Arrangement for testing semiconductor wafers or the like

Claim 1

An apparatus for testing semiconductor wafers or hybrid circuits, comprising: a prober table for receiving the semiconductor wafers or hybrid circuits to be tested; a holding means for receiving holders for probes or test needles; a container having an open upper portion and having said prober table arranged therein; a plate covering said container open upper portion, said plate having an opening for passage of probes or test needles into said container; and discharge elements including tubes of a porus material located within said container, said discharge elements connected by a connection to a source for supplying air or gas to said container through said tubes, said tubes positioned to provide a laminar flow of air or gas from said tubes in the direction of said plate opening and said laminar flow emerging uniformly from said plate opening.

Claim 2

An apparatus for testing semiconductor wafers or hybrid circuits, comprising: a prober table for receiving the semiconductor wafers or hybrid circuits to be tested; a holding means for receiving holders for probes or test needles; a container having an open upper portion and having said prober table arranged therein; a plate covering said container open upper portion, said plate having an opening for passage of probes or test needles into said container; and discharge elements including tubes of a porus material located within said container, said discharge elements connected by a connection to a source for supplying air or gas to said container through said tubes, said tubes positioned to provide a laminar flow of air or gas from said tubes in the direction of said plate opening and said laminar flow emerging uniformly from said plate opening.

Claim 9

An apparatus for testing products such as semiconductor wafers or hybrid circuits, comprising: a prober table for receiving said products to be tested, said table including elements for heating and/or cooling said products to be tested; a container including an open upper portion, said container having said prober table arranged therein; a holding means for receiving holders for probes; a plate covering said container open upper portion, said plate having an opening for passage of probes therethrough; and discharge elements within said container which are connected by a connection to a source for supplying air or gas to said container through said discharge elements, said discharge elements including tubes of a porous material, said tubes positioned to provide a laminar flow of air or gas in the direction of said plate opening, said laminar flow of gas or air emerging uniformly from said plate opening to prevent formation of ice crystals and penetration of dust particles within said container.

Claim 10

An apparatus for testing products such as semiconductor wafers or hybrid circuits, comprising: a prober table for receiving said products to be tested, said table including elements for heating and/or cooling said products to be tested; a container including an open upper portion, said container having said prober table arranged therein; a holding means for receiving holders for probes; a plate covering said container open upper portion, said plate having an opening for passage of probes therethrough; and discharge elements within said container which are connected by a connection to a source for supplying air or gas to said container through said discharge elements, said discharge elements including tubes of a porous material, said tubes positioned to provide a laminar flow of air or gas in the direction of said plate opening, said laminar flow of gas or air emerging uniformly from said plate opening to prevent formation of ice crystals and penetration of dust particles within said container.

Claim 17

An apparatus for testing products such as semiconductor wafers or hybrid circuits, comprising: a prober table for receiving said products to be tested, said table being equipped with elements for heating and/or cooling said products to be tested; a holding means for receiving holders for probes; a container having an open upper portion and containing said prober table, said container defined by a bottom wall and by side walls; a plate covering said open upper portion and having an opening for passage of probes into said container; and discharge elements within said container positioned laterally with respect to said prober table, said discharge elements connected via a connection to a source for supplying air or gas to said container through said discharge tubes, said discharge elements including tubes of a porous material, said tubes positioned to provide a laminar flow of air or gas in the direction of said plate opening, said laminar flow of gas or air emerging uniformly from said plate opening to prevent formation of ice crystals and penetration of dust particles within said container.

Claim 18

An apparatus for testing products such as semiconductor wafers or hybrid circuits, comprising: a prober table for receiving said products to be tested, said table being equipped with elements for heating and/or cooling said products to be tested; a holding means for receiving holders for probes; a container having an open upper portion and containing said prober table, said container defined by a bottom wall and by side walls; a plate covering said open upper portion and having an opening for passage of probes into said container; and discharge elements within said container positioned laterally with respect to said prober table, said discharge elements connected via a connection to a source for supplying air or gas to said container through said discharge tubes, said discharge elements including tubes of a porous material, said tubes positioned to provide a laminar flow of air or gas in the direction of said plate opening, said laminar flow of gas or air emerging uniformly from said plate opening to prevent formation of ice crystals and penetration of dust particles within said container.