Connection process between an optical fibre and an optical microguide

Claim 2

A connection process between an optical fiber and an optical microguide which includes, on a substrate, a guidance structure having a core and two media, the respective refractive indices of which are below those of the core of the structure, said core being located between the two media, said process comprising the steps of: a first etching of the guidance structure from one end of the optical microguide, so as to eliminate from said structure a zone allowing the axis of the microguide core as a median line and whose width is at least equal to the external diameter of the optical fiber, the lateral walls of the etched structure respectively forming in a direction parallel to the axis of the microguide, a bearing line for the fiber, a second etching of a part of the substrate located beneath said zone which has been eliminated, said second etching being carried out by a dry process, through the etched guidance structure, said guidance structure acting as a mask, and over a depth making it possible to bring about coincidence between the axis of the core of the microguide and the axis of the core of one end of the fiber, when said end rests on the bottom of a recess thus formed in the substrate and fixing the end of the optical fiber in the recess so as to obtain said coincidence.

Claim 3

Process according to claim 1, wherein the first etching comprises anisotropic etching.

Claim 4

Process according to claim 1, wherein the second etching comprises isotropic etching.

Claim 5

Process according to claim 1, wherein the width of the zone is equal to the external diameter of the fiber.

Claim 6

Process according to claim 3, wherein the substrate comprises silicon and the second etching comprises reactive ionic etching.

Claim 7

Process according to claim 1, wherein the substrate comprises silicon, and the media which are adjacent to the core comprise not intentionally doped silica layers and wherein the core comprises doped silica.

Claim 8

Process according to claim 1, wherein the substrate comprises silicon, the media adjacent to the core comprise not intentionally doped silica layers and the core comprises one of silicon nitride and silicon oxynitride.

Claim 9

Process according to claim 6, wherein the total thickness of the silicon layers is approximately 15 to 30 micrometers.

Claim 10

Process according to claim 7, wherein the total thickness of the silica layers is approximately 15 to 30 micrometers.

Claim 11

Process according to claim 1, which comprises etching the guidance structure and substrate in such a way that, from the side of the fiber-microguide interface, the width of the eliminated zone decreases towards said interface.

Claim 12

Process according to claim 1, which comprises etching the guidance structure during the first etching, so as to free therefrom a tongue, which allows as the median line the axis of the microguide core and whose width is at the most equal to the depth of the recess.

Claim 13

Process according to claim 11, wherein the length of the tongue is at least equal to the depth of the recess.

Claim 14

Process according to claim 1, wherein the microguide comprises a superstrate which completely covers the microguide core and which comprises etching the guidance structure during the first etching so as to leave a small superstrate thickness in front of the core.

Claim 15

Process according to claim 1, which comprises placing an index adapting material at the fiber-microguide interface.

Claim 16

Connection process between an optical fiber and an optical microguide which includes, on a substrate, a guidance structure having a core and two media, the respective reflective indices of which are below that of the microguide core of the structure, said core being located between the two media, said process comprising: forming one of the media on the substrate, forming on said one of the media formed on the substrate an intermediate layer from which the microguide core is substantially produced, etching by a first etching the intermediate layer so as to form the core of the microguide and so as to eliminate from said intermediate layer a zone allowing the axis of the microguide core as the median line and having a width so as to permit the subsequent positioning of the optical fiber in alignment with the microguide core, forming on the structure resulting from said etching of the intermediate layer an overlap layer which comprises the other of the media, etching the resulting guidance structure by a second etching so as to eliminate from said guidance structure another zone substantially allowing the axis of the microguide core as a median line and having a width, decreased by the width of the zone which is eliminated from the intermediate layer, which is at least equal to twice the uncertainty upon the superimposing of said zone, forming two shoulders at least in the first media, wherein said two shoulders comprise bearing surfaces for the optical fiber, a third dry etching, through the resulting guidance structure acting as a mask, of the substrate located beneath said mask, over a depth so as to bring about coincidence between the axis of the microguide core and the axis of the core of one end of the fiber when said end rests on the bottom of the recess formed in the substrate; and fixing the end of the optical fiber in said recess so as to bring about the coincidence.

Claim 17

Connection process between an optical fiber and an optical microguide which includes, on a substrate, a guidance structure having a core and two media, the respective reflective indices of which are below that of the microguide core of the structure, said core being located between the two media, said process comprising: forming one of the media on the substrate, forming on said one of the media formed on the substrate an intermediate layer from which the microguide core is substantially produced, etching by a first etching the intermediate layer so as to form the core of the microguide and so as to eliminate from said intermediate layer a zone allowing the axis of the microguide core as the median line and having a width so as to permit the subsequent positioning of the optical fiber in alignment with the microguide core, forming on the structure resulting from said etching of the intermediate layer an overlap layer which comprises the other of the media, etching the resulting guidance structure by a second etching so as to eliminate from said guidance structure another zone substantially allowing the axis of the microguide core as a median line and having a width, decreased by the width of the zone which is eliminated from the intermediate layer, which is at least equal to twice the uncertainty upon the superimposing of said zone, forming two shoulders at least in the first media, wherein said two shoulders comprise bearing surfaces for the optical fiber, a third dry etching, through the resulting guidance structure acting as a mask, of the substrate located beneath said mask, over a depth so as to bring about coincidence between the axis of the microguide core and the axis of the core of one end of the fiber when said end rests on the bottom of the recess formed in the substrate; and fixing the end of the optical fiber in said recess so as to bring about the coincidence.

Claim 18

Process according to claim 15, wherein the first and second etchings comprise anisotropic etchings.

Claim 19

Process according to claim 15, wherein the third dry etching comprises isotropic etching.

Claim 20

Process according to claim 15, wherein by the second etching forms a tongue which has a median axis the axis of the microguide core and whose width is at most equal to the depth of the recess.

Claim 21

Process according to claim 15, wherein by the second etching a tongue is formed which has as a median axis the axis of the microguide core and whose length is at least equal to the depth of the recess.