US5238775A
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Radiation-sensitive resin composition
Assignee: JSR Corp
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Filing: 1991-02-19
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Granted: 1993-08-24
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Expires: 2011-02-19
Abstract
Abstract A radiation-sensitive resin composition containing an alkali-soluble resin, comprising a polyhydroxy compound having the following formula: ##STR1## or a quinonediazidesulfonate of the polyhydroxy compound. The radiation-sensitive resin composition is suitable for use as a positive type photoresist which has such excellent developability as to inhibit effectively the generation of scum in the formation of a photoresist pattern, has high sensitivity and is excellent in heat resistance and remained thickness ratio upon development.
Inventors
- 👤 Toru Kajita
- 👤 Takao Miura
- 👤 Yoshiji Yumoto
- 👤 Chozo Okuda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:45
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/22; C; C07; C07C; C07C39/00; C07C39/12; C07C39/15; G03F7/004; G03F7/022; G03F7/0226
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
187 words
A radiation-sensitive resin composition comprising an admixture of an alkali-soluble resin and a compound having the following general formula [I]: ##STR6## wherein R 1 , R 2 , R 3 and R 4 may be the same or different and each of R 1 to R 4 may comprise two or more different groups, and R 1 to R 4 are each a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group or an OD group, wherein D is a hydrogen atom or an organic group containing a 1,2-quinonediazide group, at least one of R 1 , R 2 , and R 4 containing at least one OD group, at least one OD group in said compound containing a 1,2-quinonediazide group; R 5 and R 6 are each a hydrogen atom or a substituted or unsubstituted alkyl group; a, b and d are each an integer of from 0 to 5, provided that at least one of a, b and d is a positive integer corresponding to said OD group containing a 1,2-quinone diazide group; and c is an integer of from 0 to 4.
Claim 2
Dependent Claim
187 words
A radiation-sensitive resin composition comprising an admixture of an alkali-soluble resin and a compound having the following general formula [I]: ##STR6## wherein R 1 , R 2 , R 3 and R 4 may be the same or different and each of R 1 to R 4 may comprise two or more different groups, and R 1 to R 4 are each a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group or an OD group, wherein D is a hydrogen atom or an organic group containing a 1,2-quinonediazide group, at least one of R 1 , R 2 , and R 4 containing at least one OD group, at least one OD group in said compound containing a 1,2-quinonediazide group; R 5 and R 6 are each a hydrogen atom or a substituted or unsubstituted alkyl group; a, b and d are each an integer of from 0 to 5, provided that at least one of a, b and d is a positive integer corresponding to said OD group containing a 1,2-quinone diazide group; and c is an integer of from 0 to 4.
Claim 3
Dependent Claim
28 words
The composition according to claim 1, wherein the compound having the above general formula [I] comprises a compound having the general formula [I] in which c is 0.
Claim 4
Dependent Claim
79 words
The composition according to claim 2, wherein the compound having the above general formula [I] comprises a compound having the general formula [I] in which the groups R 1 , R 2 and R 4 are each a substituted or unsubstituted alkyl group of up to 6 carbon atoms or an OD group, and the groups R 5 and R 6 are each a hydrogen atom or a substituted or unsubstituted alkyl group of up to 6 carbon atoms.
Claim 5
Dependent Claim
61 words
The composition according to claim 3, wherein the compound having the above general formula [I] comprises a compound having the general formula [I] in which the groups R 1 , R 2 and R 4 are each a methyl group or an OD group, and the groups R 5 and R 6 are each a hydrogen atom or a methyl group.
Claim 6
Dependent Claim
38 words
The composition according to claim 1, wherein the compound having the above general formula [I] comprises a 1,2-quinonediazide sulfonate of one member selected from the group consisting of: 1,1-bis(4-hydroxyphenyl)-1-[4-(4-hydroxybenzyl)phenyl]ethane, 1,1-bis(3,5-dimethyl-4-hydroxyphenyl)-1-[4-(4-hydroxybenzyl)phenyl]ethane, 1,1-bis(3,5-dimethyl-2-hydoxyphenyl)-1-[4-(4-hydroxybenzyl)phenyl]ethane, 1,1-bis(4-hydroxy-3-methylphenyl)-1-[4-(4-hydroxybenzyl)phenyl]ethane, 1,1-bis(2,6-dimethyl-4-hydroxyphenyl)-1-[4-(4-hydroxybenzyl)phenyl]ethane, 1,1-bis(3,4-dihydroxyphenyl)-1-[4-(4-hydroxybenzyl)phenyl]ethane, 1,1-bis(3,4,5-trihydroxyphenyl)-1-[4-(4-hydroxybenzyl)phenyl]ethane, 1,1-bis(4-hydroxyphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane, 1,1-bis(3,5-dimethyl-4-hydroxyphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane, 1,1-bis(3,5-dimethyl-2-hydroxyphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane,
Claim 7
Dependent Claim
4 words
1-bis(4-hydroxy-3-methylphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane, 1,1-bis(2,6-dimethyl-4-hydroxyphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane, 1,1-bis(3,4-dihydroxyphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane, 1,1-bis(3,4,5-trihydroxyphenyl)-1-[4-(1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane.
Claim 8
Dependent Claim
4 words
1-bis(4-hydroxy-3-methylphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane, 1,1-bis(2,6-dimethyl-4-hydroxyphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane, 1,1-bis(3,4-dihydroxyphenyl)-1-[4-{1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane, 1,1-bis(3,4,5-trihydroxyphenyl)-1-[4-(1-(4-hydroxyphenyl)-1-methylethyl}phenyl]ethane.
Claim 9
Dependent Claim
37 words
The composition according to claim 1, wherein the compound having the above general formula [I] is present in an amount of from 0.5 to 90 parts by weight per 100 parts by weight of the alkali-soluble resin.
Claim 10
Dependent Claim
23 words
The composition according to claim 1, which further comprises a 1,2-quinonediazide-sulfonic acid ester other than the compound having the above general formula [I].
Claim 11
Dependent Claim
33 words
The composition according to claim 7, wherein the 1,2-quinonediazide-sulfonic acid ester is present in an amount of from 3 to 100 parts by weight per 100 parts by weight of the alkali-soluble resin.
Claim 12
Dependent Claim
34 words
The composition according to claim 8, wherein the 1,2-quinonediazide-sulfonic acid ester is present in an amount such that the total amount of 1,2-quinonediazide-sulfonyl groups in the composition is from 5 to 25% by weight.
Claim 13
Dependent Claim
11 words
The composition according to claim 1, further comprising a dissolution accelerator.
Claim 14
Dependent Claim
47 words
The composition according to claim 10, wherein said dissolution accelerator comprises at least one member selected from the group consisting of 1,1-bis(4-hydroxyphenyl)-1-phenylethane, 1,1,1-tris(4-hydroxyphenyl)ethane, 3,5-dimethyl-4,4'-dihydroxydiphenylmethane, bisphenol A, 3,5-dimethyl-2',4-dihydroxydiphenylmethane, 1,1-bis(4-hydroxyphenyl)cyclohexane, 1,1-bis(4-hydroxyphenyl)-4-methylcyclohexane and alkali-soluble novolak resins having a weight average molecular weight in terms of polystyrene of 2,000 or less.
Claim 15
Dependent Claim
31 words
The composition according to claim 11, wherein said dissolution accelerator is present in an amount of up to 50 parts by weight per 100 parts by weight of the alkali-soluble resin.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-08-23 | 1997-02-22 | 1997-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-23 | 2001-02-22 | 2001-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-23 | 2005-02-22 | 2005-08-24 | $7700.00 | Window Closed / Lapsed |