US5240818A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for manufacturing a color filter for deformable mirror device
Assignee: Texas Instruments Inc
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Filing: 1991-07-31
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Granted: 1993-08-31
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Expires: 2011-07-31
Abstract
Abstract A deformable mirror device comprises a plurality of groups of colored mirrors responsive to electronic signals. Each group of mirrors is coated with a mixture of resist and dye thereby reflecting specified wavelengths of visible light. A process for manufacturing such a color deformable mirror device ("DMD") includes forming a layer of material on the DMD comprising a resist and a dye and selectively removing portions of the layer of material from the DMD.
Inventors
- 👤 Michael A. Mignardi
- 👤 Brooks J. Story
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 00:50
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/015; G09; G09F; G09F9/00; G09F9/30; G09F9/37; G09F9/372
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
59 words
A method of forming a color deformable mirror device, the method comprising the steps of: microlithographically forming an array of individual deformable mirrors; microlithographically forming a layer of material comprising a dye and a resist over said array of mirrors; and removing portions of said material not overlying a first set of desired mirrors of said array of mirrors.
Claim 2
Independent Claim
59 words
A method of forming a color deformable mirror device, the method comprising the steps of: microlithographically forming an array of individual deformable mirrors; microlithographically forming a layer of material comprising a dye and a resist over said array of mirrors; and removing portions of said material not overlying a first set of desired mirrors of said array of mirrors.
Claim 3
Dependent Claim
22 words
The method of claim 1 and further comprising the step of applying a transparent protective layer over the remaining layer of material.
Claim 4
Dependent Claim
20 words
The method of claim 2 wherein said applying step further comprises the step of applying a layer of silicon dioxide.
Claim 5
Dependent Claim
57 words
The method of claim 1 wherein said stp of microlithographically forming said layer of material comprising said dye and said resist comprises the stops of: combining a resist and a dye selected from the group consisting of anthraquinone, phthalocyanine, azo, and mixtures thereof; and applying the combination of resist and selected dye to said array of mirrors.
Claim 6
Dependent Claim
22 words
The method of claim 4 and further comprising the step of applying a transparent protective layer over the remaining layer of material.
Claim 7
Dependent Claim
76 words
The method of claim 1 and further comprising the steps of: microlithographically forming a second layer of material comprising a dye and a resist over said array of mirrors; removing portions of said second layer not on a second set of desired mirrors; microlithographically forming a third layer of material comprising a dye and a resist over the deformable mirror device; and removing portions of said third layer not on a third set of desired mirrors.
Claim 8
Dependent Claim
34 words
The method of claim 6 wherein each of said forming steps further comprises the step of combining a resist and a dye selected from the group consisting of anthraquinone, phthalocyanine, azo, and mixtures thereof.
Claim 9
Dependent Claim
32 words
The method of claim 7 wherein each of said forming steps further comprises the step of aligning and removing said portions of each of said layers of material to form three-color pixels.
Claim 10
Independent Claim
129 words
A method of forming a color deformable mirror device, the method comprising the steps of: microlithographically forming an array of individual deformable mirrors; microlithographically forming a layer of material comprising a first color dye and a resist over said array of mirrors; removing portions of said material not overlying a first set of desired mirrors of said array of mirrors; microlithographically forming a second layer of material comprising a second color dye and a resist over said array of mirrors; removing portions of said second layer not overlying a second set of desired mirrors; microlithographically forming a third layer of material comprising a third color dye and a resist over the deformable mirror device; and removing portions of said third layer not overlying a third set of desired mirrors.
Claim 11
Independent Claim
129 words
A method of forming a color deformable mirror device, the method comprising the steps of: microlithographically forming an array of individual deformable mirrors; microlithographically forming a layer of material comprising a first color dye and a resist over said array of mirrors; removing portions of said material not overlying a first set of desired mirrors of said array of mirrors; microlithographically forming a second layer of material comprising a second color dye and a resist over said array of mirrors; removing portions of said second layer not overlying a second set of desired mirrors; microlithographically forming a third layer of material comprising a third color dye and a resist over the deformable mirror device; and removing portions of said third layer not overlying a third set of desired mirrors.
Claim 12
Dependent Claim
43 words
The method of claim 9 wherein each of said mirrors of each of said desired sets of mirrors is grouped with a corresponding one mirror of each of the other two sets of desired mirrors to form a larger individual full color pixel.
Claim 13
Dependent Claim
22 words
The method of claim 10 wherein said first color is red, said second color is blue, and said third color is green.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-30 | 1997-03-01 | 1997-08-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-30 | 2001-03-01 | 2001-08-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-30 | 2005-03-01 | 2005-08-31 | $7700.00 | Window Closed / Lapsed |