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US5216249A
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Diamond neutron detector
Assignee: De Beers Industrial Diamond Division Pty Ltd
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Filing: 1991-10-07
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Granted: 1993-06-01
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Expires: 2011-10-07
Abstract
Abstract A neutron detector is formed from a layer of polycrystalline diamond which is deposited by a chemical vapor deposition process. The diamond material contains 10 B as a dopant, in a concentration of 1,000 ppm or less. In one embodiment, the layer of diamond material is deposited on a supporting substrate. Advantageously, the substrate itself may comprise a layer of diamond material. In another embodiment, the substrate comprises a layer of conductive or semiconductive material. The diamond material is deposited on top of the substrate, with at least two regions in contact with the semiconductive material. A central portion of the semiconductive material is etched away, and electrical contacts are applied to the remaining portions of the semiconductive substrate. An advantage of the neutron detector of the invention is that the diamond layer is very thin, less than 50 μm thick, so that the sensitivity of the detector to other radiation, particularly γ radiation, is reduced.
Inventors
- 👤 Barbara L. Jones
- 👤 Tom L. Nam
- 👤 Rex J. Keddy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 20:05
CPC Classifications
G; G01; G01T; G01T3/00; G01T3/08
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
39 words
A neutron detector comprising a layer of polycrystalline diamond material deposited by a chemical vapour deposition process, the diamond material containing a sufficient amount of 10 B as a dopant to optimize the neutron detection characteristics of the detector.
Claim 2
Dependent Claim
39 words
A neutron detector comprising a layer of polycrystalline diamond material deposited by a chemical vapour deposition process, the diamond material containing a sufficient amount of 10 B as a dopant to optimize the neutron detection characteristics of the detector.
Claim 3
Dependent Claim
21 words
A neutron detector according to claim 1 wherein the 10 B concentration in the diamond material is 1,000 ppm or less.
Claim 4
Dependent Claim
17 words
A neutron detector according to claim 2 wherein the total boron concentration is 5,000 ppm or less.
Claim 5
Dependent Claim
29 words
A neutron detector according to claim 1 wherein the layer of diamond material is doped by introducing a gas containing 10 B into a chemical vapour deposition reaction vessel.
Claim 6
Dependent Claim
17 words
A neutron detector according to claim 4 wherein the gas is 10 B 2 H 6 .
Claim 7
Dependent Claim
22 words
A neutron detector according to claim 1 wherein the layer of diamond material is doped by ion implantation with 10 B ions.
Claim 8
Dependent Claim
19 words
A neutron detector according to claim 1 wherein the layer of diamond material is less than 50 μm thick.
Claim 9
Dependent Claim
20 words
A neutron detector according to claim 7 wherein the layer of diamond material is between 2 and 30 μm thick.
Claim 10
Dependent Claim
27 words
A neutron detector according to claim 1 wherein the concentration of the 10 B dopant is substantially uniform across the thickness of the layer of diamond material.
Claim 11
Dependent Claim
26 words
A neutron detector according to claim 1, wherein the thickness of the diamond is such that the detection rate of γ photons is 0.1% or less.
Claim 12
Dependent Claim
28 words
A neutron detector according to claim 1 wherein the layer of diamond material is deposited on a supporting substrate which is not activated by neutron or γ radiation.
Claim 13
Dependent Claim
17 words
A neutron detector according to claim 11 wherein the substrate comprises a layer of polycrystalline diamond material.
Claim 14
Dependent Claim
16 words
A neutron detector according to claim 11 wherein the substrate comprises a layer of ceramic material.
Claim 15
Dependent Claim
25 words
A neutron detector according to claim 11 wherein the substrate comprises a layer of conductive or semiconductive material with a layer of insulating material thereon.
Claim 16
Dependent Claim
30 words
A neutron detector according to claim 11 wherein at least a portion of the substrate is removed so that an adjacent portion of the layer of diamond material is exposed.
Claim 17
Dependent Claim
65 words
A neutron detector according to claim 14 wherein at least a pair of spaced apart portions of the layer of diamond material are in contact with the substrate, a central portion of the substrate being removed so that the remaining substrate comprises at least a pair of separate substrate portions each in contact with the respective spaced apart portions of the layer of diamond material.
Claim 18
Dependent Claim
12 words
A neutron detector according to claim 16 wherein the substrate comprises silicon.
Claim 19
Dependent Claim
17 words
A neutron detector according to claim 16 wherein metallic contacts are applied to the separate substrate portions.
Claim 20
Dependent Claim
20 words
A neutron detector according to claim 1 wherein spaced apart metallic contacts are applied to the layer of diamond material.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-05-31 | 1996-11-30 | 1997-06-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-31 | 2000-11-30 | 2001-06-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-31 | 2004-11-30 | 2005-06-01 | $7700.00 | Window Closed / Lapsed |