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US5206872A Expired / Lapsed US ⏱️ 0.0 years remaining

Surface emitting laser

Assignee: Nokia Bell Labs
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Filing: 1991-11-01
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Granted: 1993-04-27
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Expires: 2011-11-01
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Abstract

Abstract Reduction of laser threshold in an electrically pumped vertical cavity laser is the consequence of interpositioning of an electrode layer intermediate the active, photon producing region, and at least one of the two Distributed Bragg Reflectors defining the laser cavity. The advance is a consequence of the lowered pump circuit resistance due to elimination of one or both DBRs--in particular, to elimination of the p-doped DBR--from the pump circuit.

Inventors

  • 👤 Jack L. Jewell
  • 👤 Axel Scherer

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 07:07
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H01S5/18341; H01S5/06; H01S5/04; H01S5/042; H01S5/0421; H01S5/18308; H01S5/18358; H01S5/30; H01S5/32; H01S5/3211; H01S5/3215; H01S5/40; H01S5/42; H01S5/423

Claims Analysis

Total Claims: 24
Claim 1
Independent Claim 265 words
Apparatus comprising at least one electrically pumped vertical cavity laser consisting essentially of an active region containing a semiconductor active material layer for generating photons to result in laser emission, said active region comprising p-type and n-type conductivity portions and including a semiconductor junction, said active region being sandwiched between Distributed Bragg Reflectors each comprising a plurality of layers of relatively low and high refractive index for the said laser emission, together with circuit means for electrically pumping said active region to lasing threshold, lasing entailing presence of a standing wave defining a cavity here described as including the said electrode and as bounded by a cavity between the said Distributed Bragg Reflectors characterized in that said circuit means includes an electrode layer at least part of which is outside said active region, whereby at least a major portion of one DBR is excluded from the circuit means, said electrode layer having a conductivity sufficient to result in total conduction of said circuit greater than that of a circuit including the entire DBR as conductivity-doped to an average carrier concentration of 10 19 carriers/cm 3 , and in that absorption for laser emission is reduced in part due to reduction in conductivity-doping of the excluded portion of the DBR to result in a numerical value of equal to or less than 0.25 for the product r·A p in which r is circuit resistance in ohms of that portion of the circuit consisting of p-type material and the associated electrode layer and A p is per-pass photon absorption for that circuit portion expressed as a fraction.
Claim 2
Dependent Claim 265 words
Apparatus comprising at least one electrically pumped vertical cavity laser consisting essentially of an active region containing a semiconductor active material layer for generating photons to result in laser emission, said active region comprising p-type and n-type conductivity portions and including a semiconductor junction, said active region being sandwiched between Distributed Bragg Reflectors each comprising a plurality of layers of relatively low and high refractive index for the said laser emission, together with circuit means for electrically pumping said active region to lasing threshold, lasing entailing presence of a standing wave defining a cavity here described as including the said electrode and as bounded by a cavity between the said Distributed Bragg Reflectors characterized in that said circuit means includes an electrode layer at least part of which is outside said active region, whereby at least a major portion of one DBR is excluded from the circuit means, said electrode layer having a conductivity sufficient to result in total conduction of said circuit greater than that of a circuit including the entire DBR as conductivity-doped to an average carrier concentration of 10 19 carriers/cm 3 , and in that absorption for laser emission is reduced in part due to reduction in conductivity-doping of the excluded portion of the DBR to result in a numerical value of equal to or less than 0.25 for the product r·A p in which r is circuit resistance in ohms of that portion of the circuit consisting of p-type material and the associated electrode layer and A p is per-pass photon absorption for that circuit portion expressed as a fraction.
Claim 3
Dependent Claim 35 words
Apparatus of claim 1 in which the thickness of said electrode layer is less than about 1/4 wavelength for the laser emission as measured within the electrode in the direction defined by the standing wave.
Claim 4
Dependent Claim 22 words
Apparatus of claim 2 in which said active region consists essentially of said active material layer together with sandwiching primary spacer layers.
Claim 5
Dependent Claim 41 words
Apparatus of claim 3 in which said active material layer is of a maximum of approximately centered on a crest of the standing wave and the thickness of said active material layer is less than 1/2 wavelength of the standing layer.
Claim 6
Dependent Claim 40 words
Apparatus of claim 5 in which the thickness of said active material layer is of a maximum approximately 1/4 wavelength of the standing wave, in which said electrode layer is positioned to correspond with a null in the standing wave.
Claim 7
Dependent Claim 64 words
Apparatus of claim 5 in which said primary spacer layers doped with significant impurity resulting in the first such layer being of p-type conductivity and the second such layer being of n-type conductivity, in which said excluded DBR portion is on the p-type side of said active region and in which such excluded portion is of resistivity of a minimum of 10 -1 ohm-cm.
Claim 8
Dependent Claim 19 words
Apparatus of claim 6 in which the active material layer is at least in part of substantially intrinsic conductivity.
Claim 9
Dependent Claim 36 words
Apparatus of claim 6 in which substantially the entirety of said DBR is on the other side of said electrode layer from said active region so that substantially the entirety is excluded from the circuit means.
Claim 10
Dependent Claim 21 words
Apparatus of claim 8 in which said electrode layer is metallic and of thickness of a maximum of approximately 400 Å.
Claim 11
Dependent Claim 43 words
Apparatus of claim 9 in which said electrode layer comprises at least one element selected from the group consisting of gold, tungsten, molybdenum, copper, titanium, silver, NaAl and CoAl and the electrode layer is of thickness of a maximum of approximately 100 Å.
Claim 12
Dependent Claim 13 words
Apparatus of claim 10 in which said electrode layer consists essentially of gold.
Claim 13
Dependent Claim 13 words
Apparatus of claim 8 in which said electrode layer consists essentially of semimetal.
Claim 14
Dependent Claim 42 words
Apparatus of claim 12 in which the resistivity of at least a substantial portion of said electrode layer is within the approximate range of from 3·10 -5 -10 -4 ohm-cm and is of thickness within the approximate range of 100 Å-400 Å.
Claim 15
Dependent Claim 13 words
Apparatus of claim 13 in which said electrode layer is comprised of ErAs.
Claim 16
Dependent Claim 17 words
Apparatus of claim 14 in which said electrode layer consists essentially of Sc x Er 1-x As.
Claim 17
Dependent Claim 35 words
Apparatus of claim 8 in which said electrode layer consists essentially of semiconductor which is doped with significant impurity to result in an electrical carrier density of at least about 10 20 /cm 3 .
Claim 18
Dependent Claim 18 words
Apparatus of claims 10, 12 and 16 in which the DBR on the p-type side is epitaxially grown.
Claim 19
Dependent Claim 47 words
Apparatus of claim 1 in which said circuit means provides for pump current which is substantially parallel in direction with the standing wave within said active region and in which laser emission is through the surface of the excluded DBR layer furthest removed from the active region.
Claim 20
Dependent Claim 33 words
Apparatus of claim 8 in which said circuit means includes a second electrode layer intermediate the active region and the second DBR whereby the second DBR is also excluded from the circuit means.
Claim 21
Dependent Claim 19 words
Apparatus of claim 19 in which the second DBR is of resistivity of a minimum of 10 -1 ohm-cm.
Claim 22
Dependent Claim 22 words
Apparatus of claim 1 in which the laser is supported on a substrate and in which laser emission is through the substrate.
Claim 23
Dependent Claim 14 words
Apparatus of claim 1 comprising an integrated circuit including a plurality of such lasers.
Claim 24
Dependent Claim 22 words
Apparatus of claim 22 in which the integrated circuit is an Opto Electronic Integrated Circuit including electronic elements in the circuit means.

References Cited (Backward Citations)

US4999842A Cited
US4991179A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-04-26 1996-10-26 1997-04-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-04-26 2000-10-26 2001-04-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-04-26 2004-10-26 2005-04-27 $7700.00 Window Closed / Lapsed

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