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US5231298A
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GaAs device having a strain-free c-doped layer
Assignee: METHODE MASSACHUSETTES (NOW KNOWN AS) LLC
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Filing: 1992-02-11
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Granted: 1993-07-27
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Expires: 2012-02-11
Abstract
Abstract A device made by a process of making strain-free, heavily carbon-doped p-type epitaxial layers for use in high performance devices and at least one such device so made. The process essentially includes the epitaxial deposition of a strain-free, carbon-doped p-type layer in a GaAs HBT device to form the base layer thereof in a manner that includes the balancing of the strain of the crystal lattice structure caused by the carbon doping by co-doping the base layer with an isovalent and isoelectric dopant. The co-doping also improves device performance. It also effects alloy hardening, which inhibits further defect formation, improves mobility and carrier lifetime of the base layer and, by narrowing the energy gap, it improves ohmic contact formation.
Inventors
- 👤 James T. Daly
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 11:27
CPC Classifications
H; H10; H10D; H10D10/00; H10D10/01; H10D10/021; H10D62/00; H10D62/80; H10D62/85; H10D62/854; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3444
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
208 words
In an epitaxially formed high performance GaAs device comprising a collector, a base and an emitter, the improvement wherein; said base is a strain-free, carbon doped p + -type GaAs layer, said layer co-doped with an indium isovalent, isoelectronic dopant to strain a resultant lattice structure thereof in a direction opposite to that induced by said carbon doping, wherein the amount of said indium co-dopant to counteract the strain due to said carbon-doping is derived from the following equation: ##EQU6## where a GaAs is the normal lattice constant of GaAs (5.6534 A), a 1 is the lattice constant of carbon doped GaAs, and x In is the mole fraction of indium required to be added to said carbon-doped GaAs layer; wherein the counteraction of the strain due to the addition of said indium co-dopant is given by Vegard's law as a 2= a GaAs+0.405.sup.·x In where a 2 is the lattice constant of the GaAs lattice due to the addition of indium; and wherein the lattice constant ( a 1) of said carbon-doped GaAs layer is derived from the formula a 1= a GaAs-2.0937.sup.· x C where x C is the mole fraction of carbon in the solid, based on a lattice constant of 3.5597 A for diamond.
Claim 2
Dependent Claim
208 words
In an epitaxially formed high performance GaAs device comprising a collector, a base and an emitter, the improvement wherein; said base is a strain-free, carbon doped p + -type GaAs layer, said layer co-doped with an indium isovalent, isoelectronic dopant to strain a resultant lattice structure thereof in a direction opposite to that induced by said carbon doping, wherein the amount of said indium co-dopant to counteract the strain due to said carbon-doping is derived from the following equation: ##EQU6## where a GaAs is the normal lattice constant of GaAs (5.6534 A), a 1 is the lattice constant of carbon doped GaAs, and x In is the mole fraction of indium required to be added to said carbon-doped GaAs layer; wherein the counteraction of the strain due to the addition of said indium co-dopant is given by Vegard's law as a 2= a GaAs+0.405.sup.·x In where a 2 is the lattice constant of the GaAs lattice due to the addition of indium; and wherein the lattice constant ( a 1) of said carbon-doped GaAs layer is derived from the formula a 1= a GaAs-2.0937.sup.· x C where x C is the mole fraction of carbon in the solid, based on a lattice constant of 3.5597 A for diamond.
Claim 3
Dependent Claim
79 words
In an epitaxially formed high performance GaAs device comprising a collector, a base and an emitter, the improvement wherein; said base is a strain-free, carbon doped p + -type GaAs layer, said layer co-doped with an indium isovalent, isoelectronic dopant to strain a resultant lattice structure thereof in a direction opposite to that induced by said carbon doping, wherein the amount of said indium co-dopant to the amount of carbon dopant is: ##EQU7## where x C is about 0.1.
Claim 4
Dependent Claim
79 words
In an epitaxially formed high performance GaAs device comprising a collector, a base and an emitter, the improvement wherein; said base is a strain-free, carbon doped p + -type GaAs layer, said layer co-doped with an indium isovalent, isoelectronic dopant to strain a resultant lattice structure thereof in a direction opposite to that induced by said carbon doping, wherein the amount of said indium co-dopant to the amount of carbon dopant is: ##EQU7## where x C is about 0.1.
Claim 5
Dependent Claim
91 words
In an epitaxially formed high performance GaAs device comprising a collector, a base and an emitter, the improvement wherein; said base is a strain-free, carbon doped p + -type GaAs layer, said layer co-doped with an antimony isovalent, isoelectronic dopant to strain a resultant lattice structure thereof in a direction opposite to that induced by said carbon doping, wherein the amount of said antimony co-dopant to the amount of carbon dopant is: ##EQU8## where x C is about 0.1, and where a lattice constant for gallium antimonide (GaSb) is 6.0954 Å.
Claim 6
Dependent Claim
91 words
In an epitaxially formed high performance GaAs device comprising a collector, a base and an emitter, the improvement wherein; said base is a strain-free, carbon doped p + -type GaAs layer, said layer co-doped with an antimony isovalent, isoelectronic dopant to strain a resultant lattice structure thereof in a direction opposite to that induced by said carbon doping, wherein the amount of said antimony co-dopant to the amount of carbon dopant is: ##EQU8## where x C is about 0.1, and where a lattice constant for gallium antimonide (GaSb) is 6.0954 Å.
References Cited (Backward Citations)
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