Patent US3572163A successfully refreshed from Google Patents.
US5002008A
Expired / Lapsed
US
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Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state
Assignee: Tokyo Electron Ltd
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Filing: 1989-05-26
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Granted: 1991-03-26
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Expires: 2009-05-26
Abstract
Abstract Disclosed is a coating apparatus for applying a resist or developing solution to a semiconductor wafer. This coating apparatus comprises a plurality of nozzles supplied with various resist from a resist source and each adapted to drip the different solution onto the wafer, a vessel in which the nozzles is kept on stand-by, while maintaining the liquids in a predetermined state in the vicinity of discharge port portions of the nozzles, when the nozzles need not be operated, and a nozzle operating mechanism for selecting one of the nozzles kept on stand-by in the vessel, and transporting the selected nozzle to the location of the wafer, whereby the resist is applied to the wafer by means of only the nozzle transported by the nozzle operating mechanism.
Inventors
- 👤 Mitsuru Ushijima
- 👤 Osamu Hirakawa
- 👤 Masami Akimoto
- 👤 Yoshio Kimura
- 👤 Noriyuki Anai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 13:54
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/162; B; B05; B05B; B05B15/00; B05B15/50; B05B15/55; B05C; B05C11/00; B05C11/02; B05C11/08
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
135 words
A coating apparatus for applying a liquid to an object, comprising: liquid dripping means including a plurality of nozzle members each adapted to drip a different liquid supplied from a liquid source onto the object; a stationary vessel in which the nozzle members are kept on stand-by, while preventing a solvent in the liquid from being evaporated in liquid discharge port portions of the nozzle member, when the nozzle member need not be operated; and nozzle operating means for picking up at least one of said nozzle members, among other nozzle members kept on stand-by in the stationary vessel, and for transporting the picked up nozzle member to the location of the object, whereby the liquid is dripped to the object by means of only said selected nozzle member transported by the nozzle operating means.
Claim 2
Dependent Claim
135 words
A coating apparatus for applying a liquid to an object, comprising: liquid dripping means including a plurality of nozzle members each adapted to drip a different liquid supplied from a liquid source onto the object; a stationary vessel in which the nozzle members are kept on stand-by, while preventing a solvent in the liquid from being evaporated in liquid discharge port portions of the nozzle member, when the nozzle member need not be operated; and nozzle operating means for picking up at least one of said nozzle members, among other nozzle members kept on stand-by in the stationary vessel, and for transporting the picked up nozzle member to the location of the object, whereby the liquid is dripped to the object by means of only said selected nozzle member transported by the nozzle operating means.
Claim 3
Dependent Claim
33 words
The coating apparatus according to claim 1, wherein said nozzle operating means includes an XYZ-axis shift mechanism for moving the liquid discharge port portion straight in the directions of X-, Y-, and Z-axes.
Claim 4
Dependent Claim
27 words
The coating apparatus according to claim 1, wherein said nozzle operating means includes a multi-joint arm member for moving the liquid discharge port portion within the XY-plane.
Claim 5
Dependent Claim
26 words
The coating apparatus according to claim 1, wherein said nozzle operating means includes a pair of nozzle retaining members mounted for movement relative to one another.
Claim 6
Dependent Claim
34 words
The coating apparatus according to claim 1, wherein the liquid discharge port portion of each said nozzle member can be attached to and detached from a liquid supply passage connecting with the liquid source.
Claim 7
Dependent Claim
30 words
The coating apparatus according to claim 5, wherein a seal ring member is disposed between the liquid discharge port portion of each said nozzle member and the liquid supply passage.
Claim 8
Dependent Claim
32 words
The coating apparatus according to claim 6, wherein said seal ring member is formed of a resin softer than the material of the liquid supply passage and the liquid discharge port portion.
Claim 9
Dependent Claim
16 words
The coating apparatus according to claim 6, wherein said seal ring member has a taper surface.
Claim 10
Dependent Claim
27 words
The coating apparatus according to claim 1, wherein each said nozzle member includes a holder member through which is circulated heat-regulating water for adjusting the liquid temperature.
Claim 11
Dependent Claim
34 words
The coating apparatus according to claim 1, wherein the liquid discharge port portion of each said nozzle member is spread in the shape of a trumpet at the opening of a liquid discharge passage.
Claim 12
Dependent Claim
20 words
The coating apparatus according to claim 1, wherein said liquid supply means includes nozzle members for supplying a resist solution.
Claim 13
Dependent Claim
20 words
The coating apparatus according to claim 1, wherein said liquid supply means includes nozzle members for supplying a developing solution.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-25 | 1994-09-24 | 1995-03-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-25 | 1998-09-24 | 1999-03-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-25 | 2002-09-24 | 2003-03-26 | $7700.00 | Window Closed / Lapsed |