Patent US5204887A successfully refreshed from Google Patents.
US5204887A
Expired / Lapsed
US
⏱️ 0.0 years remaining
X-ray microscope
Assignee: Canon Inc
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Filing: 1992-09-16
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Granted: 1993-04-20
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Expires: 2012-09-16
Abstract
Abstract A method and device for imaging an object illuminated by an X-ray beam, through a zone plate, is disclosed. A concave mirror with a multilayered film is disposed on a path of the X-ray beam to reflect the same and collect the same onto the object.
Inventors
- 👤 Masami Hayashida
- 👤 Yutaka Watanabe
- 👤 Masahito Niibe
- 👤 Takashi Iizuka
- 👤 Yasuaki Fukuda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:58
CPC Classifications
G; G21; G21K; G21K7/00; B; B82; B82Y; B82Y10/00; G21K1/00; G21K1/06; G21K1/062; G21K2201/00; G21K2201/06; G21K2201/061; G21K2201/064
Claims Analysis
Total Claims: 54
Claim 1
Independent Claim
55 words
A method of imaging an object illuminated by an X-ray beam, through a zone plate, comprising the steps of: disposing a concave mirror with a multilayered film in a path of the X-ray beam; reflecting the X-ray beam from the concave mirror with the multilayered film; and collecting the reflected X-ray beam onto the object.
Claim 2
Independent Claim
55 words
A method of imaging an object illuminated by an X-ray beam, through a zone plate, comprising the steps of: disposing a concave mirror with a multilayered film in a path of the X-ray beam; reflecting the X-ray beam from the concave mirror with the multilayered film; and collecting the reflected X-ray beam onto the object.
Claim 3
Dependent Claim
34 words
A method according to claim 1, wherein the disposing of the mirror includes positioning the mirror to form a reflected beam which is inclined with respect to an optical axis of the zone plate.
Claim 4
Dependent Claim
60 words
A method according to claim 2, wherein a central portion of the X-ray beam is received by a a first portion of the mirror having a first reflectivity, and a remaining portion of the X-ray beam is received by a second portion of the mirror having a second reflectivity, and wherein the first reflectivity is lower than the second reflectivity.
Claim 5
Dependent Claim
17 words
A method according to claim 3, wherein the first portion is not covered by the multilayered film.
Claim 6
Dependent Claim
18 words
A method according to claim 3, wherein at the first portion and multilayered film structure has been destroyed.
Claim 7
Independent Claim
42 words
A method according to claims 1 or 2, further comprising the steps of detecting a formed image of the object and preventing a ray emanating from the object along an optical axis of the zone plate from being superposed on the formed.
Claim 8
Dependent Claim
46 words
A method according to claim 6, further comprising blocking with respect to a central portion of the zone plate and a plurality of ring zones of the zone plate around the central portion, the advancement of a ray along the optical axis of the zone plate.
Claim 9
Dependent Claim
64 words
A method according to claim 1, wherein the following condition is satisfied: 0.1≦0.257831×[(fλ)/(rn).sup.2 ]×(λ/Δλ)≦10 where λis the center wavelength of the spectrum of a reflected beam to be collected on the object, Δλ is a half width of the spectrum, f is the focal length of the zone plate with respect to the center wavelength, and rn is the radius of the zone plate.
Claim 10
Dependent Claim
48 words
A method according to claim 1, further comprising changing the thickness of the multilayered film of the mirror with respect to a predetermined direction along the surface of the mirror to compensate for a change in wavelength of a reflected beam dependent upon the position on the mirror.
Claim 11
Dependent Claim
51 words
An imaging system for imaging an object illuminated by an X-ray source on a detector, comprising: a concave mirror with a multilayered film, for reflecting X-rays from the X-ray source to collect them onto the object; and a zone plate for forming an image of the object irradiated with the X-rays.
Claim 12
Dependent Claim
51 words
An imaging system for imaging an object illuminated by an X-ray source on a detector, comprising: a concave mirror with a multilayered film, for reflecting X-rays from the X-ray source to collect them onto the object; and a zone plate for forming an image of the object irradiated with the X-rays.
Claim 13
Dependent Claim
27 words
An imaging system according to claim 10, wherein said mirror forms a reflected beam which is inclined with respect to an optical axis of said zone plate.
Claim 14
Dependent Claim
55 words
An imaging system according to claim 11, wherein said mirror has a first portion having a first reflectivity, for receiving a central portion of the X-ray beam, and a second portion having a second reflectivity, for receiving the remaining portion of the X-ray beam, and wherein the first reflectivity is lower than the second reflectivity.
Claim 15
Dependent Claim
18 words
An imaging system according to claim 12, wherein said first portion is not covered by said multilayered film.
Claim 16
Dependent Claim
19 words
An imaging system according to claim 12, wherein at said first portion said multilayered film structure has been destroyed.
Claim 17
Dependent Claim
36 words
An imaging system according to claim 10 or 11, further comprising a filter for preventing a ray, emanating from the object along an optical axis of said zone plate, from being superposed on the formed image.
Claim 18
Dependent Claim
51 words
An imaging system according to claim 15, further comprising a blocking member for blocking, with respect to a central portion of said zone plate and a plurality of ring zones of said zone plate around the central portion, the advancement of a ray along the optical axis of said zone plate.
Claim 19
Dependent Claim
66 words
An imaging system according to claim 10, wherein the following condition is satisfied: 0.1≦0.257831×[(fλ)/(rn).sup.2 ]×(λ/Δλ)≦10 where λ is the center wavelength of the spectrum of a reflected beam to be collected on the object, Δλ is a half width of the spectrum, f is the focal length of said zone plate with respect to the center wavelength, and rn is the radius of said zone plate.
Claim 20
Dependent Claim
15 words
An imaging system according to claim 17, wherein the following condition is satisfied: 0.3≦0.257831×[(fλ)/(rn).sup.2 ]×(λ/Δλ)≦1
Claim 21
Dependent Claim
49 words
An imaging system according to claim 10, wherein, with respect to a predetermined direction along the surface of said mirror, the thickness of said multilayered film of said mirror changes so as to compensate a change in wavelength of a reflected beam dependent upon the position on said mirror.
Claim 22
Dependent Claim
50 words
An X-ray microscope, comprising: an X-ray source for supplying X-rays; a concave mirror with a multilayered film, for reflecting the X-rays and collecting them onto a sample; a zone plate for forming a magnified image of the sample irradiated with the X-rays; and a detector for detecting the formed image.
Claim 23
Dependent Claim
50 words
An X-ray microscope, comprising: an X-ray source for supplying X-rays; a concave mirror with a multilayered film, for reflecting the X-rays and collecting them onto a sample; a zone plate for forming a magnified image of the sample irradiated with the X-rays; and a detector for detecting the formed image.
Claim 24
Dependent Claim
29 words
An X-ray microscope according to claim 20, wherein said X-ray source comprises a laser and a target for receiving a laser beam from said laser and for producing X-rays.
Claim 25
Dependent Claim
14 words
An X-ray microscope according to claim 20, wherein said X-ray source comprises a synchrotron.
Claim 26
Dependent Claim
27 words
An X-ray microscope according to claim 20, wherein said mirror forms a reflected beam which is inclined with respect to an optical axis of said zone plate.
Claim 27
Dependent Claim
55 words
An X-ray microscope according to claim 23, wherein said mirror has a first portion having a first reflectivity, for receiving a central portion of the X-ray beam, and a second portion having a second reflectivity, for receiving the remaining portion of the X-ray beam, and wherein the first reflectivity is lower than the second reflectivity.
Claim 28
Dependent Claim
18 words
An X-ray microscope according to claim 23, wherein said first portion is not covered by said multilayered film.
Claim 29
Dependent Claim
19 words
An X-ray microscope according to claim 24, wherein at said first portion the multilayered film structure has been destroyed.
Claim 30
Dependent Claim
34 words
An X-ray microscope according to claim 23, further comprising a filter for preventing a ray, emanating from the object along an optical axis of said zone plate, from being superposed on the formed image.
Claim 31
Dependent Claim
14 words
An X-ray microscope according to claim 27, wherein said filter is an apertured member.
Claim 32
Dependent Claim
51 words
An X-ray microscope according to claim 20, further comprising a blocking member for blocking, with respect to a central portion of said zone plate and a plurality of ring zones of said zone plate around the central portion, the advancement of a ray along the optical axis of said zone plate.
Claim 33
Dependent Claim
66 words
An X-ray microscope according to claim 20, wherein the following condition is satisfied: 0.1≦0.257831×[(fλ)/(rn).sup.2 ]×(λ/λΔ)≦10 where λ is the center wavelength of the spectrum of a reflected beam to be collected on the object, Δλ is a half width of the spectrum, f is the focal length of said zone plate with respect to the center wavelength, and rn is the radius of said zone plate.
Claim 34
Dependent Claim
15 words
An X-ray microscope according to claim 30, wherein the following condition is satisfied: 0.3≦0.257831×[(fλ)/(rn).sup.2 ]×(λ/Δλ)≦1
Claim 35
Dependent Claim
49 words
An X-ray microscope according to claim 20, wherein, with respect to a predetermined direction along the surface of said mirror, the thickness of said multilayered film of said mirror changes so as to compensate a change in wavelength of a reflected beam dependent upon the position on said mirror.
Claim 36
Independent Claim
66 words
A method of imaging an object illuminated by an X-ray beam, through a zone plate, to detect an image of the object, comprising the steps of: disposing a concave mirror with a multilayered film in a path of the X-ray beam; reflecting the X-ray beam; reflecting the X-ray beam from the concave mirror with the multilayered film; and collecting the reflected X-ray beam onto the object.
Claim 37
Independent Claim
66 words
A method of imaging an object illuminated by an X-ray beam, through a zone plate, to detect an image of the object, comprising the steps of: disposing a concave mirror with a multilayered film in a path of the X-ray beam; reflecting the X-ray beam; reflecting the X-ray beam from the concave mirror with the multilayered film; and collecting the reflected X-ray beam onto the object.
Claim 38
Dependent Claim
34 words
A method according to claim 33, wherein the disposing of the mirror includes positioning the mirror to form a reflected beam which is inclined with respect to an optical axis of the zone plate.
Claim 39
Dependent Claim
60 words
A method according to claim 34, wherein a central portion of the X-ray beam is received by a a first portion of the mirror having a first reflectivity, and a remaining portion of the X-ray beam is received by a second portion of the mirror having a second reflectivity, and wherein the first reflectivity is lower than the second reflectivity.
Claim 40
Dependent Claim
17 words
A method according to claim 35, wherein the first portion is not covered by the multilayered film.
Claim 41
Dependent Claim
18 words
A method according to claim 35, wherein at the first portion the multilayered film structure has been destroyed.
Claim 42
Independent Claim
43 words
A method according to claims 33 or 34, further comprising the steps of detecting a formed image of the object and preventing a ray emanating from the object along an optical axis of the zone plate from being superposed on the formed image.
Claim 43
Dependent Claim
46 words
A method according to claim 38, further comprising blocking with respect to a central portion of the zone plate and a plurality of ring zones of the zone plate around the central portion, the advancement of a ray along the optical axis of the zone plate.
Claim 44
Dependent Claim
65 words
A method according to claim 33, wherein the following condition is satisfied: 0.1≦0.257831×[(fλ)/(rn).sup.2 ]×(λ/Δλ)≦10 where λ is the center wavelength of the spectrum of a reflected beam to be collected on the object, Δλ is a half width of the spectrum, f is the focal length of the zone plate with respect to the center wavelength, and rn is the radius of the zone plate.
Claim 45
Dependent Claim
14 words
A method according to claim 40, wherein the following condition is satisfied: 0.3≦0.257831×[(fλ)/(rn).sup.2 ]×(λ/Δλ)≦1
Claim 46
Dependent Claim
48 words
A method according to claim 33, further comprising changing the thickness of the multilayered film of the mirror with respect to a predetermined direction along the surface of the mirror to compensate for a change in wavelength of a reflected beam dependent upon the position on the mirror.
Claim 47
Independent Claim
41 words
A method of imaging an object illuminated by an X-ray beam, comprising the steps of: reflecting the X-ray beam on a multilayered film mirror; and collecting the reflected X-ray beam on the object; and imaging the object through a zone plate.
Claim 48
Independent Claim
41 words
A method of imaging an object illuminated by an X-ray beam, comprising the steps of: reflecting the X-ray beam on a multilayered film mirror; and collecting the reflected X-ray beam on the object; and imaging the object through a zone plate.
Claim 49
Independent Claim
43 words
A method of detecting an image of an object illuminated by an X-ray beam comprising the steps of: reflecting the X-ray beam on a multilayered film mirror; collecting the reflected X-ray beam on the object; and imaging the object through a zone plate.
Claim 50
Independent Claim
43 words
A method of detecting an image of an object illuminated by an X-ray beam comprising the steps of: reflecting the X-ray beam on a multilayered film mirror; collecting the reflected X-ray beam on the object; and imaging the object through a zone plate.
Claim 51
Dependent Claim
14 words
An X-ray microscope according to claim 20, wherein said detector comprises a photographic film.
Claim 52
Independent Claim
56 words
An apparatus for exposing a radiation sensitive material, comprising: an X-ray source for supplying X-rays; a concave mirror with an multilayered film, for reflecting the X-rays and for collecting them onto an object; and a zone plate for forming an image of the object, irradiated with the X-rays, on the radiation sensitive material for exposure thereof.
Claim 53
Independent Claim
56 words
An apparatus for exposing a radiation sensitive material, comprising: an X-ray source for supplying X-rays; a concave mirror with an multilayered film, for reflecting the X-rays and for collecting them onto an object; and a zone plate for forming an image of the object, irradiated with the X-rays, on the radiation sensitive material for exposure thereof.
Claim 54
Dependent Claim
15 words
An apparatus according to claim 46, wherein said radiation sensitive material comprises a photographic film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |