Patent US5247535A successfully refreshed from Google Patents.
US5247535A
Expired / Lapsed
US
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Apparatus for preionization of gas in a pulsed gas laser
Assignee: Lambda Physik Forschungs und Entwicklungs GmbH
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Filing: 1992-03-12
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Granted: 1993-09-21
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Expires: 2012-03-12
Abstract
Abstract An apparatus for preionization of gas in a pulsed gas laser by means of soft X-ray radiation comprises an elongated cathode (26) which is heated by thermal radiation or electron bombardment and which is arranged parallel to a likewise elongated anode (18) in an evacuated housing.
Inventors
- 👤 Elmar Muller-Horsche
- 👤 Ludwig Kohler
- 👤 Bernd Keller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 02:06
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/09; H01S3/097; H01S3/0971; H01S3/09713; H01S3/09716
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
107 words
An apparatus for preionizing gas in a pulsed gas laser by means of x-ray radiation, said preionizing apparatus comprising: an elongated tubular cathode having an inner cavity including a heating spiral for heating the elongated tubular cathode and thereby emitting electrons from the elongated tubular cathode; an elongated anode arranged parallel to the elongated tubular cathode so that electrons emitted by the elongated tubular cathode impinge onto the anode producing x-ray radiation and thereby preionizing a laser gas external to said preionizing apparatus and an evacuated housing for accommodating the cathode and the anode, said evacuated housing having at least one portion permeable to the x-ray radiation.
Claim 2
Independent Claim
107 words
An apparatus for preionizing gas in a pulsed gas laser by means of x-ray radiation, said preionizing apparatus comprising: an elongated tubular cathode having an inner cavity including a heating spiral for heating the elongated tubular cathode and thereby emitting electrons from the elongated tubular cathode; an elongated anode arranged parallel to the elongated tubular cathode so that electrons emitted by the elongated tubular cathode impinge onto the anode producing x-ray radiation and thereby preionizing a laser gas external to said preionizing apparatus and an evacuated housing for accommodating the cathode and the anode, said evacuated housing having at least one portion permeable to the x-ray radiation.
Claim 3
Dependent Claim
32 words
Apparatus according to claim 1 further comprising a ceramic tube which is concentric to the elongated tubular cathode and is arranged between the heating spiral (30) and the elongated tubular cathode (26).
Claim 4
Independent Claim
153 words
An apparatus for preionizing gas in a pulsed gas laser by means of x-ray radiation, said preionizing apparatus comprising: an elongated tubular cathode having an inner cavity; an elongated heating wire concentrically disposed within the cavity and extending the length thereof, said heating wire having applied to it an electrically negative potential with respect to the elongated tubular cathode, whereby said cathode emits electrons upon bombardment by electrons from the elongated heating wire when said elongated heating wire is heated; at least one elongated anode arranged parallel to the elongated tubular cathode so that the electrons emitted by the elongate tubular cathode impinge onto the elongated anode and generate x-ray radiation which thereby preionizes a laser gas external to said preionizing apparatus; and an evacuated housing for accommodating the elongated tubular cathode and at least one elongated anode, said evacuated housing having at least one portion which is permeable to the x-ray radiation.
Claim 5
Independent Claim
153 words
An apparatus for preionizing gas in a pulsed gas laser by means of x-ray radiation, said preionizing apparatus comprising: an elongated tubular cathode having an inner cavity; an elongated heating wire concentrically disposed within the cavity and extending the length thereof, said heating wire having applied to it an electrically negative potential with respect to the elongated tubular cathode, whereby said cathode emits electrons upon bombardment by electrons from the elongated heating wire when said elongated heating wire is heated; at least one elongated anode arranged parallel to the elongated tubular cathode so that the electrons emitted by the elongate tubular cathode impinge onto the elongated anode and generate x-ray radiation which thereby preionizes a laser gas external to said preionizing apparatus; and an evacuated housing for accommodating the elongated tubular cathode and at least one elongated anode, said evacuated housing having at least one portion which is permeable to the x-ray radiation.
Claim 6
Dependent Claim
20 words
Apparatus according to claim 1 or 3, characterized in that the elongated tubular cathode (26) consists of porous impregnated tungsten.
Claim 7
Dependent Claim
38 words
Apparatus according to claim 1 or 3, characterized in that support means for the elongated tubular cathode (26) is provided in the housing (14) and the support means is arranged axially on both sides of the cathode (26).
Claim 8
Dependent Claim
32 words
Apparatus according to claim 1 or 3, characterized in that the anode (18') comprises a cavity which communicates via a passage (42) with a cooling liquid reservoir arranged outside the housing (14).
Claim 9
Dependent Claim
25 words
An apparatus according to claim 1 or 3, wherein the elongated anode is axially supported in the housing on both sides of the elongated anode.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-09-20 | 1997-03-22 | 1997-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-20 | 2001-03-22 | 2001-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-20 | 2005-03-22 | 2005-09-21 | $7700.00 | Window Closed / Lapsed |