Patent US5225039A successfully refreshed from Google Patents.
US5225039A
Expired / Lapsed
US
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Method for producing a diffraction grating
Assignee: Canon Inc
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Filing: 1992-05-13
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Granted: 1993-07-06
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Expires: 2012-05-13
Abstract
Abstract A phase-shifted diffraction grating for devices such as semiconductor lasers is produced by forming a first diffraction grating pattern of a first material having a reference pitch on a substrate. The substrate is then coated with a second material on both the first material and an exposed portion of the substrate in a region where a second diffraction grating having a pitch which is the reverse of the reference pitch of the first diffraction grating pattern is to be formed. The first material is removed by lift off to obtain the second diffraction grating pattern on the second diffraction grating region. The substrate is etched using the first diffraction grating as an etching mask to form the first diffraction grating and then the substrate is etched with the second diffraction grating pattern as an etching mask to obtain a second diffraction grating continuous with the first diffraction grating. The first diffraction grating pattern may have a rectangular or square shape to stably and accurately remove the first material by lift-off and the boundary between the first and second diffraction gratings can be stably and accurately defined by self-alignment.
Inventors
- 👤 Noriaki Ohguri
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 01:20
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/18; G02B5/1847; G02B5/1857
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
174 words
A method for producing a phase-shifted diffraction grating comprising the steps of: forming a first diffraction grating pattern of a first material having a reference pitch on a substrate; coating a second material different from said first material on both of said first material and an exposed portion of said substrate in a region where a second diffraction grating pattern having a pitch reverse to the reference pitch of said first diffraction grating pattern of said first material is to be formed; removing said first material by a lift-off method to obtain said second diffraction grating pattern of said second material having the reverse pitch in said region on said substrate; etching said substrate with said first diffraction grating pattern of said first material having the reference pitch used as an etching mask to form a first diffraction grating; and etching said substrate with said second diffraction grating pattern of said second material having the reverse pitch used as an etching mask to obtain a second diffraction grating continuous with said first diffraction grating.
Claim 2
Independent Claim
174 words
A method for producing a phase-shifted diffraction grating comprising the steps of: forming a first diffraction grating pattern of a first material having a reference pitch on a substrate; coating a second material different from said first material on both of said first material and an exposed portion of said substrate in a region where a second diffraction grating pattern having a pitch reverse to the reference pitch of said first diffraction grating pattern of said first material is to be formed; removing said first material by a lift-off method to obtain said second diffraction grating pattern of said second material having the reverse pitch in said region on said substrate; etching said substrate with said first diffraction grating pattern of said first material having the reference pitch used as an etching mask to form a first diffraction grating; and etching said substrate with said second diffraction grating pattern of said second material having the reverse pitch used as an etching mask to obtain a second diffraction grating continuous with said first diffraction grating.
Claim 3
Dependent Claim
35 words
A method for producing a phase-shifted diffraction grating according to claim 1, further comprising a step of forming a first etching protection layer on said region where said second diffraction grating is to be formed.
Claim 4
Dependent Claim
33 words
A method for producing a phase-shifted diffraction grating according to claim 1, further comprising a step of forming a second etching protection layer on a region where said first diffraction grating is formed.
Claim 5
Dependent Claim
38 words
A method for producing a phase-shifted diffraction grating according to claim 3, wherein said removing step and said second etching protection layer forming step are simultaneously performed while forming a boundary between said first and second diffraction gratings.
Claim 6
Dependent Claim
28 words
A method for producing a phase-shifted diffraction grating according to claim 1, wherein a boundary between said first and second diffraction gratings is formed in a self-alignment manner.
Claim 7
Dependent Claim
22 words
A method for producing a phase-shifted diffraction grating according to claim 1, wherein said first diffraction grating pattern has a rectangular shape.
Claim 8
Dependent Claim
46 words
A method for producing a phase-shifted diffraction grating according to claim 1, wherein said first diffraction grating pattern forming step comprises: coating a photoresist on said substrate, performing a two-beam interference exposure using a laser for interference exposure and developing said photoresist with an alkaline solution.
Claim 9
Dependent Claim
34 words
A method for producing a phase-shifted diffraction grating according to claim 7, wherein said photoresist comprises a base resin of polyvinylphenol or its copolymer with different monomer and a photosensitive agent of quinonediazide group.
Claim 10
Dependent Claim
23 words
A method for producing a phase-shifted diffraction grating according to claim 7, wherein the thickness of said photoresist is less than 3000 Å.
Claim 11
Dependent Claim
18 words
A method for producing a phase-shifted diffraction grating according to claim 1, wherein said substrate comprises a semiconductor.
Claim 12
Dependent Claim
18 words
A method for producing a phase-shifted diffraction grating according to claim 1, wherein said substrate comprises a glass.
Claim 13
Dependent Claim
19 words
A method for producing a phase-shifted diffraction grating according to claim 1, wherein said substrate comprises an optical glass.
Claim 14
Dependent Claim
18 words
A method for producing a phase-shifted diffraction grating according to claim 1, wherein said second material comprises titanium.
Claim 15
Dependent Claim
30 words
A method for producing a phase-shifted diffraction grating according to claim 1, wherein the thickness of said second material is less than one half the thickness of said first material.
Claim 16
Dependent Claim
21 words
A method for producing a phase-shifted diffraction grating according to claim 2, wherein said first etching protection layer comprises a photoresist.
Claim 17
Dependent Claim
31 words
A method for producing a phase-shifted diffraction grating according to claim 2, wherein the thickness of said first etching protection layer is in a range between 1.5 μm and 2.0 μm.
Claim 18
Dependent Claim
20 words
A method for producing a phase-shifted diffraction grating according to claim 3, wherein said second etching protection layer comprises titanium.
Claim 19
Dependent Claim
31 words
A method for producing a phase-shifted diffraction grating according to claim 3, wherein the thickness of said second etching protection layer is in a range between 2000 Å and 3000 Å.
Claim 20
Independent Claim
205 words
A method for producing a phase-shifted diffraction grating, said method comprising the steps of: forming a first diffraction grating pattern of a first material having a reference pitch on a substrate; coating a second material different from said first material on both of said first material and an exposed portion of said substrate in a region where a second diffraction grating pattern having a pitch reverse to the reference pitch of said first diffraction grating pattern of said first material is to be formed; forming a first etching protection layer on the region where said second diffraction grating pattern is to be formed; etching said substrate with said first diffraction grating pattern of said first material having the reference pitch used as an etching mask to form a first diffraction grating; forming a second etching protection layer on a region where said first diffraction grating is formed; removing said first material by a lift-off method to obtain said second diffraction grating pattern of said second material having the reverse pitch; and etching said substrate with said second diffraction grating pattern of said second material having the reverse pitch used as an etching mask to form a second diffraction grating continuous to said first diffraction grating.
Claim 21
Independent Claim
205 words
A method for producing a phase-shifted diffraction grating, said method comprising the steps of: forming a first diffraction grating pattern of a first material having a reference pitch on a substrate; coating a second material different from said first material on both of said first material and an exposed portion of said substrate in a region where a second diffraction grating pattern having a pitch reverse to the reference pitch of said first diffraction grating pattern of said first material is to be formed; forming a first etching protection layer on the region where said second diffraction grating pattern is to be formed; etching said substrate with said first diffraction grating pattern of said first material having the reference pitch used as an etching mask to form a first diffraction grating; forming a second etching protection layer on a region where said first diffraction grating is formed; removing said first material by a lift-off method to obtain said second diffraction grating pattern of said second material having the reverse pitch; and etching said substrate with said second diffraction grating pattern of said second material having the reverse pitch used as an etching mask to form a second diffraction grating continuous to said first diffraction grating.
Claim 22
Dependent Claim
38 words
A method for producing a phase-shifted diffraction grating according to claim 19, wherein said removing step and said second etching protection layer forming step are simultaneously performed while forming a boundary between said first and second diffraction gratings.
Claim 23
Dependent Claim
28 words
A method for producing a phase-shifted diffraction grating according to claim 19, wherein a boundary between said first and second diffraction gratings is formed in a self-alignment manner.
Claim 24
Dependent Claim
22 words
A method for producing a phase-shifted diffraction grating according to claim 19, wherein said first diffraction grating pattern has a rectangular shape.
Claim 25
Dependent Claim
46 words
A method for producing a phase-shifted diffraction grating according to claim 19, wherein said first diffraction grating pattern forming step comprises: coating a photoresist on said substrate, performing a two-beam interference exposure using a laser for interference exposure and developing said photoresist with an alkaline solution.
Claim 26
Dependent Claim
34 words
A method for producing a phase-shifted diffraction grating according to claim 23, wherein said photoresist comprises a base resin of polyvinylphenol or its copolymer with different monomer and a photosensitive agent of quinonediazide group.
References Cited (Backward Citations)
JPS62262004A
Cited
US4988404A
Cited
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