Patent JP3073531B2 successfully refreshed from Google Patents.
Patent EP0076062A2 successfully refreshed from Google Patents.
US5234501A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Oxidation metod
Assignee: Tokyo Electron Ltd
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Filing: 1992-01-24
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Granted: 1993-08-10
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Expires: 2012-01-24
Abstract
Abstract The invention provides an oxidation method which utilizes a processing tube, a combustion chamber connected to the processing tube, inner and outer coaxial guide tubes connected to the combustion chamber, and an auxiliary combustion chamber connected to the combustion chamber, which includes the steps of placing a plurality of objects at predetermined intervals in the processing tube; generating steam in the combustion chamber by combustion of a mixture of oxygen and hydrogen gases and supplying the steam to the processing tube wherein the steam is generated by individually introducing oxygen gas and hydrogen gas into the combustion chamber through the outer and inner coaxial guide tubes and by heating the hydrogen gas in the inner guide tube or both the inner guide tube and the auxiliary combustion chamber such that ignition of the oxygen and hydrogen gases occurs when the gases come into contact with each other; and preventing a flame generated by the ignition of the gases from reaching an interior surface portion of at least one of the auxiliary combustion chamber and the combined chamber.
Inventors
- 👤 Ken Nakao
- 👤 Sadao Maruchi
- 👤 Yoshio Sakamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:00
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436; C; C30; C30B; C30B33/00; C30B33/005
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
226 words
An oxidation apparatus, comprising: a process tube adapted to contain a boat in which a plurality of objects to be processed are placed at predetermined intervals; first heating means for heating an interior of said process tube; a combustion chamber, located outside of and connected to said process tube via a connecting tube, for generating steam by combustion of a mixture of oxygen and hydrogen gases therein and supplying the steam to said process tube; a double-tube type structure connected to said combustion chamber, said double-tube type structure having outer and inner guide tubes for individually introducing the oxygen gas through said outer guide tube and the hydrogen gas through said inner guide tube into said combustion chamber; an auxiliary combustion chamber formed as an outlet portion of said outer guide tube; an injection nozzle formed as an outlet portion of said inner guide tube and located near a front end portion of said auxiliary combustion chamber; and second heating means provided around said outer guide tube for heating the gases to a temperature at which ignition of the gases occurs when the gases come into contact with each other; wherein said auxiliary combustion chamber comprises an enlargement portion of said outer guide tube sufficient in size to prevent a flame generated by combustion of the gases from reaching a surface of said auxiliary combustion chamber.
Claim 2
Dependent Claim
226 words
An oxidation apparatus, comprising: a process tube adapted to contain a boat in which a plurality of objects to be processed are placed at predetermined intervals; first heating means for heating an interior of said process tube; a combustion chamber, located outside of and connected to said process tube via a connecting tube, for generating steam by combustion of a mixture of oxygen and hydrogen gases therein and supplying the steam to said process tube; a double-tube type structure connected to said combustion chamber, said double-tube type structure having outer and inner guide tubes for individually introducing the oxygen gas through said outer guide tube and the hydrogen gas through said inner guide tube into said combustion chamber; an auxiliary combustion chamber formed as an outlet portion of said outer guide tube; an injection nozzle formed as an outlet portion of said inner guide tube and located near a front end portion of said auxiliary combustion chamber; and second heating means provided around said outer guide tube for heating the gases to a temperature at which ignition of the gases occurs when the gases come into contact with each other; wherein said auxiliary combustion chamber comprises an enlargement portion of said outer guide tube sufficient in size to prevent a flame generated by combustion of the gases from reaching a surface of said auxiliary combustion chamber.
Claim 3
Dependent Claim
22 words
An apparatus according to claim 1, wherein a central line of said inner guide tube coincides with that of said combustion chamber.
Claim 4
Dependent Claim
33 words
An apparatus according to claim 2, wherein said injection nozzle is oriented at an angle sufficient to keep said flame from contacting a surface of said auxiliary combustion chamber or said combustion chamber.
Claim 5
Dependent Claim
22 words
An apparatus according to claim 1, wherein said inner guide tube is connected in a substantially horizontal manner to said combustion chamber.
Claim 6
Dependent Claim
24 words
An apparatus according to claim 4, wherein a central axis of said inner guide tube coincides with a central line of said combustion chamber.
Claim 7
Dependent Claim
36 words
An apparatus according to claim 5, wherein said injection nozzle is oriented at a downward angle sufficient to keep said flame from contacting a surface of one of said auxiliary combustion chamber and said combustion chamber.
Claim 8
Dependent Claim
36 words
An apparatus according to claim 4, wherein a central line of said inner guide tube is sufficiently lower than that of a combustion chamber to prevent said flame from reaching a surface of said combustion chamber.
Claim 9
Dependent Claim
18 words
An apparatus according to claim 1, which comprises a third heating means provided around said auxiliary combustion chamber.
Claim 10
Dependent Claim
18 words
An apparatus according to claim 8, wherein said third heating means is integrated with said second heating means.
Claim 11
Dependent Claim
228 words
An oxidation apparatus, which comprises: a process tube adapted to contain a boat in which a plurality of objects to be processed are placed at predetermined intervals; first heating means, for heating an interior of said process tube; a combustion chamber, located outside of and connected to said process tube with a connecting tube, for generating steam by combustion of a mixture of oxygen and hydrogen gases therein and supplying the steam to said process tube; a double-tube type structure connected to said combustion chamber, said double-tube type structure having outer and inner guide tubes for individually introducing the oxygen gas through said outer guide tube and the hydrogen gas through said inner guide tube into said combustion chamber; an auxiliary combustion chamber formed as an outlet portion of said outer guide tube; an injection nozzle formed as an outlet portion of said inner guide tube and located near a base of said auxiliary combustion chamber; and second heating means, provided around said outer guide tube and auxiliary combustion chamber, for heating the gases to a temperature at which ignition of the gases occurs when said gases come into contact with each other wherein said auxiliary combustion chamber comprises an enlargement of said outer guide tube sufficient in size to prevent a flame generated by combustion of the gases from reaching a surface of said auxiliary combustion chamber.
Claim 12
Dependent Claim
228 words
An oxidation apparatus, which comprises: a process tube adapted to contain a boat in which a plurality of objects to be processed are placed at predetermined intervals; first heating means, for heating an interior of said process tube; a combustion chamber, located outside of and connected to said process tube with a connecting tube, for generating steam by combustion of a mixture of oxygen and hydrogen gases therein and supplying the steam to said process tube; a double-tube type structure connected to said combustion chamber, said double-tube type structure having outer and inner guide tubes for individually introducing the oxygen gas through said outer guide tube and the hydrogen gas through said inner guide tube into said combustion chamber; an auxiliary combustion chamber formed as an outlet portion of said outer guide tube; an injection nozzle formed as an outlet portion of said inner guide tube and located near a base of said auxiliary combustion chamber; and second heating means, provided around said outer guide tube and auxiliary combustion chamber, for heating the gases to a temperature at which ignition of the gases occurs when said gases come into contact with each other wherein said auxiliary combustion chamber comprises an enlargement of said outer guide tube sufficient in size to prevent a flame generated by combustion of the gases from reaching a surface of said auxiliary combustion chamber.
Claim 13
Dependent Claim
22 words
An apparatus according to claim 10, wherein a central line of said inner guide tube coincides with that of said combustion chamber.
Claim 14
Dependent Claim
35 words
An apparatus according to claim 11, wherein said injection nozzle is oriented at an angle sufficient to keep said flame from contacting a surface of one of said auxiliary combustion chamber and said combustion chamber.
Claim 15
Dependent Claim
22 words
An apparatus according to claim 10, wherein said inner guide tube is connected in a substantially horizontal manner to said combustion chamber.
Claim 16
Dependent Claim
24 words
An apparatus according to claim 13, wherein a central axis of said inner guide tube coincides with a central line of said combustion chamber.
Claim 17
Dependent Claim
36 words
An apparatus according to claim 14, wherein said injection nozzle is oriented at a downward angle sufficient to keep said flame from contacting a surface of one of said auxiliary combustion chamber and said combustion chamber.
Claim 18
Dependent Claim
35 words
An apparatus according to claim 13, wherein a central line of said inner guide tube is sufficiently lower than that of combustion chamber to prevent said flame from reaching a surface of said combustion chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-09 | 1997-02-08 | 1997-08-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-09 | 2001-02-08 | 2001-08-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-09 | 2005-02-08 | 2005-08-10 | $7700.00 | Window Closed / Lapsed |