US5249728A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Bumpless bonding process having multilayer metallization
Assignee: Atmel Corp
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Filing: 1993-03-10
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Granted: 1993-10-05
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Expires: 2013-03-10
Abstract
Abstract A method of electrically connecting a tape automated bonding lead to an aluminum input/output pad of an integrated circuit includes sequentially sputtering an adhesive layer, a diffusion barrier layer and a gold layer on the input/output pad. The adhesive layer is a metallic film having good step coverage and adhesive properties to contact the pad. The diffusion barrier layer is formed atop the adhesive layer and is sandwiched by the gold layer. The method employs "bumpless" techniques and the bond lead is connected to the gold layer by applying a combination of pressure and vibrational energy.
Inventors
- 👤 Ken Lam
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:53
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/071; H10W72/072; H10W72/07231; H10W72/07232; H10W72/07233; H10W72/077; H10W72/01; H10W72/019; H10W72/075; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/20; H10W72/251; H10W72/252; H10W72/29; H10W72/50; H10W72/531; H10W72/5363; H10W72/59; H10W72/701; H10W72/90; H10W72/921; H10W72/923; H10W72/951; H10W72/952
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
99 words
A method for electrically connecting an integrated circuit and a bond lead comprising, providing an integrated circuit, forming a conductive input/output pad on the integrated circuit, forming a conductive inner layer on the input/output pad for joining the input/output pad to a noble metal, forming a noble metal layer on the inner layer, aligning a lead end of a bond lead to the input/output pad, including contacting the lead end to the noble metal layer, and ultrasonically bonding the lead end to the noble metal layer, including applying a force to the lead end to vibrate the lead end.
Claim 2
Independent Claim
99 words
A method for electrically connecting an integrated circuit and a bond lead comprising, providing an integrated circuit, forming a conductive input/output pad on the integrated circuit, forming a conductive inner layer on the input/output pad for joining the input/output pad to a noble metal, forming a noble metal layer on the inner layer, aligning a lead end of a bond lead to the input/output pad, including contacting the lead end to the noble metal layer, and ultrasonically bonding the lead end to the noble metal layer, including applying a force to the lead end to vibrate the lead end.
Claim 3
Dependent Claim
18 words
The method of claim 1 wherein forming the input/output pad is a step of forming an aluminum pad.
Claim 4
Dependent Claim
29 words
The method of claim 1 wherein forming the conductive inner layer is a step including selecting a metal from the group consisting of titanium-tungsten, titanium, titanium nitride, and chromium.
Claim 5
Dependent Claim
41 words
The method of claim 1 wherein forming the conductive inner layer is a step of forming an adhesive layer, the method further comprising forming a diffusion barrier layer on the adhesive layer prior to the forming of the noble metal layer.
Claim 6
Dependent Claim
26 words
The method of claim 4 wherein forming the diffusion barrier layer is a step including selecting a metal from the group consisting of palladium and nickel.
Claim 7
Dependent Claim
19 words
The method of claim 1 wherein forming the noble metal layer is a step of forming a gold layer.
Claim 8
Dependent Claim
46 words
The method of claim 1 wherein the ultrasonic bonding of the lead end to the noble metal layer is a step carried out in the absence of a metallic bump above the input/output pad and in the absence of a metallic bump on the lead end.
Claim 9
Independent Claim
113 words
A method for electrically connecting an integrated circuit and a bond lead comprising, fabricating an integrated circuit on a semiconductor substrate, forming an input/output pad on the integrated circuit such that the input/output pad is made of a metal selected from the group consisting of aluminum and aluminum alloy, forming a metallic adhesive layer on the input/output pad, forming a metallic diffusion barrier layer on the adhesive layer, forming a gold layer on the diffusion barrier layer, contacting a lead end of a bond lead to said gold layer, and applying a combination of pressure and vibrational energy to the lead end such that the lead end is bonded to the gold layer.
Claim 10
Independent Claim
113 words
A method for electrically connecting an integrated circuit and a bond lead comprising, fabricating an integrated circuit on a semiconductor substrate, forming an input/output pad on the integrated circuit such that the input/output pad is made of a metal selected from the group consisting of aluminum and aluminum alloy, forming a metallic adhesive layer on the input/output pad, forming a metallic diffusion barrier layer on the adhesive layer, forming a gold layer on the diffusion barrier layer, contacting a lead end of a bond lead to said gold layer, and applying a combination of pressure and vibrational energy to the lead end such that the lead end is bonded to the gold layer.
Claim 11
Dependent Claim
38 words
The method of claim 8 wherein forming the adhesive layer, the diffusion barrier layer and the gold layer are such that each is generally equal with respect to dimensions parallel to an upper surface of the semiconductor substrate.
Claim 12
Dependent Claim
23 words
The method of claim 8 carried out in the absence of sputtering gold, forming the gold layer being a step of sputtering gold.
Claim 13
Dependent Claim
18 words
The method of claim 8 further comprising providing a tape automated bonding frame that includes the bond lead.
Claim 14
Dependent Claim
27 words
The method of claim 8 wherein applying the combination of pressure and vibrational energy is a step of ultrasonically bonding the lead end to the gold layer.
Claim 15
Independent Claim
95 words
A method for electrically connecting an integrated circuit and a bond lead comprising, providing a semiconductor substrate having an integrated circuit, the integrated circuit having a contact area, forming an aluminum pad on the contact area, sputtering a film having titanium onto the aluminum pad, sputtering a diffusion barrier layer onto the titanium film, sputtering a film having gold on the diffusion barrier layer, and ultrasonically bonding a lead of a tape automated bonding frame directly to the sputtered gold film, including vibrating the lead when the lead is in contact with the gold film.
Claim 16
Independent Claim
95 words
A method for electrically connecting an integrated circuit and a bond lead comprising, providing a semiconductor substrate having an integrated circuit, the integrated circuit having a contact area, forming an aluminum pad on the contact area, sputtering a film having titanium onto the aluminum pad, sputtering a diffusion barrier layer onto the titanium film, sputtering a film having gold on the diffusion barrier layer, and ultrasonically bonding a lead of a tape automated bonding frame directly to the sputtered gold film, including vibrating the lead when the lead is in contact with the gold film.
Claim 17
Dependent Claim
24 words
The method of claim 13 further comprising patterning the titanium film, the diffusion barrier layer and the gold film prior to the ultrasonic bonding.
Claim 18
Dependent Claim
11 words
The method of claim 13 wherein the titanium film includes tungsten.
Claim 19
Dependent Claim
17 words
The method of claim 13 wherein the ultrasonic bonding includes pressing the lead onto the gold film.
Claim 20
Dependent Claim
17 words
The method of claim 13 wherein the gold film is formed in the absence of electroplating processes.
References Cited (Backward Citations)
US4040885A
Cited
US4917286A
Cited
US4950866A
Cited
US4842662A
Cited
US4927505A
Cited
US4893742A
Cited
US5110034A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-10-04 | 1997-04-05 | 1997-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-04 | 2001-04-05 | 2001-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-04 | 2005-04-05 | 2005-10-05 | $7700.00 | Window Closed / Lapsed |