Patent US5225000A successfully refreshed from Google Patents.
US5225000A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for cleaning closed spaces with ultraviolet rays
Assignee: Ebara Research Co Ltd
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Filing: 1991-10-29
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Granted: 1993-07-06
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Expires: 2011-10-29
Abstract
Abstract Cleaning a closed space such as safety cabinets, clean boxes, safes and wafer storage spaces are performed by irradiating a photoelectron emitting member with ultraviolet rays and/or other forms of radiation to emit photoelectrons into the closed space, electrically charging the fine particles in the closed space with the emitted photoelectrons, and removing the charged fine particles from the closed space.
Inventors
- 👤 Toshiaki Fujii
- 👤 Hidetomo Suzuki
- 👤 Naoaki Ogure
- 👤 Kazuhiko Sakamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 06:07
CPC Classifications
B; B03; B03C; B03C3/00; B03C3/02; B03C3/16
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
142 words
A method of cleaning a closed space comprising the steps of irradiating a photoelectron emitting member with ultraviolet rays with an amount of light exposure of from 10 μw/cm 2 to 10,000 μw/cm 2 in an electric field created by applying a voltage of from 0.1 V/cm to 2 kv/cm to thereby emit photoelectrons into the closed space, electrically charging fine particles in the closed space with the emitted photoelectrons, and trapping the charged fine particles with fine particle collecting members, to thereby remove the charged fine particles from the closed space in which electric charging is performed, said collecting members consisting of at least one member selected from among a fine particle collecting electrode, an electrostatic filter and an ion-exchange filter or the electrode member for creating an electric field also serving as the member for trapping the charged fine particles.
Claim 2
Independent Claim
142 words
A method of cleaning a closed space comprising the steps of irradiating a photoelectron emitting member with ultraviolet rays with an amount of light exposure of from 10 μw/cm 2 to 10,000 μw/cm 2 in an electric field created by applying a voltage of from 0.1 V/cm to 2 kv/cm to thereby emit photoelectrons into the closed space, electrically charging fine particles in the closed space with the emitted photoelectrons, and trapping the charged fine particles with fine particle collecting members, to thereby remove the charged fine particles from the closed space in which electric charging is performed, said collecting members consisting of at least one member selected from among a fine particle collecting electrode, an electrostatic filter and an ion-exchange filter or the electrode member for creating an electric field also serving as the member for trapping the charged fine particles.
References Cited (Backward Citations)
US4750917A
Cited
EP0241555B1
Cited
JPS6354958A
Cited
JPS6377557A
Cited
JPS63147565A
Cited
US5060805A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-05 | 1997-01-04 | 1997-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-05 | 2001-01-04 | 2001-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-05 | 2005-01-04 | 2005-07-06 | $7700.00 | Window Closed / Lapsed |