US5218896A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Driving mechanism with gas bearing
Assignee: Canon Inc
•
Filing: 1992-05-26
•
Granted: 1993-06-15
•
Expires: 2012-05-26
Abstract
Abstract A driving mechanism usable in an electron beam exposure apparatus, X-ray exposure apparatus, ion beam exposure apparatus, evaporation apparatus, chemical vapor deposition apparatus or otherwise, for rectilinearly moving a wafer carrying stage in a vacuum chamber is disclosed. The mechanism includes a guide shaft, a partition flange fixed to the guide shaft, a pair of bearing assemblies slidably mounted to the guide shaft and disposed on the opposite sides of the flange, a coupling barrel for coupling the paired bearing assemblies and covering the guide shaft portion between the bearing assemblies, and a fluid supplying system for supplying fluids to the opposite sides of the partition flange. With this structure, the stage can be moved rectilinearly by controlling the fluid pressures on the opposite sides of the flange, while retaining high vacuum in the vacuum chamber.
Inventors
- 👤 Motomu Furukawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:29
CPC Classifications
F; F16; F16C; F16C32/00; F16C32/06; F01; F01B; F01B31/00; F01B31/10; F16C29/00; F16C29/02; F16C29/025; F16C32/0603; F16C32/0614; F16C32/0618; F16C33/00; F16C33/72; F16C33/74; F16C33/741; F16C33/748; F16C2300/00; F16C2300/40; F16C2300/62; Y; Y10; Y10S; Y10S92/00; Y10S92/02
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
187 words
A driving mechanism, comprising: a rod-like member having a flange; a cylindrical member for accommodating therein said rod-like member, said cylindrical member defining an interior space divided by said flange into two substantially independent spaces, wherein a clearance is defined between said cylindrical member and said flange; a gas bearing for discharging air and supporting without contact said cylindrical member and said rod-like member relative to each other; a bearing housing connected to said cylindrical member and accommodating therein said gas bearing, said bearing housing having gas reservoirs defined at opposite ends of said gas bearing and in communication with the outside of said bearing housing through passageways, said bearing housing further including a plurality of interior partition walls provided at an opposite side of said gas bearing from said cylindrical member and having a clearance between said rod-like member, wherein adjacent partition walls define an interspace therebetween into which a vacuum is applied; and driving means for moving one of said cylindrical member and said rod-like member relative to the other, said driving means supplying a driving gas to the interior space of said cylindrical member.
Claim 2
Dependent Claim
187 words
A driving mechanism, comprising: a rod-like member having a flange; a cylindrical member for accommodating therein said rod-like member, said cylindrical member defining an interior space divided by said flange into two substantially independent spaces, wherein a clearance is defined between said cylindrical member and said flange; a gas bearing for discharging air and supporting without contact said cylindrical member and said rod-like member relative to each other; a bearing housing connected to said cylindrical member and accommodating therein said gas bearing, said bearing housing having gas reservoirs defined at opposite ends of said gas bearing and in communication with the outside of said bearing housing through passageways, said bearing housing further including a plurality of interior partition walls provided at an opposite side of said gas bearing from said cylindrical member and having a clearance between said rod-like member, wherein adjacent partition walls define an interspace therebetween into which a vacuum is applied; and driving means for moving one of said cylindrical member and said rod-like member relative to the other, said driving means supplying a driving gas to the interior space of said cylindrical member.
Claim 3
Dependent Claim
41 words
A mechanism according to claim 1, wherein said driving means includes a pressure gauge for measuring pressure in the interior space of said cylindrical member and a servo-controlled valve for controlling the supply of the driving gas into said cylindrical member.
Claim 4
Dependent Claim
22 words
A mechanism according to claim 1, wherein said driving means supplies the driving gas through a passageway defined in said rod-like member.
Claim 5
Dependent Claim
30 words
A mechanism according to claim 1, wherein said mechanism includes a pair of bearing housings, with each said bearing housing being disposed at an opposite end of said cylindrical member.
Claim 6
Dependent Claim
41 words
A mechanism according to claim 4, wherein said driving means includes a pressure gauge for measuring pressure in the interior space of said cylindrical member and a servo-controlled valve for controlling the supply of the driving gas into said cylindrical member.
Claim 7
Dependent Claim
22 words
A mechanism according to claim 4, wherein said driving means supplies the driving gas through a passageway defined in said rod-like member.
References Cited (Backward Citations)
US2987886A
Cited
US3076523A
Cited
US3168013A
Cited
US3777621A
Cited
US3663071A
Cited
US3744858A
Cited
US4026193A
Cited
US4020744A
Cited
US4164264A
Cited
US4245844A
Cited
JPS56134622A
Cited
US4388981A
Cited
US4699043A
Cited
US4813339A
Cited
US4718329A
Cited
US4644848A
Cited
US4749283A
Cited
US4726689A
Cited
US4872360A
Cited
US4889039A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-14 | 1996-12-14 | 1997-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-14 | 2000-12-14 | 2001-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-14 | 2004-12-14 | 2005-06-15 | $7700.00 | Window Closed / Lapsed |