Patent US5216479A successfully refreshed from Google Patents.
US5216479A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical inspection system for distinguishing between first and second components in a laminate
Assignee: Orbotech Ltd
•
Filing: 1991-07-24
•
Granted: 1993-06-01
•
Expires: 2011-07-24
Abstract
Abstract An optical inspection system for distinguishing between a laminate formed of a first component having a second component disposed on a first surface thereof, comprising a collection optics including a cylindrical concave elliptical reflecting surface and having a first focal line coplanar with a first surface of the laminate. A light source in fixed spatial relationship with the collection optics directs a first beam of light through an aperture in the elliptical reflecting surface towards the laminate so as to strike the surface along the first focal line and to produce a substantially conical fluorescent emission and so as to be reflected as a substantially conical reflection beam from respective first and second components of the laminate. A filter is disposed near a second focal line of the elliptical reflecting surface for separating the fluorescent emission from the reflection beam. First and second collectors collect the separated fluorescent emission and the separated reflection beam both emanating from limited areas of the laminate, while an analyzing means is coupled to the first and second collectors and responsive to respective collector signals for analyzing the first and second components of the laminate.
Inventors
- 👤 Noam Dotan
- 👤 Abraham Gross
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 09:04
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G01N2021/95638
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
293 words
An optical inspection system for distinguishing between first and second components of a first surface of a laminate having said second component disposed on the first component, the system comprising: a collection optics including a cylindrical concave elliptical reflecting surface and having a first focal line coplanar with the first surface of the laminate, a light source in fixed spatial relationship with the collection optics for directing a first beam of light through an aperture in the collection optics towards the laminate so as to strike the first surface along the first focal line and to produce from a first area of the first component a substantially conical fluorescent emission having a first apex angle and so as to be reflected by a second area of the second component as a substantially conical reflection beam having a second apex angle, a first filter disposed near a second focal line of the elliptical reflecting surface for intercepting the fluorescent emission and the reflection beam and for separating the fluorescent emission from the reflection beam, a first collector for collecting the separated fluorescent emission emanating from a limited area of said first area and producing a respective first collector signal, a first pair of limit stops disposed near the second focal line for partially intercepting the reflected fluorescent emission so as thereby to limit the area within said first area from which fluorescent emission is collected by the first collector, a second collector for collecting the separated reflection beam emanating from a limited area of said second area and producing a respective second collector signal, and analyzing means coupled to the first and second collectors and responsive to the respective first and second collector signals for analyzing the first and second components of the laminate.
Claim 2
Dependent Claim
293 words
An optical inspection system for distinguishing between first and second components of a first surface of a laminate having said second component disposed on the first component, the system comprising: a collection optics including a cylindrical concave elliptical reflecting surface and having a first focal line coplanar with the first surface of the laminate, a light source in fixed spatial relationship with the collection optics for directing a first beam of light through an aperture in the collection optics towards the laminate so as to strike the first surface along the first focal line and to produce from a first area of the first component a substantially conical fluorescent emission having a first apex angle and so as to be reflected by a second area of the second component as a substantially conical reflection beam having a second apex angle, a first filter disposed near a second focal line of the elliptical reflecting surface for intercepting the fluorescent emission and the reflection beam and for separating the fluorescent emission from the reflection beam, a first collector for collecting the separated fluorescent emission emanating from a limited area of said first area and producing a respective first collector signal, a first pair of limit stops disposed near the second focal line for partially intercepting the reflected fluorescent emission so as thereby to limit the area within said first area from which fluorescent emission is collected by the first collector, a second collector for collecting the separated reflection beam emanating from a limited area of said second area and producing a respective second collector signal, and analyzing means coupled to the first and second collectors and responsive to the respective first and second collector signals for analyzing the first and second components of the laminate.
Claim 3
Dependent Claim
41 words
The system according to claim 1, wherein the first filter transmits the fluorescent emission therethrough and reflects the reflection beam from a front surface thereof to be focused at an image of the second focal line imaged by the first filter.
Claim 4
Dependent Claim
46 words
The system according to claim 2, further including: a first planar reflecting surface disposed towards a rear surface of the first filter behind the second focal line of the elliptical reflecting surface, for reflecting the fluorescent emission transmitted by the first filter towards the first collector.
Claim 5
Dependent Claim
53 words
The system according to claim 1, further including a second pair of limit stops collinear with a reflection of the second focal line for partially intercepting the separated reflection beam so as thereby to limit the area within the second area from which the separated reflection beam is collected by the second collector.
Claim 6
Dependent Claim
69 words
The system according to claim 2, further including a third pair of limit stops disposed between the first filter and a reflection of the second focal line therethrough for partially intercepting the conical reflection beam after it has been separated from the fluorescent emission by the first filter so as thereby to limit collection of the conical reflection beam to within a predetermined fraction of the second apex angle.
Claim 7
Dependent Claim
69 words
The system according to claim 4, further including a third pair of limit stops disposed between the first filter and a reflection of the second focal line therethrough for partially intercepting the separated reflection beam after it has been separated from the fluorescent emission by the first filter so as thereby to limit collection of the conical reflection beam to within a predetermined fraction of the second apex angle.
Claim 8
Dependent Claim
15 words
The system according to claim 1, wherein the first pair of limit stops is variable.
Claim 9
Dependent Claim
15 words
The system according to claim 4, wherein the second pair of limit stops is variable.
Claim 10
Dependent Claim
15 words
The system according to claim 5, wherein the third pair of limit stops is variable.
Claim 11
Dependent Claim
248 words
The system according to claim 1, wherein the second collector includes: a beam splitter intermediate the light source and the elliptical reflecting surface for transmitting the first beam therethrough while reflecting substantially all the reflection beam emerging from the aperture in the elliptical reflecting surface, an optical light guide formed of a fluorescent material and being shielded by a pair of second filters on adjacent faces thereof, for preventing passage therethrough of any fluorescence induced within said fluorescent material, a second planar reflecting surface at a first end of the optical light guide for reflecting light directed thereto back through the optical light guide as a second beam, and a detector at a second end of the optical light guide remote from said first end thereof and responsive to said second beam for producing the second collector signal; whereby the reflection beam emerging from said aperture is directed as a first component beam through a first one of said second filters towards a first one of said faces and the separated reflection beam is directed as a second component beam through a second one of said second filters towards a second one of said faces, said first and second component beams passing through the optical light guide and inducing fluorescence in the fluorescent material thereof which fluorescence is internally reflected therein so as to be directed towards the detector while being blocked by the second filters so as to prevent it from escaping from the optical light guide.
Claim 12
Dependent Claim
18 words
The system according to claim 10, wherein the detector includes a photomultiplier tube for amplifying the second beam.
Claim 13
Dependent Claim
34 words
The system according to claim 11, further including a compound parabolic collector coupled to the detector for collecting the second beam over an area greater than a working surface area of the photomultiplier tube.
Claim 14
Dependent Claim
71 words
The system according to claim 1, further including a third collector disposed towards a second surface of the laminate opposite the first surface and remote from the light source for collecting a third beam passing through the laminate and producing a respective third collector signal; said analyzing means being also coupled to the third collector and responsive to the third collector signal for analyzing defects in a hole in the laminate.
Claim 15
Dependent Claim
151 words
The system according to claim 13, wherein the third collector includes: an optical light guide formed of a fluorescent material and being shielded by a third filter for preventing passage therethrough of any fluorescence induced within the fluorescent material, a third planar reflecting surface at a first end of the optical light guide for reflecting light directed thereto back through the optical light guide towards a second end thereof remote from the first end, and a detector at the second end of the optical light guide for producing the third collector signal; whereby said third beam passes through the third filter towards the optical light guide and induces fluorescence in the fluorescent material of the optical light guide which fluorescence is internally reflected therein so as to be directed towards the detector while being blocked by the third filter so as to prevent it from escaping from the optical light guide.
Claim 16
Dependent Claim
18 words
The system according to claim 14, wherein the detector includes a photomultiplier tube for detecting the third beam.
Claim 17
Dependent Claim
40 words
The system according to claim 15, further including an integrating cylinder at the second end of the optical light guide for receiving the third beam on an internal reflecting surface thereof and for reflecting the third beam towards the detector.
Claim 18
Dependent Claim
41 words
The system according to claim 1, further including at least one fourth planar reflecting surface at a corresponding side of the collection optics for forming an image of the elliptical reflecting surface and thereby at least doubling an effective area thereof.
Claim 19
Dependent Claim
291 words
An optical inspection system for distinguishing between first and second components of a first surface of a laminate having said first component disposed on the second component, the system comprising: a collection optics including a cylindrical concave elliptical reflecting surface and having a first focal line coplanar with the first surface of the laminate, a light source in fixed spatial relationship with the collection optics for directing a beam of light through an aperture in the collection optics towards the laminate so as to strike the first surface along the first focal line and to produce from a first area of the first component a substantially conical fluorescent emission having a first apex angle and so as to be reflected by a second area of the second component as a substantially conical reflection beam having a second apex angle, a first filter disposed near a second focal line of the elliptical reflecting surface for intercepting the fluorescent emission and the reflection beam and for seeparating the fluorescent emission from the reflection beam, a first collector for collecting the separated fluorescent emission emanating from a limited area of said first area and producing a respective first collector signal, a pair of limit stops disposed near the second focal line for partially intercepting the reflected fluorescent emission so as thereby to limit the area within said first area from which fluorescent emission is collected by the first collector, a second collector for collecting the separated reflection beam emanating from a limited area of said second area and producing a respective second collector signal, and analyzing means coupled to the first and second collectors and responsive to the respective first and second collector signals for analyzing the first and second components of a laminate.
Claim 20
Dependent Claim
291 words
An optical inspection system for distinguishing between first and second components of a first surface of a laminate having said first component disposed on the second component, the system comprising: a collection optics including a cylindrical concave elliptical reflecting surface and having a first focal line coplanar with the first surface of the laminate, a light source in fixed spatial relationship with the collection optics for directing a beam of light through an aperture in the collection optics towards the laminate so as to strike the first surface along the first focal line and to produce from a first area of the first component a substantially conical fluorescent emission having a first apex angle and so as to be reflected by a second area of the second component as a substantially conical reflection beam having a second apex angle, a first filter disposed near a second focal line of the elliptical reflecting surface for intercepting the fluorescent emission and the reflection beam and for seeparating the fluorescent emission from the reflection beam, a first collector for collecting the separated fluorescent emission emanating from a limited area of said first area and producing a respective first collector signal, a pair of limit stops disposed near the second focal line for partially intercepting the reflected fluorescent emission so as thereby to limit the area within said first area from which fluorescent emission is collected by the first collector, a second collector for collecting the separated reflection beam emanating from a limited area of said second area and producing a respective second collector signal, and analyzing means coupled to the first and second collectors and responsive to the respective first and second collector signals for analyzing the first and second components of a laminate.
References Cited (Backward Citations)
US4152723A
Cited
US4601576A
Cited
US4556903A
Cited
US4600951A
Cited
US4692690A
Cited
US4943154A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-05-31 | 1996-11-30 | 1997-06-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-31 | 2000-11-30 | 2001-06-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-31 | 2004-11-30 | 2005-06-01 | $7700.00 | Window Closed / Lapsed |