Patent US5217700A successfully refreshed from Google Patents.
US5217700A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process and apparatus for producing diamond film
Assignee: Fujitsu Ltd
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Filing: 1991-12-13
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Granted: 1993-06-08
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Expires: 2011-12-13
Abstract
Abstract A process and apparatus for producing a diamond film from a gas phase, in which a fuel gas is burnt by oxygen gas in a torch, to thereby provide a gas flame jet having a high temperature and high speed sufficient to form a high quality diamond film on a substrate, by an unlimited use of various kinds of combustible carbon compound gases as the fuel gas. A process and apparatus for producing a diamond film from a gas phase, in which a thermal spray material is fed to a combustion flame to thereby form an intermediate layer of a mixture of the thermal spray material and diamond between a substrate and a diamond film, to thereby provide a high purity diamond film having an improved adhesion to the substrate.
Inventors
- 👤 Kazuaki Kurihara
- 👤 Kenichi Sasaki
- 👤 Motonobu Kawarada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 02:26
CPC Classifications
C; C23; C23C; C23C4/00; C23C4/04; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/30; C23C16/44; C23C16/453; C23C4/12
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
126 words
A process for producing a diamond film, comprising the steps of: supplying oxygen gas and a fuel gas containing a combustible carbon compound to a combustion chamber of a torch at a ratio such that a gaseous mixture is formed having an atomic ratio of carbon greater than the atomic ratio of oxygen; burning said gaseous mixture in said combustion chamber to thereby generate a carbon-rich combustion gas having reducing properties in said chamber; ejecting said combustion gas from said combustion chamber through a nozzle of said torch to thereby form a gas flame jet; applying said gas flame jet to a substrate while maintaining the substrate at a temperature of from 500° C. to 1200° C. to thereby form a diamond film on said substrate.
Claim 2
Dependent Claim
126 words
A process for producing a diamond film, comprising the steps of: supplying oxygen gas and a fuel gas containing a combustible carbon compound to a combustion chamber of a torch at a ratio such that a gaseous mixture is formed having an atomic ratio of carbon greater than the atomic ratio of oxygen; burning said gaseous mixture in said combustion chamber to thereby generate a carbon-rich combustion gas having reducing properties in said chamber; ejecting said combustion gas from said combustion chamber through a nozzle of said torch to thereby form a gas flame jet; applying said gas flame jet to a substrate while maintaining the substrate at a temperature of from 500° C. to 1200° C. to thereby form a diamond film on said substrate.
Claim 3
Dependent Claim
18 words
A process according to claim 1, wherein said fuel gas is mainly composed of a carbon compound gas.
Claim 4
Dependent Claim
24 words
A process according to claim 1, wherein said fuel gas is mainly composed of a mixture of a carbon compound gas and hydrogen gas.
Claim 5
Dependent Claim
13 words
A process according to claim 1, wherein said carbon compound is a hydrocarbon.
Claim 6
Dependent Claim
54 words
A process according to claim 1, wherein said combustion gas is ejected from said combustion chamber through said nozzle of said torch into an atmosphere having a reduced pressure, to thereby form said gas flame jet, and the gas flame jet is applied to said substrate while said substrate is held in said atmosphere.
Claim 7
Dependent Claim
25 words
A process according to claim 1, wherein said fuel gas comprises acetylene, propane, propylene, methylacetylene, or a mixture of hydrogen gas and a hydrocarbon gas.
Claim 8
Dependent Claim
56 words
A process according to claim 1, said process comprising the further steps of: feeding a thermal spray material to said gas flame jet; and varying the feed amount of said thermal spray material to thereby form an intermediate layer of a mixture of said thermal spray material and diamond between said substrate and said diamond film.
Claim 9
Dependent Claim
36 words
A process according to claim 7, wherein said thermal spray material is fed in the form of a powder gas comprising a powder of said thermal spray material mixed with and carried by a carrier gas.
Claim 10
Dependent Claim
19 words
A process according to claim 7, wherein said thermal spray material is fed in the form of a wire.
Claim 11
Dependent Claim
19 words
A process according to claim 7, wherein said process is carried out in an atmosphere having a reduced pressure.
Claim 12
Dependent Claim
47 words
A process according to claim 7, wherein the feed amount of said thermal spray material is varied to thereby form said intermediate layer in which a content of said thermal spray material is decreased continuously with respect to the direction from said substrate towards said diamond film.
References Cited (Backward Citations)
JPS5794360A
Cited
US4416421A
Cited
JPS6433096A
Cited
US4938940A
Cited
US4981671A
Cited
JPH02279593A
Cited
JPH03208892A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-07 | 1996-12-07 | 1997-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-07 | 2000-12-07 | 2001-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-07 | 2004-12-07 | 2005-06-08 | $7700.00 | Window Closed / Lapsed |