US5224265A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fabrication of discrete thin film wiring structures
Assignee: International Business Machines Corp
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Filing: 1991-10-29
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Granted: 1993-07-06
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Expires: 2011-10-29
Abstract
Abstract Multilayer thin film structures are fabricated in a parallel manner by creating testable sub-units and then joining them together to form a finished three-dimensional wiring matrix. Thus, there is disclosed a process for the fabrication of a thin film wiring structure including the steps of: forming a core wiring structure which includes the steps of: a. providing a low expansion, metallic, patterned core material; b. encapsulating the core material in a dielectric material; c. forming vias in the dielectric material; and d. metallizing the dielectric material in the vias and on the surface of the dielectric material; forming at least one cover laminate which includes dielectric material and a low expansion, metallic carrier; laminating the at least one cover laminate to the core wiring structure wherein the dielectric material of the cover laminate is in contact with the core wiring structure; forming vias through the cover laminate, the vias communicating with the vias in the core wiring structure; and filling the vias in the cover laminate and the core wiring structure with a conductive material, thereby forming a thin film wiring sub-unit. Thereafter, a plurality of such sub-units are fabricated simultaneously, tested and then stacked and aligned on a stiffener, such as multilayer ceramic substrate, before being laminated to form a three-dimensional wiring matrix.
Inventors
- 👤 John B. Dux
- 👤 Janet L. Poetzinger
- 👤 Roseanne M. Prestipino
- 👤 Kevin L. Siefering
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 17:59
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/46; H05K3/4611; H05K3/4614; H05K3/462; H05K3/40; H05K3/4038; H05K3/4053; H05K3/4069; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/60; H10W70/611; H10W70/62; H10W70/63; H10W70/635; H10W90/00; H10W90/401; H05K1/00; H05K1/02; H05K1/03; H05K1/05; H05K1/09; H05K1/092; H05K1/095; H05K2201/00; H05K2201/06; H05K2201/068; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/09509; H05K2201/09536; H05K2201/0959; H05K2201/096; H05K2203/00; H05K2203/06; H05K2203/063; H05K2203/066; H05K3/22; H05K3/28; H05K3/281; H05K3/42; H05K3/429; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49165
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
175 words
A process for the fabrication of a thin film wiring structure comprising the steps of: forming a core wiring structure comprising the steps of: a. providing a low expansion, metallic core material patterned with a plurality of holes; b. encapsulating the core material in a dielectric material; c. forming vias in said dielectric material; and d. metallizing said dielectric material in said vias and on the surface of said dielectric material; and forming at least one cover laminate comprising dielectric material and a a low expansion, metallic carrier; laminating said at least one cover laminate to said core wiring structure wherein the dielectric material of said cover laminate is in contact with said core wiring structure; optionally removing the low expansion metallic carrier from the at least one cover laminate; forming vias through the thickness of the cover laminate, said vias in alignment with the vias in said core wiring structure; and filling said vias in said cover laminate and said core wiring structure with a conductive material thereby forming a thin film wiring sub-unit.
Claim 2
Dependent Claim
175 words
A process for the fabrication of a thin film wiring structure comprising the steps of: forming a core wiring structure comprising the steps of: a. providing a low expansion, metallic core material patterned with a plurality of holes; b. encapsulating the core material in a dielectric material; c. forming vias in said dielectric material; and d. metallizing said dielectric material in said vias and on the surface of said dielectric material; and forming at least one cover laminate comprising dielectric material and a a low expansion, metallic carrier; laminating said at least one cover laminate to said core wiring structure wherein the dielectric material of said cover laminate is in contact with said core wiring structure; optionally removing the low expansion metallic carrier from the at least one cover laminate; forming vias through the thickness of the cover laminate, said vias in alignment with the vias in said core wiring structure; and filling said vias in said cover laminate and said core wiring structure with a conductive material thereby forming a thin film wiring sub-unit.
Claim 3
Dependent Claim
20 words
The process of claim 1 wherein the step of filling said vias comprises screening a conductive paste into said vias.
Claim 4
Dependent Claim
14 words
The process of claim 2 wherein said conductive paste comprises a metal-loaded thermoplastic material.
Claim 5
Dependent Claim
21 words
The process of claim 2 wherein said low expansion, metallic carrier acts as a mask for the screening of said vias.
Claim 6
Dependent Claim
23 words
The process of claim 2 further comprising the step of removing the low expansion, metallic carrier after the step of filling said vias.
Claim 7
Dependent Claim
23 words
The process of claim 1 wherein there are two cover laminates with one cover laminate on either side of said core wiring structure.
Claim 8
Dependent Claim
26 words
The process of claim 1 wherein the steps of forming at least one cover laminate includes laminating said dielectric material onto said low expansion, metallic carrier.
Claim 9
Dependent Claim
74 words
The process of claim 1 wherein a plurality of said thin film wiring sub-units are fabricated, and said process further comprises the steps of: removing the low expansion, metallic carrier from the at least one cover laminate of each wiring sub-unit; stacking and aligning the vias of said plurality of sub-units on a stiffener; and laminating said stacked and aligned sub-units to form a three-dimensional wiring matrix as a unitary structure with said stiffener.
Claim 10
Dependent Claim
26 words
The process of claim 1 further comprising a plurality of thin film wiring sub-units wherein each of said thin film wiring sub-units comprises a plane pair.
Claim 11
Dependent Claim
26 words
The process of claim 1 wherein said low expansion, metallic, patterned core material and said low expansion, metallic carrier have a similar thermal coefficient of expansion.
Claim 12
Dependent Claim
184 words
A process for the fabrication of a thin film wiring structure comprising the steps of: forming a core wiring structure comprising the steps of: a. providing a low expansion, metallic core material, patterned with a plurality of holes; b. encapsulating the core material in a dielectric material; c. forming vias in said dielectric material; and d. metallizing said dielectric material in said vias and on the surface of said dielectric material; forming at least one cover laminate comprising dielectric material and a low expansion, metallic carrier, said cover laminate having vias through at least a portion of its thickness; laminating said at least one cover laminate to said core wiring structure wherein the dielectric material of said cover laminate is in contact with said core wiring structure and wherein said vias in said cover laminate are in alignment with the vias in said core wiring structure; optionally removing the low expansion metallic carrier from the at least one cover laminate; and filling said vias in said cover laminate and said core wiring structure with a conductive material, thereby forming a thin film wiring sub-unit.
Claim 13
Dependent Claim
184 words
A process for the fabrication of a thin film wiring structure comprising the steps of: forming a core wiring structure comprising the steps of: a. providing a low expansion, metallic core material, patterned with a plurality of holes; b. encapsulating the core material in a dielectric material; c. forming vias in said dielectric material; and d. metallizing said dielectric material in said vias and on the surface of said dielectric material; forming at least one cover laminate comprising dielectric material and a low expansion, metallic carrier, said cover laminate having vias through at least a portion of its thickness; laminating said at least one cover laminate to said core wiring structure wherein the dielectric material of said cover laminate is in contact with said core wiring structure and wherein said vias in said cover laminate are in alignment with the vias in said core wiring structure; optionally removing the low expansion metallic carrier from the at least one cover laminate; and filling said vias in said cover laminate and said core wiring structure with a conductive material, thereby forming a thin film wiring sub-unit.
Claim 14
Dependent Claim
30 words
The process of claim 11 wherein the step of forming said cover laminate includes forming vias in said dielectric material prior to laminating said dielectric material and said metallic carrier.
Claim 15
Dependent Claim
20 words
The process of claim 11 wherein the step of filling said vias comprises screening a conductive paste into said vias.
Claim 16
Dependent Claim
14 words
The process of claim 13 wherein said conductive paste comprises a metal-loaded thermoplastic material.
Claim 17
Dependent Claim
21 words
The process of claim 13 wherein said low expansion, metallic carrier acts as a mask for the screening of said vias.
Claim 18
Dependent Claim
23 words
The process of claim 13 further comprising the step of removing the low expansion, metallic carrier after the step of filling said vias.
Claim 19
Dependent Claim
23 words
The process of claim 11 wherein there are two cover laminates with one cover laminate on either side of said core wiring structure.
Claim 20
Dependent Claim
26 words
The process of claim 11 wherein the step of forming at least one cover laminate includes laminating said dielectric material onto said low expansion, metallic carrier.
Claim 21
Dependent Claim
75 words
The process of claim 11 wherein a plurality of said thin film wiring sub-units are fabricated, and said process further comprises the steps of: removing the low expansion, metallic carrier from the at least one cover laminate of each cover wiring sub-unit; stacking and aligning the vias of said plurality of sub-units on a stiffener; and laminating said stacked and aligned sub-units to form a three-dimensional wiring matrix as a unitary structure with said stiffener.
Claim 22
Dependent Claim
26 words
The process of claim 11 further comprising a plurality of thin film wiring sub-units wherein each of said thin film wiring sub-units comprises a plane pair.
Claim 23
Dependent Claim
26 words
The process of claim 11 wherein said low expansion, metallic, patterned core material and said low expansion, metallic carrier have a similar thermal coefficient of expansion.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-05 | 1997-01-04 | 1997-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-05 | 2001-01-04 | 2001-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-05 | 2005-01-04 | 2005-07-06 | $7700.00 | Window Closed / Lapsed |