US5222114A
Expired / Lapsed
US
⏱️ 0.0 years remaining
X-ray analysis apparatus, especially computer tomography apparatus and x-ray target and collimator therefor
Assignee: Hitachi Ltd
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Filing: 1991-05-28
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Granted: 1993-06-22
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Expires: 2011-05-28
Abstract
Abstract An X-ray analysis apparatus has a charged particle beam generator, an X-ray generating target bombarded by the beam and a detector for X-rays from said target transmitted by a test piece. To improve the spatial resolution of the apparatus, the beam size is reduced at the target by locating the target outside a vacuum chamber of the beam generator by providing the target as a non-circular narrow track of X-ray generating material exposed at both surfaces of the target, and by providing the beam generator with a beam accelerator and means for reducing the beam diameter between the beam accelerator and the target.
Inventors
- 👤 Shoji Kamata
- 👤 Shigeru Izumi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:55
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/02; G01N23/04; G01N23/046; G21; G21K; G21K1/00; G21K1/02; G21K1/025; G01N2223/00; G01N2223/40; G01N2223/419; H; H01; H01J; H01J35/00; H01J35/02; H01J35/04; H01J35/08; H01J35/112; H01J35/116
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
145 words
An X-ray analysis apparatus comprising (a) a charged particle beam generator having a vacuum chamber and means in said vacuum chamber for generating a charged particle beam, (b) an X-ray generating target located outside said vacuum chamber, said target having a first surface which is bombarded by said charged particle beam and a second surface which is opposite said first surface, said target comprising at least one portion of target material exposed at both said first surface and said second surface and which emits X-rays when said first surface is bombarded by said charged particle beam, said at least one portion having a narrow width relative to a width of said target and being arranged in said target as a non-circular track, and (c) a detector for X-rays emitted by said target and transmitted through a test piece located between said target and said detector.
Claim 2
Dependent Claim
145 words
An X-ray analysis apparatus comprising (a) a charged particle beam generator having a vacuum chamber and means in said vacuum chamber for generating a charged particle beam, (b) an X-ray generating target located outside said vacuum chamber, said target having a first surface which is bombarded by said charged particle beam and a second surface which is opposite said first surface, said target comprising at least one portion of target material exposed at both said first surface and said second surface and which emits X-rays when said first surface is bombarded by said charged particle beam, said at least one portion having a narrow width relative to a width of said target and being arranged in said target as a non-circular track, and (c) a detector for X-rays emitted by said target and transmitted through a test piece located between said target and said detector.
Claim 3
Dependent Claim
19 words
An X-ray analysis apparatus according to claim 1 wherein said charged particle beam generator is an electron beam generator.
Claim 4
Dependent Claim
29 words
An X-ray analysis apparatus according to claim 2 wherein said electron beam generator is capable of generating an electron beam having an average energy of at least 1 MeV.
Claim 5
Dependent Claim
75 words
An X-ray analysis apparatus according to claim 1 wherein said detector produces signals in accordance with the transmitted X-rays detected, and the apparatus further comprises (d) a collimator for said transmitted X-rays located in front of said detector, (e) scanning means for rotating a said test piece relatively to said target and said detector, and (f) data processing means for processing data in signals from said detector in accordance with the principle of computer tomography.
Claim 6
Dependent Claim
16 words
An X-ray analysis apparatus according to claim 1 wherein said detector is an X-ray sensitive film.
Claim 7
Dependent Claim
26 words
An X-ray analysis apparatus according to claim 1 wherein said vacuum chamber has a vacuum-retaining window through which said charged particle beam exits from said chamber.
Claim 8
Dependent Claim
15 words
An X-ray analysis apparatus according to claim 1 further comprising means for cooling said target.
Claim 9
Dependent Claim
22 words
An X-ray analysis apparatus according to claim 7 wherein said cooling means is adapted to effect cooling of said target by air.
Claim 10
Dependent Claim
24 words
An X-ray analysis apparatus according to claim 7 wherein said cooling means is adapted to effect cooling of said target by means of liquid.
Claim 11
Dependent Claim
43 words
An X-ray analysis apparatus according to claim 1 further comprising means for displacing said target relative to the said vacuum chamber, thereby to present to said charged particle beam a fresh portion of said target not previously bombarded by said charged particle beam.
Claim 12
Dependent Claim
36 words
An X-ray analysis apparatus according to claim 10 wherein said target is displaceable relative to said charged particle beam so that analysis operations can continue even when the charged particle beam causes perforation of said target.
Claim 13
Dependent Claim
46 words
An X-ray analysis apparatus according to claim 1 wherein said charged particle beam generator is adapted to generate an electron beam having an average energy of at least 1 MeV and wherein an X-ray generating region of said target has a maximum width of 0.2 mm.
Claim 14
Dependent Claim
33 words
An X-ray analysis apparatus according to claim 1 wherein said target has an X-ray generating target material having a width less than the diameter of the charged particle beam which bombards the target.
Claim 15
Dependent Claim
85 words
A target for X-ray generating apparatus adapted to be bombarded by an energy beam and having a first side at which said energy beam is incoming and opposite said first side a second side at which X-rays are emitted when said first side is bombarded by said incoming energy beam, said target including at least one wire supported in the target and at least partly consisting of X-ray generating material and being exposed at both said first side and said second side of said target.
Claim 16
Dependent Claim
85 words
A target for X-ray generating apparatus adapted to be bombarded by an energy beam and having a first side at which said energy beam is incoming and opposite said first side a second side at which X-rays are emitted when said first side is bombarded by said incoming energy beam, said target including at least one wire supported in the target and at least partly consisting of X-ray generating material and being exposed at both said first side and said second side of said target.
Claim 17
Dependent Claim
33 words
A target according to claim 14 wherein said wire has two opposite ends supported in the target and, intermediate said opposite ends thereof, said wire carries a body of said X-ray generating material.
Claim 18
Dependent Claim
142 words
An X-ray analysis apparatus comprising (a) a charged particle beam generator for generating a charged particle beam, (b) an X-ray generating target having a first surface which is bombarded by said charged particle beam and a second surface opposite said first surface, said target comprising at least one portion of target material exposed at both said first surface and said second surface and adopted to emit X-rays at said second surface when said portion exposed at said first surface is bombarded by said beam, said portion as seen looking onto said first surface, having a narrow width relative to the width of sad target and being arranged in said target as a non-circular track, and (c) a detector for X-rays emitted by said target from said second surface thereof and transmitted through a test piece located between said target and said detector.
Claim 19
Dependent Claim
142 words
An X-ray analysis apparatus comprising (a) a charged particle beam generator for generating a charged particle beam, (b) an X-ray generating target having a first surface which is bombarded by said charged particle beam and a second surface opposite said first surface, said target comprising at least one portion of target material exposed at both said first surface and said second surface and adopted to emit X-rays at said second surface when said portion exposed at said first surface is bombarded by said beam, said portion as seen looking onto said first surface, having a narrow width relative to the width of sad target and being arranged in said target as a non-circular track, and (c) a detector for X-rays emitted by said target from said second surface thereof and transmitted through a test piece located between said target and said detector.
Claim 20
Dependent Claim
40 words
An X-ray analysis apparatus according to claim 16 wherein said target comprises a matrix material in which said track is embedded and said track has a shape selected from spiral and continuous rectangular, as seen looking onto said first surface.
Claim 21
Dependent Claim
23 words
An X-ray analysis apparatus according to claim 16 wherein said target material is provided by a plurality of wires supported in said target.
Claim 22
Dependent Claim
32 words
An X-ray analysis apparatus according to claim 16 having means for displacing said target relative to said charged particle beam, thereby to expose a fresh portion of said track to said beam.
Claim 23
Dependent Claim
76 words
An X-ray analysis apparatus according to claim 16 wherein said detector produces signals in accordance with the transmitted X-rays detected and the apparatus further comprises (d) a collimator for said transmitted X-rays located in front of said detector, (e) scanning means for rotating a said test piece relatively to said target and said detector, and (f) data processing means for processing data in said signals from said detector in accordance with the principle of computer tomography.
Claim 24
Dependent Claim
15 words
An X-ray analysis apparatus according to claim 16 wherein said detector is an X-ray-sensitive film.
Claim 25
Dependent Claim
78 words
A target for X-ray generating apparatus adapted to bombarded by an energy beam and having a first side at which said energy beam is incoming and opposite said first side a second side at which X-rays are emitted, said target having an element made of X-ray generating material exposed at both said first side and said second side of the target, said element having a narrow elongate shape and being arranged in said target as a non-circular track.
Claim 26
Dependent Claim
78 words
A target for X-ray generating apparatus adapted to bombarded by an energy beam and having a first side at which said energy beam is incoming and opposite said first side a second side at which X-rays are emitted, said target having an element made of X-ray generating material exposed at both said first side and said second side of the target, said element having a narrow elongate shape and being arranged in said target as a non-circular track.
Claim 27
Dependent Claim
27 words
A target according to claim 22 wherein said element has a shape selected from spiral shape and continuous rectangular shape, as seen looking onto said first surface.
Claim 28
Dependent Claim
26 words
A target according to claim 22 wherein said element has a width of less than 1 mm in the direction transverse to its direction of elongation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-21 | 1996-12-21 | 1997-06-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-21 | 2000-12-21 | 2001-06-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-21 | 2004-12-21 | 2005-06-22 | $7700.00 | Window Closed / Lapsed |