EP0430477A1
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EP
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Positive resist composition
Assignee: Zeon Corp
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Filing: 1990-11-09
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Granted: —
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Expires: 2010-11-09
Abstract
Abstract A positive resist composition comprising an alkali-soluble phenolic resin and, as a photosensitive agent, a quinonediazide sulfonate of a phenolic compound represented by the formula wherein n is 1 or 2; R₁, R₂, R₃ and R₄ are independently selected from H, halogen, OH, C₁₋₅ alkyl, C₂₋₅ alkenyl and C₁₋₃ hydroxyalkyl; and R₅ is H, C₁₋₅ alkyl, C₂₋₅ alkenyl or C₆₋₁₅ aryl; provided that (i) there are 3 or 4 OH groups when n is 1 and 5 OH groups when n is 2, and (ii) that R₁, R₂, R₃ and R₄ are not all H when n is 2.
Inventors
- 👤 Masayuki Oie
- 👤 Shoji Kawata
- 👤 Yakamasa Yamada
- 👤 Shinya Pf Nippon Zeon Co. Ltd. Ikeda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:53
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
99 words
A positive resist composition comprising an alkalisoluble phenolic resin and, as a photosensitive agent, a quinonediazide sulfonate of a phenolic compound represented by the formula wherein n is 1 or 2; R₁, R₂, R₃ and R₄ are independently selected from H, halogen, OH, C₁₋₅ alkyl, C₂₋₅ alkenyl and C₁₋₃ hydroxyalkyl; and R₅ is H, C₁₋₅ alkyl, C₂₋₅ alkenyl or C₆₋₁₅ aryl; provided that (i) there are 3 or 4 OH groups when n is 1 and 5 OH groups when n is 2, and (ii) that R₁, R₂, R₃ and R₄ are not all H when n is 2.
Claim 2
Dependent Claim
99 words
A positive resist composition comprising an alkalisoluble phenolic resin and, as a photosensitive agent, a quinonediazide sulfonate of a phenolic compound represented by the formula wherein n is 1 or 2; R₁, R₂, R₃ and R₄ are independently selected from H, halogen, OH, C₁₋₅ alkyl, C₂₋₅ alkenyl and C₁₋₃ hydroxyalkyl; and R₅ is H, C₁₋₅ alkyl, C₂₋₅ alkenyl or C₆₋₁₅ aryl; provided that (i) there are 3 or 4 OH groups when n is 1 and 5 OH groups when n is 2, and (ii) that R₁, R₂, R₃ and R₄ are not all H when n is 2.
Claim 3
Dependent Claim
15 words
A composition as claimed in claim 1, wherein the quinonediazide sulfonate is an o-quinonediazide sulfonate.
Claim 4
Dependent Claim
23 words
A composition as claimed in claim 2, wherein the o-quinonediazide sulfonate is a 1,2-benzoquinonediazide-4-sulfonate, a 1,2-naphthoquinonediazide-4-sulfonate, a 1,2-naphthoquinonediazide-5-sulfonate, a 2,1-naphthoquinonediazide-4-sulfonate or a 2,1-naphthoquinonediazide-5-sulfonate.
Claim 5
Dependent Claim
27 words
A composition as claimed in any preceding claim, wherein the degree of esterification, as the quinonediazide sulfonate, of the OH groups in the phenolic compound, is 50-100%.
Claim 6
Dependent Claim
30 words
A composition as claimed in any preceding claim, which comprises 5 to 50 parts by weight of the quinonediazide sulfonate per 100 parts by weight of the alkali-soluble phenolic resin.
References Cited (Backward Citations)
EP0275970A2
Cited
EP0358871A2
Cited
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