US5248384A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rapid thermal treatment to eliminate metal void formation in VLSI manufacturing process
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1991-12-09
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Granted: 1993-09-28
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Expires: 2011-12-09
Abstract
Abstract The method of forming a void-free surface on aluminum-copper metallurgy after stripping of resist is described. There is provided an aluminum-copper metallurgy on a suitable substrate, such as a semiconductor integrated circuit wafer during manufacture. A resist layer is formed over surface. The resist layer is exposing, developing and the developed resist is used as an etch mask to etch a layer, such as an insulating layer on the metallurgy which results in exposing the aluminum-copper metallurgy surface. The resist etch mask is removed by plasma oxygen ashing in presence of the exposed aluminum-copper surface. Rapid thermal annealing of the aluminum-copper metallurgy at a temperature of between about 400 DEG to 550 DEG C. is performed. The resulting surfaces are rinsed to remove any residual resist material. The result is a void-free aluminum-copper metallurgy surface.
Inventors
- 👤 Kwang-Ming Lin
- 👤 Lih-Shyng Tsai
- 👤 Jiunn-Jyi Lin
- 👤 Chin-Twan Wei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:03
CPC Classifications
H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
155 words
Method of forming a void-free surface on an aluminum-copper metallurgy layer after stripping of resist comprising: providing an aluminum-copper metallurgy layer on a substrate; forming a resist layer over said metallurgy layer; exposing the resist layer to a metallurgy etch pattern, developing the resist layer to produce the etch pattern, and using the developed resist layer as an etch mask to remove the exposed areas of said metallurgy layer not covered by the etch pattern of said resist layer; removing said resist layer by plasma oxygen ashing in presence of said aluminum-copper layer; rapid thermal annealing of said aluminum-copper metallurgy layer at a temperature of between about 400° to 550° C. and cooling said metallurgy layer from said temperature at a rate of at least 5 degrees °C. per second to at least a temperature of 300 degrees °C.; and rinsing the surfaces of the metallurgy layer and substrate to remove any residual resist material.
Claim 2
Dependent Claim
155 words
Method of forming a void-free surface on an aluminum-copper metallurgy layer after stripping of resist comprising: providing an aluminum-copper metallurgy layer on a substrate; forming a resist layer over said metallurgy layer; exposing the resist layer to a metallurgy etch pattern, developing the resist layer to produce the etch pattern, and using the developed resist layer as an etch mask to remove the exposed areas of said metallurgy layer not covered by the etch pattern of said resist layer; removing said resist layer by plasma oxygen ashing in presence of said aluminum-copper layer; rapid thermal annealing of said aluminum-copper metallurgy layer at a temperature of between about 400° to 550° C. and cooling said metallurgy layer from said temperature at a rate of at least 5 degrees °C. per second to at least a temperature of 300 degrees °C.; and rinsing the surfaces of the metallurgy layer and substrate to remove any residual resist material.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein said aluminum-copper metallurgy was formed by sputtering.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein said aluminum-copper metallurgy includes a silicon component.
Claim 5
Dependent Claim
15 words
The method of claim 1 wherein said aluminum-copper metallurgy has less than about 4% copper.
Claim 6
Dependent Claim
15 words
The method of claim 1 wherein the said annealing is less than about 500° C.
Claim 7
Dependent Claim
21 words
The method of claim 1 wherein said rinsing includes a resist solvent rinse, an alcohol rinse and a deionized water rinse.
Claim 8
Dependent Claim
155 words
Method of forming a void-free surface on aluminum-copper metallurgy after stripping of resist comprising: providing an aluminum-copper metallurgy on a substrate; forming an insulating layer over said aluminum-copper metallurgy; forming a resist layer over said insulating layer; exposing the resist layer to a pattern, developing the exposed resist layer to produce the pattern, and using the developed resist layer as an etch mask to etch said insulating layer down to the surface of said aluminum-copper metallurgy; removing said resist layer by plasma oxygen ashing in presence of the exposed said aluminum-copper metallurgy surface; rapid thermal annealing of said aluminum-copper metallurgy at a temperature of between about 400° to 550° C. and cooling said metallurgy layer from said temperature at a rate of at least 5 degrees °C. per second to at least a temperature of 300 degrees °C.; and rinsing the surfaces of said insulating layer and said metallurgy to remove any residual resist material.
Claim 9
Dependent Claim
155 words
Method of forming a void-free surface on aluminum-copper metallurgy after stripping of resist comprising: providing an aluminum-copper metallurgy on a substrate; forming an insulating layer over said aluminum-copper metallurgy; forming a resist layer over said insulating layer; exposing the resist layer to a pattern, developing the exposed resist layer to produce the pattern, and using the developed resist layer as an etch mask to etch said insulating layer down to the surface of said aluminum-copper metallurgy; removing said resist layer by plasma oxygen ashing in presence of the exposed said aluminum-copper metallurgy surface; rapid thermal annealing of said aluminum-copper metallurgy at a temperature of between about 400° to 550° C. and cooling said metallurgy layer from said temperature at a rate of at least 5 degrees °C. per second to at least a temperature of 300 degrees °C.; and rinsing the surfaces of said insulating layer and said metallurgy to remove any residual resist material.
Claim 10
Dependent Claim
30 words
The method of claim 7 wherein said insulating layer is silicon oxide, said aluminum-copper metallurgy contains a silicon component, and there is less than about 4% copper in said metallurgy.
Claim 11
Dependent Claim
21 words
The method of claim 8 wherein said aluminum-copper metallurgy contains between about 0.5 to 4% copper and has a silicon component.
Claim 12
Dependent Claim
42 words
The method of claim 9 wherein said annealing is done in a nitrogen atmosphere at a temperature of less than about 550° C., and said quenching is caused by flow of nitrogen down to a temperature of less than about 300° C.
Claim 13
Dependent Claim
13 words
The method of claim 7 wherein said aluminum-copper metallurgy was formed by sputtering.
Claim 14
Dependent Claim
20 words
The method of claim 11 wherein said sputtering was done at a substrate temperature of more than about 250° C.
Claim 15
Dependent Claim
21 words
The method of claim 7 wherein said rinsing includes a resist solvent rinse, an alcohol rinse and a deionized water rinse.
Claim 16
Dependent Claim
42 words
The method of claim 13 wherein said annealing is done in a nitrogen atmosphere at a temperature of less than about 550° C., and said quenching is caused by flow of nitrogen down to a temperature of less than about 300° C.
Claim 17
Dependent Claim
13 words
The method of claim 7 wherein said aluminum-copper metallurgy includes a silicon component.
Claim 18
Dependent Claim
16 words
The method of claim 7 wherein said aluminum copper metallurgy has less than about 4% copper.
Claim 19
Dependent Claim
15 words
The method of claim 7 wherein the said annealing is less than about 550° C.
Claim 20
Dependent Claim
165 words
Method of forming a void-free surface on an aluminum-copper metallurgy layer after stripping of resist comprising: providing an aluminum-copper metallurgy layer on a substrate; forming a resist layer over said metallurgy layer; exposing the resist layer to a metallurgy etch pattern, developing the resist layer to produce the etch pattern, and using the developed resist layer as an etch mask to remove the exposed areas of said metallurgy layer not covered by the etch pattern of said resist layer; removing said resist layer by plasma oxygen ashing in presence of said aluminum-copper layer; rapid thermal annealing said aluminum-copper metallurgy layer at a temperature of between about 400° to 550° C. wherein the said annealing is done in an inert atmosphere, said annealing is done for less than about 60 seconds; and cooling said metallurgy layer from said temperature at a rate of less than about 5 degrees per second; and rinsing the surfaces of the metallurgy layer and substrate to remove any residual resist material.
Claim 21
Dependent Claim
165 words
Method of forming a void-free surface on an aluminum-copper metallurgy layer after stripping of resist comprising: providing an aluminum-copper metallurgy layer on a substrate; forming a resist layer over said metallurgy layer; exposing the resist layer to a metallurgy etch pattern, developing the resist layer to produce the etch pattern, and using the developed resist layer as an etch mask to remove the exposed areas of said metallurgy layer not covered by the etch pattern of said resist layer; removing said resist layer by plasma oxygen ashing in presence of said aluminum-copper layer; rapid thermal annealing said aluminum-copper metallurgy layer at a temperature of between about 400° to 550° C. wherein the said annealing is done in an inert atmosphere, said annealing is done for less than about 60 seconds; and cooling said metallurgy layer from said temperature at a rate of less than about 5 degrees per second; and rinsing the surfaces of the metallurgy layer and substrate to remove any residual resist material.
Claim 22
Dependent Claim
165 words
Method of forming a void-free surface on aluminum-copper metallurgy after stripping of resist comprising: providing an aluminum-copper metallurgy on a substrate; forming an insulating layer over said aluminum-copper metallurgy; forming a resist layer over said insulating layer; exposing the resist layer to a pattern, developing the exposed resist layer to produce the pattern, and using the developed resist layer as an etch mask to etch said insulating layer down to the surface of said aluminum-copper metallurgy; removing said resist layer by plasma oxygen ashing in presence of the exposed said aluminum-copper metallurgy surface; rapid thermal annealing said aluminum-copper metallurgy at a temperature of between about 400° to 550° C. wherein the said annealing is done in an inert atmosphere, said annealing is done for less than about 60 seconds; and cooling said aluminum-copper metallurgy from said temperature at a rate of less than about 5 degrees per second; and rinsing the surfaces of said insulatiing layer and said metallurgy to remove any residual resist material.
Claim 23
Dependent Claim
165 words
Method of forming a void-free surface on aluminum-copper metallurgy after stripping of resist comprising: providing an aluminum-copper metallurgy on a substrate; forming an insulating layer over said aluminum-copper metallurgy; forming a resist layer over said insulating layer; exposing the resist layer to a pattern, developing the exposed resist layer to produce the pattern, and using the developed resist layer as an etch mask to etch said insulating layer down to the surface of said aluminum-copper metallurgy; removing said resist layer by plasma oxygen ashing in presence of the exposed said aluminum-copper metallurgy surface; rapid thermal annealing said aluminum-copper metallurgy at a temperature of between about 400° to 550° C. wherein the said annealing is done in an inert atmosphere, said annealing is done for less than about 60 seconds; and cooling said aluminum-copper metallurgy from said temperature at a rate of less than about 5 degrees per second; and rinsing the surfaces of said insulatiing layer and said metallurgy to remove any residual resist material.
References Cited (Backward Citations)
USRE32207E
Cited
US4618878A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-09-27 | 1997-03-29 | 1997-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-27 | 2001-03-29 | 2001-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-27 | 2005-03-29 | 2005-09-28 | $7700.00 | Window Closed / Lapsed |