Patent US5207573A successfully refreshed from Google Patents.
US5207573A
Expired / Lapsed
US
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Heat processing apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1992-01-22
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Granted: 1993-05-04
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Expires: 2012-01-22
Abstract
Abstract A heat processing apparatus comprises a heating furnace, a process tube located in the heating furnace and having an open bottom, a manifold connected to the open bottom of the process tube, a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube, a fixing member for fixing the process tube to the manifold, a heat transmitting member made of metal and sandwiched between the fixing member and the process tube to radiate heat at that area of the process tube, which is opposed to the fixing member, to the fixing member by heat conduction, and a heat exchange conduit arranged in the fixing member and having a passage through which heat exchanging medium flows to cool the fixing member by heat exchange.
Inventors
- 👤 Katsushin Miyagi
- 👤 Tomio Kimishima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:48
CPC Classifications
F; F27; F27B; F27B17/00; F27B17/0016; F27B17/0025; H; H10; H10P; H10P95/00; H10P95/90; C; C21; C21D; C21D1/00; C21D1/34; F27B11/00
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
126 words
A heat processing apparatus comprising: a heating furnace; a process tube located in the heating furnace and having an open bottom; a manifold connected to the open bottom of the process tube; a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube; fixing means for fixing the process tube to the manifold; heat transmitting means made of metal and sandwiched between the fixing means and the process tube to radiate heat at that area of the process tube, which is opposed to the fixing means, to the fixing means by heat conduction; and heat exchange means arranged in the fixing means and having a passage through which heat exchanging medium flows to cool the fixing means by heat exchange.
Claim 2
Dependent Claim
126 words
A heat processing apparatus comprising: a heating furnace; a process tube located in the heating furnace and having an open bottom; a manifold connected to the open bottom of the process tube; a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube; fixing means for fixing the process tube to the manifold; heat transmitting means made of metal and sandwiched between the fixing means and the process tube to radiate heat at that area of the process tube, which is opposed to the fixing means, to the fixing means by heat conduction; and heat exchange means arranged in the fixing means and having a passage through which heat exchanging medium flows to cool the fixing means by heat exchange.
Claim 3
Dependent Claim
20 words
The heat processing apparatus according to claim 1, wherein said heat transmitting means is made of Al, Cu or Ag.
Claim 4
Dependent Claim
19 words
The heat processing apparatus according to claim 1, wherein said heat transmitting means is made by a hollow tube.
Claim 5
Dependent Claim
26 words
The heat processing apparatus according to claim 3, wherein said heat transmitting means is made by a hollow tube filled with Al powder or ceramic wool.
Claim 6
Dependent Claim
22 words
The heat processing apparatus according to claim 3, wherein said heat transmitting means is a ring-shaped aluminum tube having an oval section.
Claim 7
Dependent Claim
24 words
The heat processing apparatus according to claim 3, wherein said heat transmitting means is made by plural ring-shaped tubes arranged concentric with one another.
Claim 8
Dependent Claim
21 words
The heat processing apparatus according to claim 1, wherein said heat transmitting means is made by plural ring-shaped and laminated plates.
Claim 9
Dependent Claim
19 words
The heat processing apparatus according to claim 1, wherein said heat transmitting means is a ring-shaped and corrugated plate.
Claim 10
Dependent Claim
24 words
The heat processing apparatus according to claim 1, wherein said manifold has a cooling means provided with a passage through which cooling medium flows.
Claim 11
Dependent Claim
44 words
The heat processing apparatus according to claim 1, further comprising a light radiation shielding means located inside and adjacent to the sealing member and projected upward from the top of the manifold to shield light radiated from the heating furnace to the sealing member.
Claim 12
Dependent Claim
34 words
The heat processing apparatus according to claim 10, wherein said sealing member is seated in a groove on the top of the manifold and said light radiation shielding means is formed inside the groove.
Claim 13
Dependent Claim
52 words
The heat processing apparatus according to claim 1, further comprising a gas passage formed in the fixing means to allow gas to flow through it and a gas jetting outlet communicated with the gas passage to jet gas against that area of the process tube which is opposed to the fixing means.
Claim 14
Dependent Claim
93 words
A heat processing apparatus comprising: a heating furnace; a process tube located in the heating furnace and having an open bottom; a manifold connected to the open bottom of the process tube; a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube; fixing means for fixing the process tube to the manifold; and light radiation shielding means located inside and adjacent to the sealing member and projected upward from the top of the manifold to shield light radiated from the heating furnace to the sealing member.
Claim 15
Dependent Claim
93 words
A heat processing apparatus comprising: a heating furnace; a process tube located in the heating furnace and having an open bottom; a manifold connected to the open bottom of the process tube; a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube; fixing means for fixing the process tube to the manifold; and light radiation shielding means located inside and adjacent to the sealing member and projected upward from the top of the manifold to shield light radiated from the heating furnace to the sealing member.
Claim 16
Dependent Claim
34 words
The heat processing apparatus according to claim 13, wherein said sealing member is seated in a groove on the top of the manifold and said light radiation shielding means is formed inside the groove.
Claim 17
Dependent Claim
101 words
A heat processing apparatus comprising: a heating furnace; a process tube located in the heating furnace and having an open bottom; a manifold connected to the open bottom of the process tube; a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube; fixing means for fixing the process tube to the manifold; a gas passage formed in the fixing means to allow gas to pass through it; and a gas jetting outlet communicated with the gas passage to jet gas against that area of the process tube which is opposed to the fixing means.
Claim 18
Dependent Claim
101 words
A heat processing apparatus comprising: a heating furnace; a process tube located in the heating furnace and having an open bottom; a manifold connected to the open bottom of the process tube; a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube; fixing means for fixing the process tube to the manifold; a gas passage formed in the fixing means to allow gas to pass through it; and a gas jetting outlet communicated with the gas passage to jet gas against that area of the process tube which is opposed to the fixing means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-05-03 | 1996-11-02 | 1997-05-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-03 | 2000-11-02 | 2001-05-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-03 | 2004-11-02 | 2005-05-04 | $7700.00 | Window Closed / Lapsed |