US5218292A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for inspecting internal circuit of semiconductor device
Assignee: Sigma Tech Co Ltd
•
Filing: 1991-12-09
•
Granted: 1993-06-08
•
Expires: 2011-12-09
Abstract
Abstract An apparatus for inspecting an internal circuit of a semiconductor device is provided, wherein an inspection table having an inspection equipment such as a microscope, a positioner or the like mounted thereon is constructed into a vibration-proof structure. On a frame surrounding a tester is horizontally supported an inspection table through air spring structures arranged on four corners of the frame, so that vibration or shock produced from a floor or the tester may be effectively absorbed by the air spring structures, to thereby be prevented from adversely affecting a semiconductor device to be inspected. Also, the semiconductor device is set on a socket of a socket-equipped board arranged above the tester in a manner to be close proximity to the tester, so that a substantially true signal may be obtained.
Inventors
- 👤 Kaoru Goto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 15:06
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
108 words
An apparatus for inspecting an internal circuit of a semiconductor device comprising: a tester; a frame for surrounding said tester; a plurality of air spring structures arranged on said frame and connected to one another through an air piping, said air spring structures being arranged on corners of said frame, respectively; an inspection table horizontally supported on said air spring structures and mounted thereon with an inspection equipment; an interface board horizontally arranged above said tester while being kept electrically contacted with said tester; and a socket-equipped board arranged above said interface board while being kept electrically contacted with said interface board and mounted on said inspection table.
Claim 2
Independent Claim
108 words
An apparatus for inspecting an internal circuit of a semiconductor device comprising: a tester; a frame for surrounding said tester; a plurality of air spring structures arranged on said frame and connected to one another through an air piping, said air spring structures being arranged on corners of said frame, respectively; an inspection table horizontally supported on said air spring structures and mounted thereon with an inspection equipment; an interface board horizontally arranged above said tester while being kept electrically contacted with said tester; and a socket-equipped board arranged above said interface board while being kept electrically contacted with said interface board and mounted on said inspection table.
Claim 3
Dependent Claim
22 words
An apparatus as defined in claim 1, wherein said air spring structures are arranged on said frame in a positionally equal manner.
Claim 4
Independent Claim
107 words
An apparatus for inspecting an internal circuit of a semiconductor device comprising; a tester; a frame for surrounding said tester; a plurality of air spring structures arranged on said frame and connected to one another through an air piping, said inspection table being formed in a substantially U-shape in plan; an inspection table horizontally supported on said air spring structures and mounted thereon with an inspection equipment; an interface board horizontally arranged above said tester while being kept electrically contacted with said tester; and a socket-equipped board arranged above said interface board while being kept electrically contacted with said interface board and mounted on said inspection table.
Claim 5
Independent Claim
107 words
An apparatus for inspecting an internal circuit of a semiconductor device comprising; a tester; a frame for surrounding said tester; a plurality of air spring structures arranged on said frame and connected to one another through an air piping, said inspection table being formed in a substantially U-shape in plan; an inspection table horizontally supported on said air spring structures and mounted thereon with an inspection equipment; an interface board horizontally arranged above said tester while being kept electrically contacted with said tester; and a socket-equipped board arranged above said interface board while being kept electrically contacted with said interface board and mounted on said inspection table.
Claim 6
Dependent Claim
24 words
An apparatus as defined in claim 3, wherein said tester includes a head; said interface board being supported above said head of said tester.
Claim 7
Dependent Claim
18 words
An apparatus as defined in claim 3, wherein said socket-equipped board is detachably mounted on said inspection table.
Claim 8
Independent Claim
109 words
An apparatus for inspecting an internal circuit of a semiconductor device comprising; a tester; a frame for surrounding said tester; a plurality of air spring structures arranged on said frame and connected to one another through an air piping; at least one automatic equilibrium position controlling unit arranged at said air piping; an inspection table horizontally supported on said air spring structures and mounted thereon with an inspection equipment; an interface board horizontally arranged above said tester while being kept electrically contacted with said tester; and a socket-equipped board arranged above said interface board while being kept electrically contacted with said interface board and mounted on said inspection table.
Claim 9
Independent Claim
109 words
An apparatus for inspecting an internal circuit of a semiconductor device comprising; a tester; a frame for surrounding said tester; a plurality of air spring structures arranged on said frame and connected to one another through an air piping; at least one automatic equilibrium position controlling unit arranged at said air piping; an inspection table horizontally supported on said air spring structures and mounted thereon with an inspection equipment; an interface board horizontally arranged above said tester while being kept electrically contacted with said tester; and a socket-equipped board arranged above said interface board while being kept electrically contacted with said interface board and mounted on said inspection table.
Claim 10
Dependent Claim
22 words
An apparatus as defined in claim 6, wherein said interface board and socket-equipped board are electrically contacted to each other through leads.
Claim 11
Dependent Claim
17 words
An apparatus as defined in claim 7, wherein said leads each are formed into a substantially S-shape.
Claim 12
Dependent Claim
22 words
An apparatus as defined in claim 7, further comprising an additional interface board arranged so as to support said socket-equipped board thereon.
References Cited (Backward Citations)
US3537718A
Cited
US3970934A
Cited
US4616178A
Cited
US4694245A
Cited
JPS61142477A
Cited
GB2183938A
Cited
US4667155A
Cited
US4746861A
Cited
US4841231A
Cited
US4834659A
Cited
US4975639A
Cited
US4935695A
Cited
WO1990006518A1
Cited
JPH03260143A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-07 | 1996-12-07 | 1997-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-07 | 2000-12-07 | 2001-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-07 | 2004-12-07 | 2005-06-08 | $7700.00 | Window Closed / Lapsed |