US5252137A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System and method for applying a liquid
Assignee: Toshiba Corp
•
Filing: 1991-09-12
•
Granted: 1993-10-12
•
Expires: 2011-09-12
Abstract
Abstract A liquid applying system according to the present invention comprises a liquid supply source and a nozzle communicating with the liquid supply source. The nozzle comprises a liquid storing portion for storing a liquid supplied from the liquid supply source, a number of small passages communicating with the liquid storing portion, each of the small passages having a transverse section which is smaller than that of the liquid storing portion, and a slit-like passage communicating with the small passages, in which liquids from the small passages flow together and from which the liquids are continuously discharged like a curtain toward a semiconductor wafer.
Inventors
- 👤 Kiyohisa Tateyama
- 👤 Keizo Hasebe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 11:25
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0456; B; B05; B05C; B05C5/00; B05C5/005; H10P72/0448
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
106 words
A system for applying a liquid to an object to be processed, comprising: a liquid supply source; and nozzle means communicating with said liquid supply source; said nozzle means including: a liquid storing portion for storing a liquid supplied from said liquid supply source; a plurality of small passages communicating with said liquid storing portion, each of said small passages having a transverse section which is smaller than that of said liquid storing portion; and a slit passage communicating with said small passages, in which liquids flowing from said small passages are mixed together and discharged from said slit passage toward said object to be processed.
Claim 2
Independent Claim
106 words
A system for applying a liquid to an object to be processed, comprising: a liquid supply source; and nozzle means communicating with said liquid supply source; said nozzle means including: a liquid storing portion for storing a liquid supplied from said liquid supply source; a plurality of small passages communicating with said liquid storing portion, each of said small passages having a transverse section which is smaller than that of said liquid storing portion; and a slit passage communicating with said small passages, in which liquids flowing from said small passages are mixed together and discharged from said slit passage toward said object to be processed.
Claim 3
Dependent Claim
17 words
The system according to claim 1, wherein said small passages are arranged in a row at intervals.
Claim 4
Dependent Claim
16 words
The system according to claim 1, wherein said small passages each have a rectangular transverse section.
Claim 5
Dependent Claim
16 words
The system according to claim 1, wherein said small passages each have a circular transverse section.
Claim 6
Dependent Claim
16 words
The system according to claim 1, wherein said small passages each has a semi-circular transverse section.
Claim 7
Dependent Claim
28 words
The system according to claim 1, wherein a pressure resistance of said liquid storing portion is 100 or more times as high as that of said small passage.
Claim 8
Dependent Claim
34 words
The system according to claim 1, wherein said small passage is inclined at an angle to said slit passage, and a bent communicating portion is connected between said small passage and said slit passage.
Claim 9
Dependent Claim
24 words
The system according to claim 7, wherein said small passage is inclined at an angle of 15 to 45 degrees to said slit passage.
Claim 10
Dependent Claim
17 words
The system according to claim 1, wherein said slit passage is tapered toward its liquid discharging side.
Claim 11
Dependent Claim
13 words
The system according to claim 1, wherein said slit passage is straight formed.
Claim 12
Dependent Claim
42 words
The system according to claim 1, wherein said liquid storing portion extends along said slit passage, and a length of said liquid storing portion in its longitudinal direction is substantially the same as that of said slit-like passage in its longitudinal direction.
Claim 13
Independent Claim
173 words
A method for applying a liquid to an object to be processed, comprising the steps of: (a) preparing the object to be processed; (b) preparing nozzle means, said nozzle means including: a liquid storing portion communicating with a liquid supply source, for storing a liquid supplied from a liquid supply source; a plurality of small passages communicating with said liquid storing portion, each of said small passages having a transverse section which is smaller than that of said liquid storing portion; and a slit passage communicating with said small passages, in which liquids flowing from said small passages are mixed together and discharged from said slit passage toward said object to be processed; (c) causing an opening of the slit passage of said nozzle means to face said object to be processed; (d) discharging the liquids from said nozzle means to said object to be processed while moving at least one of said nozzle means and said object to be processed; and (e) separating said nozzle means from said object to be processed.
Claim 14
Independent Claim
173 words
A method for applying a liquid to an object to be processed, comprising the steps of: (a) preparing the object to be processed; (b) preparing nozzle means, said nozzle means including: a liquid storing portion communicating with a liquid supply source, for storing a liquid supplied from a liquid supply source; a plurality of small passages communicating with said liquid storing portion, each of said small passages having a transverse section which is smaller than that of said liquid storing portion; and a slit passage communicating with said small passages, in which liquids flowing from said small passages are mixed together and discharged from said slit passage toward said object to be processed; (c) causing an opening of the slit passage of said nozzle means to face said object to be processed; (d) discharging the liquids from said nozzle means to said object to be processed while moving at least one of said nozzle means and said object to be processed; and (e) separating said nozzle means from said object to be processed.
Claim 15
Dependent Claim
28 words
The method according to claim 12, wherein said discharging step comprises a step of rotating said object to be processed, with said nozzle means in a stationary state.
Claim 16
Dependent Claim
42 words
The method according to claim 12, wherein said discharging step comprises a step of moving said nozzle means from one end of said object to be processed to other end thereof, with said object to be processed remaining in a stationary state.
References Cited (Backward Citations)
JPS5752132A
Cited
JPS57192955A
Cited
US4579597A
Cited
US5009715A
Cited
US5002008A
Cited
US5013530A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-10-11 | 1997-04-12 | 1997-10-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-11 | 2001-04-12 | 2001-10-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-11 | 2005-04-12 | 2005-10-12 | $7700.00 | Window Closed / Lapsed |