Optical spectrum analyzer having double-pass monochromator

Claim 2

A double-pass scanning monochromator comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; a slit for passing a selected portion of said dispersed light beam to produce a filtered light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along said dispersion axis; means for directing said filtered light beam to said diffraction grating such that said filtered light beam is recombined by said diffraction grating to produce an output light beam; and an output aperture for passing a selected portion of said output light beam to provide increased selectivity, whereby a high close-in dynamic range is achieved.

Claim 3

A double-pass scanning monochromator as defined in claim 1 wherein said means for providing an input light beam comprises an input optical fiber.

Claim 4

A double-pass scanning monochromator as defined in claim 1 wherein said output aperture comprises an output optical fiber.

Claim 5

A double-pass scanning monochromator as defined in claim 1 further including an optical detector for converting said output light beam to an output electrical signal.

Claim 6

A double-pass scanning monochromator as defined in claim 1 further including means for rotating the polarization components of said dispersed light beam or said filtered light beam by about 90° between incidences on said diffraction grating.

Claim 7

A double-pass scanning monochromator as defined in claim 5 wherein said means for rotating comprises a half wave plate.

Claim 8

A double-pass scanning monochromator as defined in claim 1 further including means for causing relative movement between said output aperture and said output light beam such that said output aperture and said output light beam remain in alignment during rotation of said diffraction grating.

Claim 9

A double-pass scanning monochromator as defined in claim 7 wherein said output aperture comprises an output optical fiber and wherein said means for causing relative movement comprises means for translating said output optical fiber in a plane perpendicular to said output light beam to track said output light beam during rotation of said diffraction grating.

Claim 10

A double pass scanning monochromator as defined in claim 8 wherein said means for translating said output optical fiber comprises a biaxial flexure plate having a movable element, means for sensing the position of said movable element in said plane, linear actuators for causing movement of said movable element in said plane and feedback means responsive to the sensed position of said movable element and to a desired position of said movable element for controlling said linear actuators.

Claim 11

A double pass scanning monochromator as defined in claim 1 further including optical means for collimating said input light beam prior to incidence on said diffraction grating, for focusing said dispersed light beam at or near said slit, for collimating said filtered light beam prior to incidence on said diffraction grating and for focusing said output light beam at or near said output aperture.

Claim 12

A double pass scanning monochromator as defined in claim 10 wherein said optical means comprises a lens having an optical axis.

Claim 13

A double pass scanning monochromator as defined in claim 11 wherein said input light beam and said dispersed light beam are displaced by equal first distances on opposite sides of the optical axis of said lens and wherein said filtered light beam and said output light beam are displaced by equal second distances on opposite sides of the optical axis of said lens.

Claim 14

A double pass scanning monochromator as defined in claim 12 wherein center rays of said input light beam, said dispersed light beam, said filtered light beam and said output light beam lie in a plane.

Claim 15

A double-pass scanning monochromator as defined in claim 1 wherein said means for rotating said diffraction grating comprises a drive shaft rigidly connected to said diffraction grating and defining an axis of rotation, and a motor for rotating said drive shaft about said axis of rotation, and wherein said monochromator further includes means directly connected to said drive shaft for sensing the rotational position of said drive shaft and feedback means responsive to the sensed rotational position and to a sweep signal for controlling said motor.

Claim 16

A double-pass scanning monochromator as defined in claim 14 wherein said motor is directly connected to said drive shaft.

Claim 17

A double pass scanning monochromator as defined in claim 1 further including a drive shaft rigidly connected to said diffraction grating and defining an axis of rotation and means directly connected to said drive shaft for sensing the rotational position of said diffraction grating.

Claim 18

A double pass scanning monochromator as defined in claim 4 further including means for causing relative movement between said output light beam and said output aperture such that the output electrical signal of said optical detector is representative only of stray light in the monochromator and electrical noise generated by the optical detector.

Claim 19

A double pass scanning monochromator as defined in claim 4 further including means for displacing said output aperture relative to said output light beam such that the output electrical signal of said optical detector is representative only of stray light in the monochromator and electrical noise generated by the optical detector.

Claim 20

A double-pass scanning monochromator as defined in claim 10 wherein said optical means comprises a single lens for collimating said input light beam, for focusing said dispersed light beam, for collimating said filtered light beam and for focusing said output light beam.

Claim 21

A double-pass scanning monochromator as defined in claim 1 further including means defining a plurality of slits having different widths and means for positioning a selected one of said slits in said dispersed light beam to provide a selected resolution.

Claim 22

A scanning monochromator comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along the dispersion axis; means for converting said dispersed light beam into an output light beam; an output aperture for receiving said output light beam; and means for causing movement of said output aperture such that said output light beam and said output aperture remain in alignment during rotation of said diffraction grating.

Claim 23

A scanning monochromator comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along the dispersion axis; means for converting said dispersed light beam into an output light beam; an output aperture for receiving said output light beam; and means for causing movement of said output aperture such that said output light beam and said output aperture remain in alignment during rotation of said diffraction grating.

Claim 24

A scanning monochromator as defined in claim 21 wherein said output aperture comprises an output optical fiber and wherein said means for causing movement comprises means for translating said output optical fiber in a plane perpendicular to said output light beam to track said output light beam during rotation of said diffraction grating.

Claim 25

A scanning monochromator as defined in claim 22 further including means for storing calibration values representative of the position of said output light beam during rotation of said diffraction grating, said calibration values being used to control said translation means during rotation of said diffraction grating.

Claim 26

A scanning monochromator as defined in claim 22 wherein said means for translating said output optical fiber comprises a biaxial flexure plate having a movable element, means for sensing the position of said movable element in said plane, linear actuators for causing movement of said movable element in said plane and feedback means responsive to the sensed position of said movable element and to a desired position of said movable element for controlling said linear actuators.

Claim 27

A scanning monochromator comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along the dispersion axis; means for converting said dispersed light beam into an output light beam; an output aperture for receiving said output light beam; an optical detector coupled to said output aperture for converting said output light beam to an output electrical signal; and means for causing displacement of said output aperture such that the output electrical signal of said optical detector is representative only of stray light in the monochromator and electrical noise generated by the optical detector.

Claim 28

A scanning monochromator comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along the dispersion axis; means for converting said dispersed light beam into an output light beam; an output aperture for receiving said output light beam; an optical detector coupled to said output aperture for converting said output light beam to an output electrical signal; and means for causing displacement of said output aperture such that the output electrical signal of said optical detector is representative only of stray light in the monochromator and electrical noise generated by the optical detector.

Claim 29

A scanning monochromator as defined in claim 25 wherein said output aperture comprises an output optical fiber and wherein said means for causing displacement comprises means for displacing said output optical fiber relative to said output light beam.

Claim 30

A scanning monochromator as defined in claim 26 wherein said means for displacing said output optical fiber comprises a biaxial flexure plate having a movable element, means for sensing the position of said movable element in said plane, linear actuators for causing movement of said movable element in said plane and feedback means responsive to the sensed position of said movable element and to a desired position of said movable element for controlling said linear actuators.

Claim 31

A scanning monochromator comprising: means for providing an input light beam; a first stage monochromator including a first diffraction grating for diffracting the input light beam and mean for rotating said first diffraction grating, said first stage monochromator providing a first stage output light beam; a second stage monochromator including a second diffraction grating for diffracting the first stage output light beam and means for rotating said second diffraction grating, said second stage monochromator providing a second stage output light beam; and means for rotating the polarization components of said first stage output light beam by 90° prior to incidence on said second diffraction grating such that the second stage output light beam is substantially independent of the polarization of said input light beam.

Claim 32

A scanning monochromator comprising: means for providing an input light beam; a first stage monochromator including a first diffraction grating for diffracting the input light beam and mean for rotating said first diffraction grating, said first stage monochromator providing a first stage output light beam; a second stage monochromator including a second diffraction grating for diffracting the first stage output light beam and means for rotating said second diffraction grating, said second stage monochromator providing a second stage output light beam; and means for rotating the polarization components of said first stage output light beam by 90° prior to incidence on said second diffraction grating such that the second stage output light beam is substantially independent of the polarization of said input light beam.

Claim 33

A scanning monochromator as defined in claim 28 wherein said means for rotating the polarization components of said first stage output light beam by 90° comprises a half-wave plate.

Claim 36

A double-pass scanning monochromator comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; a slit for passing a selected portion of said dispersed light beam to produce a filtered light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along said dispersion axis, said means for rotating said diffraction grating comprising a drive shaft rigidly connected to said diffraction grating and defining an axis of rotation, a motor for rotating said drive shaft about said axis of rotation, a shaft angle encoder directly connected to said drive shaft for sensing the rotational position of said diffraction grating, and feedback means responsive to the sensed rotational position and to a sweep signal for controlling said motor; means for directing said filtered light beam to said diffraction grating such that said filtered light beam is recombined by said diffraction grating to produce an output beam; an output aperture for receiving said output light beam; an optical detector coupled to said output aperture for converting said output light beam to an output electrical signal; means for translating said output aperture in a plane perpendicular to said output light beam to track said output light beam during rotation of said diffraction grating, said means for translating said output aperture including means for displacing said output aperture relative to said output light beam in an optical chopping mode such that the output electrical signal of said optical detector is representative of stray light in the monochromator and electrical noise generated by the optical detector; and means for rotating the polarization components of said dispersed light beam or said filtered light beam by about 90°.

Claim 37

A double-pass scanning monochromator comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; a slit for passing a selected portion of said dispersed light beam to produce a filtered light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along said dispersion axis, said means for rotating said diffraction grating comprising a drive shaft rigidly connected to said diffraction grating and defining an axis of rotation, a motor for rotating said drive shaft about said axis of rotation, a shaft angle encoder directly connected to said drive shaft for sensing the rotational position of said diffraction grating, and feedback means responsive to the sensed rotational position and to a sweep signal for controlling said motor; means for directing said filtered light beam to said diffraction grating such that said filtered light beam is recombined by said diffraction grating to produce an output beam; an output aperture for receiving said output light beam; an optical detector coupled to said output aperture for converting said output light beam to an output electrical signal; means for translating said output aperture in a plane perpendicular to said output light beam to track said output light beam during rotation of said diffraction grating, said means for translating said output aperture including means for displacing said output aperture relative to said output light beam in an optical chopping mode such that the output electrical signal of said optical detector is representative of stray light in the monochromator and electrical noise generated by the optical detector; and means for rotating the polarization components of said dispersed light beam or said filtered light beam by about 90°.

Claim 38

An optical spectrum analyzer comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; a slit for passing a selected portion of said dispersed light beam to produce a filtered light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along said dispersion axis; means for sensing the position of said diffraction grating and providing a diffraction grating position signal; means for directing said filtered light beam is recombined by said diffraction grating to produce an output light beam; an output aperture for passing a selected portion of said output light beam to provide increased selectivity, whereby a high close-in dynamic range is achieved; an optical detector coupled to said output aperture for converting said output light beam to an output electrical signal; and means for displaying said output electrical signal as a function of said diffraction grating position signal to provide a display of the optical spectrum of said input light beam.

Claim 39

An optical spectrum analyzer comprising: means for providing an input light beam; a diffraction grating for diffracting the input light beam along a dispersion axis to produce a spatially dispersed light beam; a slit for passing a selected portion of said dispersed light beam to produce a filtered light beam; means for rotating said diffraction grating such that said dispersed light beam is scanned along said dispersion axis; means for sensing the position of said diffraction grating and providing a diffraction grating position signal; means for directing said filtered light beam is recombined by said diffraction grating to produce an output light beam; an output aperture for passing a selected portion of said output light beam to provide increased selectivity, whereby a high close-in dynamic range is achieved; an optical detector coupled to said output aperture for converting said output light beam to an output electrical signal; and means for displaying said output electrical signal as a function of said diffraction grating position signal to provide a display of the optical spectrum of said input light beam.

Claim 42

A method as defined in claim 33 wherein the step of directing the output light beam through an output aperture comprises directing said output light beam to an output optical fiber.

Claim 45

A scanning monochromator comprising: means for providing an input light beam; a first stage monochromator including a first diffraction grating for diffracting the input light beam and means for rotating said first diffraction grating, said first stage monochromator providing a first stage output light beam; a second stage monochromator including a second diffraction grating for diffracting the first stage output light beam and means for rotating said second diffraction grating, said second diffraction grating diffracting said first stage output light beam such that said first stage output light beam is recombined by said second diffraction grating to provide a second stage output light beam; and an output aperture for passing a selected portion of said second stage output light beam to provide increased selectivity, whereby a high close-in dynamic range is achieved.

Claim 46

A scanning monochromator comprising: means for providing an input light beam; a first stage monochromator including a first diffraction grating for diffracting the input light beam and means for rotating said first diffraction grating, said first stage monochromator providing a first stage output light beam; a second stage monochromator including a second diffraction grating for diffracting the first stage output light beam and means for rotating said second diffraction grating, said second diffraction grating diffracting said first stage output light beam such that said first stage output light beam is recombined by said second diffraction grating to provide a second stage output light beam; and an output aperture for passing a selected portion of said second stage output light beam to provide increased selectivity, whereby a high close-in dynamic range is achieved.

Claim 47

A scanning monochromator as defined in claim 36 wherein said output aperture comprises an output optical fiber.