US5205870A
Expired / Lapsed
US
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Vapor deposition apparatus
Assignee: Toshiba Corp
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Filing: 1992-05-29
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Granted: 1993-04-27
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Expires: 2012-05-29
Abstract
Abstract An argon (Ar + ) laser has a resonator. A reaction chamber is integrally formed in the resonator. A voltage is applied to electrodes, which discharge electricity to excite argon atoms in the resonator to produce a laser beam. The laser beam is continuously oscillated between total reflection mirrors disposed at opposite ends of the resonator. A substrate is disposed in the reaction chamber into which a material gas is introduced. The material gas absorbs the laser beam, to decompose and deposit as a thin film over the substrate.
Inventors
- 👤 Yuusuke Sato
- 👤 Akio Ui
- 👤 Keiichi Akagawa
- 👤 Toshimitsu Ohmine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:01
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/483
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
58 words
A vapor deposition apparatus comprising: (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam; and (b) means for introducing a material gas into the resonator so that the laser beam may irradiate the material gas to cause a photochemical reaction of the material gas in the resonator.
Claim 2
Dependent Claim
58 words
A vapor deposition apparatus comprising: (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam; and (b) means for introducing a material gas into the resonator so that the laser beam may irradiate the material gas to cause a photochemical reaction of the material gas in the resonator.
Claim 3
Dependent Claim
33 words
The vapor deposition apparatus according to claim 1, wherein the laser beam for irradiating the material gas in the resonator is a reciprocating laser beam continuously oscillated between at least two reflecting members.
Claim 4
Dependent Claim
40 words
The vapor deposition apparatus according to claim 1, wherein the photochemical reaction of the material gas caused by the laser beam is a light absorbing reaction of the material gas by which the material gas is excited, ionized, or decomposed.
Claim 5
Dependent Claim
25 words
The vapor deposition apparatus according to claim 1, further comprising a reaction chamber which orthogonally intersects the resonator and is integrally formed with the resonator.
Claim 6
Dependent Claim
22 words
The vapor deposition apparatus according to claim 4, wherein the inside of the resonator communicates with the inside of the reaction chamber.
Claim 7
Dependent Claim
35 words
The vapor deposition apparatus according to claim 5, wherein said gas introducing means introduces the material gas as well as a carrier gas of the same kind as the laser medium into the reaction chamber.
Claim 8
Dependent Claim
48 words
The vapor deposition apparatus according to claim 4, wherein a substrate on which particles produced by the photochemical reaction are deposited, a substrate holder for holding the substrate, and a high-frequency coil for heating the substrate and substrate holder are disposed at the bottom of the reaction chamber.
Claim 9
Dependent Claim
44 words
The vapor deposition apparatus according to claim 4, wherein a collecting filter is disposed at the bottom of the reaction chamber, to collect particles that are produced from the material gas when the material gas absorbs the laser beam to excite, ionize, or decompose.
Claim 10
Dependent Claim
21 words
The vapor deposition apparatus according to claim 4, wherein the resonator is separated from the reaction chamber with light transmitting means.
Claim 11
Dependent Claim
22 words
The vapor deposition apparatus according to claim 9, wherein the light transmitting means is a condenser lens for collecting the laser beam.
Claim 12
Dependent Claim
26 words
The vapor deposition apparatus according to claim 10, wherein the gas introducing means collectively introduces the material gas to a focal point of the condenser lens.
Claim 13
Dependent Claim
28 words
The vapor deposition apparatus according to claim 2, wherein one of the reflecting member is a substrate on which vapor deposition due to the photochemical reaction is generated.
Claim 14
Dependent Claim
33 words
The vapor deposition apparatus according to claim 2, wherein the resonator excites a plurality of laser media with the excitation medium to produce a plurality of laser beams for irradiating the material gas.
Claim 15
Dependent Claim
19 words
The vapor deposition apparatus according to claim 4, wherein a plurality of resonators are arranged around the reaction chamber.
Claim 16
Dependent Claim
78 words
A vapor deposition apparatus comprising: (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam; (b) a reaction chamber formed in the resonator and separated from the laser medium with light transmitting means; and (c) means for introducing a material gas into the reaction chamber so that the laser beam may irradiate the material gas in the reaction chamber to cause a photochemical reaction of the material gas.
Claim 17
Dependent Claim
78 words
A vapor deposition apparatus comprising: (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam; (b) a reaction chamber formed in the resonator and separated from the laser medium with light transmitting means; and (c) means for introducing a material gas into the reaction chamber so that the laser beam may irradiate the material gas in the reaction chamber to cause a photochemical reaction of the material gas.
Claim 18
Dependent Claim
30 words
The vapor deposition apparatus according to claim 15, wherein the laser beam for irradiating the material gas is a reciprocating laser beam continuously oscillated between at least two reflecting members.
Claim 19
Dependent Claim
40 words
The vapor deposition apparatus according to claim 15, wherein the photochemical reaction of the material gas caused by the laser beam is a light absorbing reaction of the material gas by which the material gas is excited, ionized, or decomposed.
Claim 20
Dependent Claim
48 words
The vapor deposition apparatus according to claim 15, wherein a substrate on which particles produced by the photochemical reaction are deposited, a substrate holder for holding the substrate, and a high-frequency coil for heating the substrate and substrate holder are disposed at the bottom of the reaction chamber.
Claim 21
Dependent Claim
44 words
The vapor deposition apparatus according to claim 15, wherein a collecting filter is disposed at the bottom of the reaction chamber, to collect particles that are produced from the material gas when the material gas absorbs the laser beam to excite, ionize, or decompose.
Claim 22
Dependent Claim
22 words
The vapor deposition apparatus according to claim 15, wherein the light transmitting means is a condenser lens for collecting the laser beam.
Claim 23
Dependent Claim
26 words
The vapor deposition apparatus according to claim 20, wherein the gas introducing means collectively introduces the material gas to a focal point of the condenser lens.
Claim 24
Dependent Claim
90 words
A vapor deposition apparatus comprising: (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam; and (b) means for introducing a material gas into the resonator so that the laser beam may irradiate the material gas to cause a photochemical reaction of the material gas in the resonator, (c) the laser beam for irradiating the material gas in the resonator being continuously oscillated between a reflecting member and a substrate on which vapor deposition by the photochemical reaction is generated.
Claim 25
Dependent Claim
90 words
A vapor deposition apparatus comprising: (a) a laser having a resonator for exciting a laser medium with an excitation medium, to produce a laser beam; and (b) means for introducing a material gas into the resonator so that the laser beam may irradiate the material gas to cause a photochemical reaction of the material gas in the resonator, (c) the laser beam for irradiating the material gas in the resonator being continuously oscillated between a reflecting member and a substrate on which vapor deposition by the photochemical reaction is generated.
Claim 26
Dependent Claim
40 words
The vapor deposition apparatus according to claim 22, wherein the photochemical reaction of the material gas caused by the laser beam is a light absorbing reaction of the material gas by which the material gas is excited, ionized, or decomposed.
Claim 27
Dependent Claim
25 words
The vapor deposition apparatus according to claim 22, further comprising a reaction chamber which orthogonally intersects the resonator and is integrally formed with the resonator.
Claim 28
Dependent Claim
21 words
The vapor deposition apparatus according to claim 24, wherein the resonator is separated from the reaction chamber with light transmitting means.
Claim 29
Dependent Claim
22 words
The vapor deposition apparatus according to claim 25, wherein the light transmitting means is a condenser lens for collecting the laser beam.
Claim 30
Dependent Claim
19 words
The vapor deposition apparatus according to claim 3, wherein the light absorbing reaction is a multiple photon absorbing reaction.
Claim 31
Dependent Claim
19 words
The vapor deposition apparatus according to claim 17, wherein the light absorbing reaction is a multiple photon absorbing reaction.
Claim 32
Dependent Claim
19 words
The vapor deposition apparatus according to claim 23, wherein the light absorbing reaction is a multiple photon absorbing reaction.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-04-26 | 1996-10-26 | 1997-04-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-26 | 2000-10-26 | 2001-04-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-26 | 2004-10-26 | 2005-04-27 | $7700.00 | Window Closed / Lapsed |