US5224202A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for the evaporation of liquids
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1991-09-19
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Granted: 1993-06-29
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Expires: 2011-09-19
Abstract
Abstract A heated evaporator housing is provided at its inlet with an ultrasonic atomizer for reducing monomer to small droplets and a permeable porous body completely occupying a cross section of the housing between the inlet and the outlet. A vacuum pump and a reaction chamber for coating substrates are provided downstream of the outlet.
Inventors
- 👤 Manfred Arnold
- 👤 Rainer Gegenwart
- 👤 Sonja Noll
- 👤 Jochen Ritter
- 👤 Helmut Stoll
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:37
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481; C23C16/4483; C23C16/4485; C23C16/4486
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
51 words
Apparatus for the evaporation of monomers comprising an evaporator housing having an inlet, an atomizer for supplying atomized monomer at said inlet, an outlet for discharging evaporated monomer from said housing, said outlet being opposite from said inlet, and a porous body in said housing between said inlet and said outlet.
Claim 2
Dependent Claim
51 words
Apparatus for the evaporation of monomers comprising an evaporator housing having an inlet, an atomizer for supplying atomized monomer at said inlet, an outlet for discharging evaporated monomer from said housing, said outlet being opposite from said inlet, and a porous body in said housing between said inlet and said outlet.
Claim 3
Dependent Claim
43 words
Apparatus as in claim 1 wherein said porous body completely occupies a cross section of said housing between said inlet and said outlet, said body being permeable so that said monomer passes from said inlet to said outlet only through said porous body.
Claim 4
Dependent Claim
12 words
Apparatus as in claim 1 wherein said atomizer is an ultrasonic atomizer.
Claim 5
Dependent Claim
13 words
Apparatus as in claim 1 further comprising heating means for heating said housing.
Claim 6
Dependent Claim
24 words
Apparatus as in claim 1 wherein said porous body consists of a sintered material having a pore width between 1 μm and 200 μm.
Claim 7
Dependent Claim
14 words
Apparatus as in claim 1 further comprising a vacuum pump connected to said outlet.
Claim 8
Dependent Claim
16 words
Apparatus as in claim 1 wherein said porous body has a convex surface facing said inlet.
Claim 9
Dependent Claim
11 words
Apparatus as in claim 7 wherein said convex surface is pyramidal.
Claim 10
Dependent Claim
11 words
Apparatus as in claim 7 wherein said convex surface is conical.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-28 | 1996-12-28 | 1997-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-28 | 2000-12-28 | 2001-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-28 | 2004-12-28 | 2005-06-29 | $7700.00 | Window Closed / Lapsed |