👤 David F. Witman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 10:20
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H05; H05K; H05K3/00; H05K3/0011; H05K3/46; H10P72/7424; H10P72/743; Y; Y10; Y10T; Y10T156/00; Y10T156/11; Y10T156/1153; Y10T156/1158; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528; Y10T428/12535; Y10T428/12542; Y10T428/12549; Y10T428/12556; Y10T428/12569; Y10T428/12611
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
59 words
A structure for receiving electromagnetic radiation having a wavelength and an energy, the structure comprising: a substrate which is transparent to the wavelength of the electromagnetic radiation; a separation layer disposed on said substrate, said separation layer degrading in response to the energy of the electromagnetic radiation; and a multi-layer interconnect thin film stack disposed on said separation layer.
Claim 2
Dependent Claim
59 words
A structure for receiving electromagnetic radiation having a wavelength and an energy, the structure comprising: a substrate which is transparent to the wavelength of the electromagnetic radiation; a separation layer disposed on said substrate, said separation layer degrading in response to the energy of the electromagnetic radiation; and a multi-layer interconnect thin film stack disposed on said separation layer.
Claim 3
Dependent Claim
14 words
The structure as defined in claim 1, wherein said separation layer is a polymer.
Claim 4
Dependent Claim
12 words
The structure as defined in claim 2, wherein said polymer is polyimide.
Claim 5
Dependent Claim
26 words
The structure as defined in claim 1, further comprising a reflecting layer disposed between said separation layer and said stack, said reflecting layer reflecting said radiation.
Claim 6
Dependent Claim
15 words
The structure as defined in claim 4, wherein said reflecting layer is a metal layer.
Claim 7
Dependent Claim
87 words
A structure for receiving electromagnetic radiation having a wavelength and an energy, the structure comprising: a substrate which is transparent to the wavelength of the electromagnetic radiation; a separation layer disposed on said substrate, said separation layer degrading in response to the energy of the electromagnetic radiation; a multi-layer interconnect thin film stack disposed on said separation layer; a metal reflecting layer disposed between said separation layer and said stack, said reflecting layer reflecting said radiation; and a ring attached to a top surface of said stack.
Claim 8
Dependent Claim
87 words
A structure for receiving electromagnetic radiation having a wavelength and an energy, the structure comprising: a substrate which is transparent to the wavelength of the electromagnetic radiation; a separation layer disposed on said substrate, said separation layer degrading in response to the energy of the electromagnetic radiation; a multi-layer interconnect thin film stack disposed on said separation layer; a metal reflecting layer disposed between said separation layer and said stack, said reflecting layer reflecting said radiation; and a ring attached to a top surface of said stack.
Claim 9
Dependent Claim
12 words
The structure as defined in claim 6, wherein said ring is metal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-01 | 1997-05-03 | 1997-11-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-01 | 2001-05-03 | 2001-11-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-01 | 2005-05-03 | 2005-11-02 | $7700.00 | Window Closed / Lapsed |