US4724171A
Expired / Lapsed
US
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Process for protecting polished silicon surfaces
Assignee: Siltronic AG
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Filing: 1986-10-24
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Granted: 1988-02-09
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Expires: 2006-10-24
Abstract
Abstract In a process for protecting polished silicon surfaces, after an oxidative eaning is carried out, the surface is coated with a protective layer by the action of a reagent especially hexamethyldisilazane which permits trialkylsilylation. The layer prevents aging of the oxide layer even over several months storage. Before subsequent processing steps, the protective layer can easily be removed again by thermal oxidation, without forming interfering by-products.
Inventors
- 👤 Ingolf Lampert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:55
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/12; C; C23; C23C; C23C16/00; C23C16/02; C23C16/0227; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
46 words
A process for protecting a polished silicon surface, comprising the steps of: treating the silicon surface with an oxidative cleaning solution, subsequently washing and drying said treated silicon surface; and subjecting the washed and dried silicon surface to the action of a reagent suitable for trialkylsilylation.
Claim 2
Dependent Claim
46 words
A process for protecting a polished silicon surface, comprising the steps of: treating the silicon surface with an oxidative cleaning solution, subsequently washing and drying said treated silicon surface; and subjecting the washed and dried silicon surface to the action of a reagent suitable for trialkylsilylation.
Claim 3
Dependent Claim
11 words
The process of claim 1, wherein the reagent comprises a hexaalkyldisilazane.
Claim 4
Dependent Claim
10 words
The process of claim 1, wherein the reagent comprises hexamethyldisilazane.
Claim 5
Dependent Claim
14 words
The process of claim 1, wherein the reagent is employed in the gaseous state.
Claim 6
Dependent Claim
31 words
The process of claim 3, further comprising the step of admixing the reagent with a carrier gas in a concentration of up to approximately 15 mg of reagent/liter of carrier gas.
Claim 7
Dependent Claim
24 words
The process of claim 1, wherein the silicon surface is subjected to the reagent for a period of approximately from 0.5 to 5 minutes.
Claim 8
Dependent Claim
27 words
The process of claim 1, further comprising the step of removing the layer produced on the silicon surface by the action of the reagent by thermal oxidation.
Claim 9
Dependent Claim
27 words
The process of claim 5, wherein the carrier gas is a member selected from the group consisting of argon, nitrogen, freon, air, oxygen, and a combination thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-08 | 1991-08-10 | 1992-02-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-08 | 1995-08-10 | 1996-02-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-08 | 1999-08-10 | 2000-02-09 | $7700.00 | Window Closed / Lapsed |