US5219613A
Expired / Lapsed
US
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Process for producing storage-stable surfaces of polished silicon wafers
Assignee: Siltronic AG
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Filing: 1992-04-03
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Granted: 1993-06-15
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Expires: 2012-04-03
Abstract
Abstract Silicon wafers are first subjected to an oxidative treatment and subsequey to exposure to organosilicon compounds which contain at least one radical in the molecule which is hydrolyzably bound to the silicon and at least one radical in the molecule having hydrophilic properties. Depending on the compound selected, more or less strongly hydrophilic or hydrophobic properties of the silicon surface can consequently be established under mild conditions. The wafers treated in such a manner have a high storage stability and retain their surface nature even under difficult climatic circumstances. The surface nature present after the oxidative treatment can then be restored particularly easily by hydrolysis.
Inventors
- 👤 Laszlo Fabry
- 👤 Manfred Grundner
- 👤 Peter John
- 👤 Wolfgang Feichtner
- 👤 Dieter Graefg
- 👤 Rosemarie Winklharrer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:19
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/668; H10P14/6681; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P90/00; H10P90/12; Y; Y10; Y10S; Y10S438/00; Y10S438/974
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
123 words
A process for producing storage-stable surfaces of polished silicon wafers consisting essentially of: oxidative treatment of the silicon wafers; subsequently exposing the silicon wafers to an active organosilicon compound; selecting as said active organosilicon compound one which contains at least one radical in the compound which is hydrolyzably bound to silicon and at least one radical in the compound having hydrophilic properties; said active organosilicon compound containing a maximum of one carbon atom in the molecule directly bound to silicon per silicon atom; selecting as said hydrolyzably bound radical a radical selected from the group consisting of fluoro, chloro, bromo, hydroxy and alkoxy; and selecting as said radical having hydrophilic properties a radical selected from the group consisting of hydroxy, alkoxy and alkylcarboxy.
Claim 2
Dependent Claim
123 words
A process for producing storage-stable surfaces of polished silicon wafers consisting essentially of: oxidative treatment of the silicon wafers; subsequently exposing the silicon wafers to an active organosilicon compound; selecting as said active organosilicon compound one which contains at least one radical in the compound which is hydrolyzably bound to silicon and at least one radical in the compound having hydrophilic properties; said active organosilicon compound containing a maximum of one carbon atom in the molecule directly bound to silicon per silicon atom; selecting as said hydrolyzably bound radical a radical selected from the group consisting of fluoro, chloro, bromo, hydroxy and alkoxy; and selecting as said radical having hydrophilic properties a radical selected from the group consisting of hydroxy, alkoxy and alkylcarboxy.
Claim 3
Dependent Claim
19 words
The process as claimed in claim 1, wherein the selected silicon wafers have at least one polished wafer surface.
Claim 4
Dependent Claim
20 words
The process as claimed in claim 1, wherein exposing to the organosilicon compound is carried out in the gas phase.
Claim 5
Dependent Claim
28 words
The process as claimed in claim 1, wherein said active organosilicon compound has a vapor pressure at 25° C. and 1000 hPa corresponding to at least 0.5 hPa.
Claim 6
Dependent Claim
36 words
The process as claimed in claim 1, wherein said oxidative treatment of the silicon wafers comprises contacting the wafers with an aqueous alkaline solution containing hydrogen peroxide, or with an aqueous acidic solution containing hydrogen peroxide.
Claim 7
Dependent Claim
24 words
The process as claimed in claim 1, wherein said oxidative treatment is carried on in an alkaline aqueous solution or an acidic aqueous solution.
Claim 8
Dependent Claim
136 words
A process for producing a storage-stable hydrophilic surface of a polished silicon wafer consisting essentially of: oxidative treatment of the silicon wafer; subsequently exposing the silicon wafer to an active organosilicon compound; selecting as said active organosilicon compound one which contains at least one radical in the compound which is hydrolyzably bound to silicon and at least one radical in the compound having hydrophilic properties,; said active organosilicon compound containing a maximum of one carbon atom in the molecule directly bound to silicon per silicon atom; selecting as said hydrolyzably bound radical a radical selected from the group consisting of fluoro, chloro, bromo, hydroxy and alkoxy; selecting as said radical having hydrophilic properties a radical selected from the group consisting of hydroxy, alkoxy and alkylcarboxy; and producing a polished silicon wafer having a storage-stable hydrophilic surface.
Claim 9
Dependent Claim
136 words
A process for producing a storage-stable hydrophilic surface of a polished silicon wafer consisting essentially of: oxidative treatment of the silicon wafer; subsequently exposing the silicon wafer to an active organosilicon compound; selecting as said active organosilicon compound one which contains at least one radical in the compound which is hydrolyzably bound to silicon and at least one radical in the compound having hydrophilic properties,; said active organosilicon compound containing a maximum of one carbon atom in the molecule directly bound to silicon per silicon atom; selecting as said hydrolyzably bound radical a radical selected from the group consisting of fluoro, chloro, bromo, hydroxy and alkoxy; selecting as said radical having hydrophilic properties a radical selected from the group consisting of hydroxy, alkoxy and alkylcarboxy; and producing a polished silicon wafer having a storage-stable hydrophilic surface.
Claim 10
Dependent Claim
23 words
The process of claim 7, wherein the active organosilicon compound is selected from the group consisting of tetramethoxysilane, dimethoxymethychlorosilane, and the mixtures thereof.
Claim 11
Dependent Claim
20 words
The process as claimed in claim 1, wherein said alkoxy is selected from the group consisting of methoxy and ethoxy.
Claim 12
Dependent Claim
20 words
The process as claimed in claim 7, wherein said alkoxy is selected from the group consisting of methoxy and ethoxy.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-14 | 1996-12-14 | 1997-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-14 | 2000-12-14 | 2001-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-14 | 2004-12-14 | 2005-06-15 | $7700.00 | Window Closed / Lapsed |