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US5256244A Expired / Lapsed US ⏱️ 0.0 years remaining

Production of diffuse reflective coatings by atomic layer epitaxy

Assignee: General Electric Co
•
Filing: 1992-02-10
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Granted: 1993-10-26
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Expires: 2012-02-10
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Abstract

Abstract Diffusely reflecting metal oxide, preferably titanium dioxide, coatings are prepared on substrates by atomic layer epitaxy. Successive pulses of a hydrolyzable metal chloride and water are introduced at pressures in the range of about 180-1250 and about 150-650 millitorr, respectively, the pulse length being effective to produce a coating with an average thickness of about 15-25 Ångstroms during a single pulse pair.

Inventors

  • 👤 John F. Ackerman

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 09:22
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/405; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/10; C30B29/16

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 114 words
A method for depositing on a thermoplastic resin substrate a metal oxide coating which reflects light diffusely, which comprises subjecting said substrate to alternating feed pulses of a hydrolyzable chloride of said metal and of water at pressures in the range of about 180-1250 and about 150-650 millitorr respectively, with evacuation of the deposition system to a pressure in the range of about 80-100 millitorr between successive pulses; the pulse length being effective to produce a metal oxide layer with an average thickness of about 15-25 Ångstroms during a single pulse pair and the number of pulse pairs being effective to produce a coating with a thickness in the range of about 2-50 microns.
Claim 2
Independent Claim 114 words
A method for depositing on a thermoplastic resin substrate a metal oxide coating which reflects light diffusely, which comprises subjecting said substrate to alternating feed pulses of a hydrolyzable chloride of said metal and of water at pressures in the range of about 180-1250 and about 150-650 millitorr respectively, with evacuation of the deposition system to a pressure in the range of about 80-100 millitorr between successive pulses; the pulse length being effective to produce a metal oxide layer with an average thickness of about 15-25 Ångstroms during a single pulse pair and the number of pulse pairs being effective to produce a coating with a thickness in the range of about 2-50 microns.
Claim 3
Dependent Claim 13 words
A method according to claim 1 wherein the metal chloride is titanium tetrachloride.
Claim 4
Dependent Claim 24 words
A method according to claim 2 wherein the pressures of the titanium tetrachloride and water pulses are about 800-1200 and about 400-600 millitorr, respectively.
Claim 5
Dependent Claim 11 words
A method according to claim 3 wherein the substrate is polycarbonate.
Claim 6
Dependent Claim 11 words
A method according to claim 3 wherein the substrate is polytetrafluoroethylene.
Claim 7
Dependent Claim 11 words
A method according to claim 3 wherein the substrate is polyethylene.

References Cited (Backward Citations)

US3892490A Cited
US4534820A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-10-25 1997-04-26 1997-10-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-10-25 2001-04-26 2001-10-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-10-25 2005-04-26 2005-10-26 $7700.00 Window Closed / Lapsed

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