US5221427A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma generating device and method of plasma processing
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 1991-12-30
•
Granted: 1993-06-22
•
Expires: 2011-12-30
Abstract
Abstract A plasma generating device and a method for etching a minute region of a substrate under atmospheric pressure are disclosed. A gas containing helium as the main ingredient is glow discharged under atmospheric pressure, a halide is added to the discharge so as to activate the halogen element, and a solid material (substrate) such as silicon is chemically etched by using the radicals. At that time, a magnetic field acts on the discharge so as to draw out electrons and ions to the surface of the substrate, thereby increasing the radical density in the vicinity of the surface of the substrate and the etching rate.
Inventors
- 👤 Hideomi Koinuma
- 👤 Shunpei Yamazaki
- 👤 Shigenori Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:58
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; B; B29; B29C; B29C59/00; B29C59/14; H01J37/32082; H01J37/32431; H01J37/32532; H01J37/3266; H01J37/32798; H01J37/32816; H01J37/32825; H10; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; B29K; B29K2079/00; B29K2079/08; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
136 words
A method of plasma processing by the use of an apparatus comprising a pair of cylindrical electrodes and a cylindrical insulator arranged in a coaxial relation with said insulator between said electrodes wherein a plasma generating space is formed between said electrodes, said method comprising the steps of: introducing a reactive gas and a halogen containing gas into said space from one end of said electrodes, said reactive gas comprising helium; placing a substrate on the other end of said electrodes with a gap therebetween; generating plasma in said space by ionizing said reactive gas by applying an alternating electric field between said electrodes; and establishing a magnetic field in said space in a direction parallel to said electrodes; and etching said substrate by said halogen containing gas by virtue of an energy of said plasma.
Claim 2
Independent Claim
136 words
A method of plasma processing by the use of an apparatus comprising a pair of cylindrical electrodes and a cylindrical insulator arranged in a coaxial relation with said insulator between said electrodes wherein a plasma generating space is formed between said electrodes, said method comprising the steps of: introducing a reactive gas and a halogen containing gas into said space from one end of said electrodes, said reactive gas comprising helium; placing a substrate on the other end of said electrodes with a gap therebetween; generating plasma in said space by ionizing said reactive gas by applying an alternating electric field between said electrodes; and establishing a magnetic field in said space in a direction parallel to said electrodes; and etching said substrate by said halogen containing gas by virtue of an energy of said plasma.
Claim 3
Dependent Claim
15 words
The method of plasma processing as claimed in claim 1 wherein said substrate comprises silicon.
Claim 4
Dependent Claim
27 words
The method of plasma processing as claimed in claim 1 wherein said halogen containing gas comprises an element selected from the group consisting of fluorine and chlorine.
Claim 5
Dependent Claim
27 words
The method of plasma processing as claimed in claim 3 wherein said halogen containing gas is introduced at a concentration less than 4% during said introducing step.
Claim 6
Dependent Claim
22 words
The method of plasma processing as claimed in claim 1 wherein glow discharge occurs through said space during said plasma generating step.
Claim 7
Dependent Claim
22 words
The method of plasma processing as claimed in claim 1 wherein corona discharge occurs through said space during said plasma generating step.
Claim 8
Dependent Claim
24 words
The method of plasma processing as claimed in claim 1 wherein the proportion of helium in said reactive gas is no lower than 70%.
Claim 9
Dependent Claim
21 words
The method of plasma processing as claimed in claim 7 wherein said reactive gas further comprises Ne, Ar, Kr or Xe.
Claim 10
Dependent Claim
25 words
The method of plasma processing as claimed in claim 1 wherein said halogen containing gas is CF 4 , CCl 4 or NF 3 .
Claim 11
Dependent Claim
19 words
The method of plasma processing as claimed in claim 1 wherein said space is maintained substantially at atmospheric pressure.
Claim 12
Dependent Claim
31 words
The method of plasma processing as claimed in claim 1 wherein said magnetic field is established by a permanent magnet provided on an opposite side of said substrate to said space.
Claim 13
Dependent Claim
34 words
The method of plasma processing as claimed in claim 11 wherein said magnet has an S pole on the side thereof adjacent to said substrate and an N pole on the opposite side thereof.
References Cited (Backward Citations)
US4341616A
Cited
US4551221A
Cited
JPS5848422A
Cited
JPS5994421A
Cited
US4979467A
Cited
US5048457A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-21 | 1996-12-21 | 1997-06-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-21 | 2000-12-21 | 2001-06-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-21 | 2004-12-21 | 2005-06-22 | $7700.00 | Window Closed / Lapsed |