Selective chemical vapor deposition of aluminum, aluminum CVD materials and process for preparing the same

Abstract

Abstract This invention provides a process for forming with high selectivity an Al film having good electrical conductivity at the uncoated portions of a substrate coated with a masking material by means of chamical vapor deposition, using an Al selective deposition material having good electrical conductivity without subjecting it preliminarily to cracking, characterized in that the process employs a molecular compound of trimethyl aluminum and dimethyl aluminum hydride as a starting material gas. This invention also provides an Al selective CVD material characterized in that it is an organic Al compound represented by the following formula: (CH.sub.3).sub.3 Al--(CH.sub.3).sub.2 AlH obtained through intermolecular binding between trimethyl aluminum and dimethyl aluminum hydride. This invention further provides a process for forming the Al selective CVD material, which comprises mixing a liquid trimethyl aluminum with a liquid dimethyl aluminum hydride in an inert gas atmosphere, followed by vacuum distillation of the mixture to give the desired compound represented by the above formula.

Inventors

• 👤 Tsutomu Shinzawa

Bibliographic Details