US5250983A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photo reticle for fabricating a semiconductor device
Assignee: Micron Memory Japan Ltd
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Filing: 1992-07-10
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Granted: 1993-10-05
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Expires: 2012-07-10
Abstract
Abstract An original layout pattern for reticle includes a tip pattern region, a scribe region formed around the tip pattern region, and alignment marks formed in the scribe region. Each end of the alignment marks is not reached to a edge of the original layout pattern. Therefore, when the original layout pattern is formed on the reticle side by side in predetermined times, the alignment marks positioned at an inner portion between two adjacent patterns are separated from each other.
Inventors
- 👤 Ryuji Yamamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 11:37
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7084; G03F7/00; G03F7/70; G03F7/70425; G03F9/7076; H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31761; H01J2237/31767
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
128 words
A reticle for fabricating a semiconductor device, comprising: a plurality of tip pattern regions; a scribe region surrounding said plurality of tip pattern regions; a repeat region provided at an outer periphery of said scribe region; a first alignment mark provided on said scribe region used for detection of rotation from a standard angle, said first alignment mark being terminated on a border line between said scribe and repeat regions; and a second alignment mark provided on both sides of a symmetrical line defined on said scribe region between said plurality of tip pattern regions, said second alignment mark being composed of first and second mark segments separated by said symmetrical line, said first and second mark segments being common in configuration partially to said first alignment mark.
Claim 2
Dependent Claim
128 words
A reticle for fabricating a semiconductor device, comprising: a plurality of tip pattern regions; a scribe region surrounding said plurality of tip pattern regions; a repeat region provided at an outer periphery of said scribe region; a first alignment mark provided on said scribe region used for detection of rotation from a standard angle, said first alignment mark being terminated on a border line between said scribe and repeat regions; and a second alignment mark provided on both sides of a symmetrical line defined on said scribe region between said plurality of tip pattern regions, said second alignment mark being composed of first and second mark segments separated by said symmetrical line, said first and second mark segments being common in configuration partially to said first alignment mark.
Claim 3
Dependent Claim
125 words
A reticle for fabricating a semiconductor device, according to claim 1, wherein: said first alignment mark is composed of first parallel stripes and second parallel stripes each narrower than said first parallel stripes, said first parallel stripes being arranged at bottom and right sides of on said scribe region, and said second parallel stripes being arranged at top and left sides of said scribe region; and said first mark segments of said second alignment mark are of a partial length of said first parallel stripes and arranged on a left side of said symmetrical line, and said second mark segments of said second alignment mark are of a partial length of said second parallel stripes and arranged on a right side of said symmetrical line.
Claim 4
Dependent Claim
87 words
A reticle for fabricating a semiconductor device, according to claim 2, wherein: each one of said plurality of tip pattern regions is provided sequentially, a provision of a first one of said plurality of tip pattern regions providing said first parallel stripes to be used for said first alignment mark and said second parallel stripes to be partially used for said second alignment mark in cooperation with said first parallel stripes defined by a subsequent provision of a second one of said plurality of tip pattern regions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-10-04 | 1997-04-05 | 1997-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-04 | 2001-04-05 | 2001-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-04 | 2005-04-05 | 2005-10-05 | $7700.00 | Window Closed / Lapsed |