US5223713A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanner for scanning tunneling microscope
Assignee: Jeol Ltd
•
Filing: 1991-12-31
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Granted: 1993-06-29
•
Expires: 2011-12-31
Abstract
Abstract A three-dimensional scanner for moving the probe tip of a scanning tunneling microscope. The scanner has a table equipped with a three-dimensional coarse displacement mechanism. Two xy piezoelectric transducers are so mounted that they can expand in the xy plane perpendicular to the z-axis along which the probe tip extends. The xy transducers are mounted to the table at their rear ends such that they almost intersect each other at right angles at their front ends. A support member is mounted to the almost intersecting front ends of the xy piezoelectric transducers. A z piezoelectric transducer is attached to the support member. This z transducer produces shear deformations in the z-direction. Electrodes are attached to both faces of each of all these piezoelectric transducers. Appropriate voltages are applied to the electrodes to move the probe tip over quite short distances in three dimensions.
Inventors
- 👤 Kiyohiko Uozumi
- 👤 Keiichi Nakamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:19
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01B; G01B7/00; G01B7/16; G01B7/24; G01Q10/00; G01Q10/02; H; H02; H02N; H02N2/00; H02N2/02; H02N2/028; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/832; Y10S977/837; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/872; Y10S977/873
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
137 words
A scanner for moving the probe tip of a scanning tunneling microscope, comprising: a table; two xy piezoelectric transducers mounted so as to be capable of expanding within the xy plane perpendicular to the z-axis along which the probe tip extends, each xy transducer taking the form of a flat and rectangular plate or sheet perpendicular to the xy plane, the xy transducers being mounted to the table at their rear ends in such a way that the xy transducers almost intersect each other at right angles at their front ends; a support member mounted to the almost intersecting front ends of the xy piezoelectric transducers; and a z piezoelectric transducer to which the probe tip is mounted and which moves a quite short distance in the z-direction, the z transducer being mounted to the support member.
Claim 2
Dependent Claim
137 words
A scanner for moving the probe tip of a scanning tunneling microscope, comprising: a table; two xy piezoelectric transducers mounted so as to be capable of expanding within the xy plane perpendicular to the z-axis along which the probe tip extends, each xy transducer taking the form of a flat and rectangular plate or sheet perpendicular to the xy plane, the xy transducers being mounted to the table at their rear ends in such a way that the xy transducers almost intersect each other at right angles at their front ends; a support member mounted to the almost intersecting front ends of the xy piezoelectric transducers; and a z piezoelectric transducer to which the probe tip is mounted and which moves a quite short distance in the z-direction, the z transducer being mounted to the support member.
Claim 3
Dependent Claim
13 words
The scanner of claim 1, wherein said z piezoelectric transducer produces shear deformations.
Claim 4
Dependent Claim
145 words
A scanner for moving the probe tip of a scanning tunneling microscope, comprising: a table; two xy piezoelectric transducers mounted so as to be capable of expanding within the xy plane perpendicular to the z-axis along which the probe tip extends, each xy transducer taking the form of a flat and rectangular plate or sheet perpendicular to the xy plane, the xy transducers being mounted to the table at their rear ends in such a way that the xy transducers almost intersect each other at right angles at their front ends; a support member mounted to the almost intersecting front ends of the xy piezoelectric transducers; a support plate mounted to the support member; and a z piezoelectric transducer to which the probe tip is mounted and which moves a quite short distance in the z-direction, the z transducer being mounted to the support plate.
Claim 5
Dependent Claim
145 words
A scanner for moving the probe tip of a scanning tunneling microscope, comprising: a table; two xy piezoelectric transducers mounted so as to be capable of expanding within the xy plane perpendicular to the z-axis along which the probe tip extends, each xy transducer taking the form of a flat and rectangular plate or sheet perpendicular to the xy plane, the xy transducers being mounted to the table at their rear ends in such a way that the xy transducers almost intersect each other at right angles at their front ends; a support member mounted to the almost intersecting front ends of the xy piezoelectric transducers; a support plate mounted to the support member; and a z piezoelectric transducer to which the probe tip is mounted and which moves a quite short distance in the z-direction, the z transducer being mounted to the support plate.
Claim 6
Dependent Claim
152 words
A scanner for moving the probe tip which is positioned along a z-axis of a scanning tunneling microscope, comprising: a table; two xy piezoelectric transducers mounted so as to be capable of expanding within an xy plane perpendicular to said z-axis, each said xy transducer taking the form of a flat and rectangular plate which is perpendicular to said xy plane, each said xy transducer being mounted to said table at a rear end thereof such that said xy transducers almost intersect each other at right angles at their forward ends; a support member mounted to said almost intersecting front ends of said xy piezoelectric transducers; and an independent z piezoelectric transducer to which said probe tip is mounted and which moves a quite short distance in the z-direction independent of the movement of said two xy piezoelectric transducers, said z transducer being mounted to said support member, and producing shear deformation.
Claim 7
Dependent Claim
152 words
A scanner for moving the probe tip which is positioned along a z-axis of a scanning tunneling microscope, comprising: a table; two xy piezoelectric transducers mounted so as to be capable of expanding within an xy plane perpendicular to said z-axis, each said xy transducer taking the form of a flat and rectangular plate which is perpendicular to said xy plane, each said xy transducer being mounted to said table at a rear end thereof such that said xy transducers almost intersect each other at right angles at their forward ends; a support member mounted to said almost intersecting front ends of said xy piezoelectric transducers; and an independent z piezoelectric transducer to which said probe tip is mounted and which moves a quite short distance in the z-direction independent of the movement of said two xy piezoelectric transducers, said z transducer being mounted to said support member, and producing shear deformation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-28 | 1996-12-28 | 1997-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-28 | 2000-12-28 | 2001-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-28 | 2004-12-28 | 2005-06-29 | $7700.00 | Window Closed / Lapsed |