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US5212383A
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US
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Color synthesizing scanning electron microscope
Assignee: Individual
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Filing: 1991-07-29
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Granted: 1993-05-18
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Expires: 2011-07-29
Abstract
Abstract A color synthesizing scanning electron microscope having a scanning primary beam of electrons directed toward a specimen, is configured to produce color images of high information content. The microscope comprises at least two wide energy bandwidth secondary electron detectors, arranged around the specimen at predetermined variable angles, for receiving electron emission from the specimen subsequent to incidence of the scanning primary electron beam. The wide energy bandwidth secondary detectors detect electrons with trajectory or positional differences and convert the positional differences to signals for synthesizing color. The signals from the wide energy bandwidth secondary electron detectors are combined to generate signals representative of different colors. Additional signals representing a difference between any two input signals from the wide energy bandwidth secondary detectors can also be generated.
Inventors
- 👤 David Scharf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 00:13
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/22; H01J37/222; H01J37/26; H01J37/28; H01J2237/00; H01J2237/244; H01J2237/2448; H01J2237/24495
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
93 words
A color synthesizing scanning electron microscope having a scanning primary beam of electrons directed toward a specimen, comprising: at least two wide energy bandwidth secondary detectors arranged around the specimen at variable angles for receiving electron emission from the specimen subsequent to incidence of the scanning primary beam, said secondary detectors detecting electrons with positional differences and converting said positional differences to signals for synthesizing color; and means for mixing said signals to generate signals representative of different colors which are indicative of surface topography including illuminating and shadows effects of said specimen.
Claim 2
Dependent Claim
93 words
A color synthesizing scanning electron microscope having a scanning primary beam of electrons directed toward a specimen, comprising: at least two wide energy bandwidth secondary detectors arranged around the specimen at variable angles for receiving electron emission from the specimen subsequent to incidence of the scanning primary beam, said secondary detectors detecting electrons with positional differences and converting said positional differences to signals for synthesizing color; and means for mixing said signals to generate signals representative of different colors which are indicative of surface topography including illuminating and shadows effects of said specimen.
Claim 3
Dependent Claim
31 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: means for generating additional signals for representing a difference between any two input signals from said secondary detectors.
Claim 4
Dependent Claim
25 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: means for amplifying said signals from said wide energy bandwidth secondary detectors.
Claim 5
Dependent Claim
22 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: means for amplifying said signals representative of different colors.
Claim 6
Dependent Claim
28 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: means for adding video blanking and sync signals to said signals representative of different colors.
Claim 7
Dependent Claim
26 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: frame averaging means for reducing noise in said signals representative of different colors.
Claim 8
Dependent Claim
27 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: video transcoding means for generating video signals from said signals representative of different colors.
Claim 9
Dependent Claim
19 words
A color synthesizing scanning electron microscope as defined in claim 1, wherein said secondary detectors are Everhart-Thornley secondary detectors.
Claim 10
Dependent Claim
24 words
A color synthesizing scanning electron microscope as defined in claim 1, wherein said angle at which said secondary detector is oriented is varied laterally.
Claim 11
Dependent Claim
24 words
A color synthesizing scanning electron microscope as defined in claim 1, wherein said angle at which said secondary detector is oriented is varied vertically.
Claim 12
Dependent Claim
26 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: means for coupling said signals representative of different colors to a film recorder.
Claim 13
Dependent Claim
28 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: means for coupling said signals representative of different colors to an analog to digital converter.
Claim 14
Dependent Claim
24 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: means for coupling said signals representative of different colors a computer.
Claim 15
Dependent Claim
31 words
A color synthesizing scanning electron microscope as defined in claim 1, further comprising: means for monitoring said signals prior to said signals being mixed to generate signals representative of different colors.
Claim 16
Independent Claim
94 words
A method for generating color images, comprising the steps of: directing a scanning primary beam of electrons toward a specimen; receiving electron emission from the specimen subsequent to the incidence of the scanning primary beam with at least two wide energy bandwidth secondary detectors arranged around the specimen at predetermined angles, said secondary detectors detecting electrons with positional differences and converting said positional differences to signals for synthesizing color; and mixing said signals to generate signals representative of different colors which are indicative of surface topography including illuminating and shadows effects of said specimen.
Claim 17
Independent Claim
94 words
A method for generating color images, comprising the steps of: directing a scanning primary beam of electrons toward a specimen; receiving electron emission from the specimen subsequent to the incidence of the scanning primary beam with at least two wide energy bandwidth secondary detectors arranged around the specimen at predetermined angles, said secondary detectors detecting electrons with positional differences and converting said positional differences to signals for synthesizing color; and mixing said signals to generate signals representative of different colors which are indicative of surface topography including illuminating and shadows effects of said specimen.
Claim 18
Dependent Claim
32 words
A method for generating color images as defined in claim 15, further comprising the step of: generating additional signals for representing a difference between any two input signals from said secondary detectors.
Claim 19
Dependent Claim
23 words
A method for generating color images as defined in claim 15, further comprising the step of: amplifying said signals from said secondary detectors.
Claim 20
Dependent Claim
23 words
A method for generating color images as defined in claim 15, further comprising the step of: amplifying said signals representative of different colors.
Claim 21
Dependent Claim
29 words
A method for generating color images as defined in claim 15, further comprising the step of: adding video blanking and sync signals to said signals representative of different colors.
Claim 22
Dependent Claim
30 words
A method for generating color images as defined in claim 15, further comprising the step of: reducing noise in said signals representative of different colors with a frame averaging means.
Claim 23
Dependent Claim
31 words
A method for generating color images as defined in claim 15, further comprising the step of: generating video signals from said signals representative of different colors with a video transcoder means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-05-17 | 1996-11-16 | 1997-05-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-17 | 2000-11-16 | 2001-05-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-17 | 2004-11-16 | 2005-05-18 | $7700.00 | Window Closed / Lapsed |