Patent US2815518A successfully refreshed from Google Patents.
Patent US5204531A successfully refreshed from Google Patents.
US5204531A
Expired / Lapsed
US
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Method of adjusting the size of the area scanned by a scanning probe
Assignee: Bruker Nano Inc
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Filing: 1992-02-14
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Granted: 1993-04-20
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Expires: 2012-02-14
Abstract
Abstract A method of adjusting the scan size of an instrument having piezoelectric scanners, such as a scanning probe microscope, including operating the instrument at a first scan size and adjusting the scan size of the instrument to a second scan size. The instrument is then precycled by scanning in each of x and y directions over substantially maximum excursions in each direction for a number of scan lines less than a complete scan of an area of the second scan size. The precycling settles the sensitivities of the piezoelectric scanners. The instrument is then operated at the second scan size to obtain data indicative of the surface of a scanned object.
Inventors
- 👤 Virgil B. Elings
- 👤 John A. Gurley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:21
CPC Classifications
G; G01; G01Q; G01Q10/00; G01Q10/04; G01Q10/06; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
93 words
A method for changing the scan size from a first to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with x-direction and y-direction scan motions, comprising: operating said instrument at a first scan size; precycling said instrument by scanning said probe in said x and y directions at a scan length related to said second scan size for a number of scan lines but less than a number of scan lines in a full scan; and operating said instrument at said second scan size.
Claim 2
Independent Claim
93 words
A method for changing the scan size from a first to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with x-direction and y-direction scan motions, comprising: operating said instrument at a first scan size; precycling said instrument by scanning said probe in said x and y directions at a scan length related to said second scan size for a number of scan lines but less than a number of scan lines in a full scan; and operating said instrument at said second scan size.
Claim 3
Dependent Claim
36 words
A method as recited in claim 1, wherein said step of precycling comprises: scanning said probe in said x direction at a first rate; and scanning said probe in said y direction at a second rate.
Claim 4
Dependent Claim
21 words
A method as recited in claim 2, wherein said step of precycling comprises scanning in said x and y directions simultaneously.
Claim 5
Dependent Claim
31 words
A method as recited in claim 2, wherein said first and second scanning rates are higher than a y-direction scanning rate used to image an area at said second scan size.
Claim 6
Dependent Claim
23 words
A method as recited in claim 2, further comprising determining said first and second scanning rates in accordance with said second scan size.
Claim 7
Dependent Claim
28 words
A method as recited in claim 2, further comprising determining said first and second scanning rates in accordance with terrain of a sample encountered in a previous scan.
Claim 8
Dependent Claim
16 words
A method as recited in claim 2, wherein said first and second scan rates are equal.
Claim 9
Dependent Claim
42 words
A method as recited in claim 1, wherein said step of precycling comprises: scanning said probe over substantially an entire x-direction dimension of said second scan size; and scanning said probe over substantially an entire y-direction dimension of said second scan size.
Claim 10
Independent Claim
30 words
A method as recited in claim I, wherein said step of precycling comprises scanning said probe in each of said x and y directions for one forward and backward cycle.
Claim 11
Dependent Claim
19 words
A method as recited in claim 1, comprising lifting said probe from said surface prior to said precycling step.
Claim 12
Dependent Claim
15 words
A method as recited in claim 1, comprising said instrument being a scanning probe microscope.
Claim 13
Independent Claim
104 words
A method for changing the scan size from a first to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with x-direction and y-direction scan motions, said y-direction scan motion being more slowly varying than said x-direction scan motion, comprising: operating said instrument at a first scan size; precycling said instrument by scanning said probe in said y direction at a scan length related to said second scan size for a number of scan lines but less than a number of scan lines in a full scan; and operating said instrument at said second scan size.
Claim 14
Independent Claim
104 words
A method for changing the scan size from a first to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with x-direction and y-direction scan motions, said y-direction scan motion being more slowly varying than said x-direction scan motion, comprising: operating said instrument at a first scan size; precycling said instrument by scanning said probe in said y direction at a scan length related to said second scan size for a number of scan lines but less than a number of scan lines in a full scan; and operating said instrument at said second scan size.
Claim 15
Dependent Claim
27 words
A method as recited in claim 12, wherein said step of precycling comprises: scanning said probe over substantially an entire y-direction dimension of said second scan size.
Claim 16
Dependent Claim
26 words
A method as recited in claim 12, wherein said step of precycling comprises scanning said probe in said y direction for one forward and backward cycle.
Claim 17
Dependent Claim
19 words
A method as recited in claim 12, comprising lifting said probe from said surface prior to said precycling step.
Claim 18
Dependent Claim
30 words
A method as recited in claim 12, wherein a y-direction precycling scanning rate is higher than a y-direction scanning rate used to image an area at said second scan size.
Claim 19
Dependent Claim
21 words
A method as recited in claim 12, further comprising determining said y-direction scanning rate in accordance with said second scan size.
Claim 20
Dependent Claim
15 words
A method as recited in claim 12, comprising said instrument being a scanning probe microscope.
Claim 21
Independent Claim
90 words
A method for changing the scan size from a first scan size to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with and perpendicular x-direction and y-direction scan motions, comprising: operating said instrument at a first scan size; precycling said instrument in a scanning motion for a plurality of scan lines less than a number of scan lines in a full scan, said x- and y-direction scanning motions being carried out simultaneously; and operating said instrument at said second scan size.
Claim 22
Independent Claim
90 words
A method for changing the scan size from a first scan size to a second scan size of an instrument having piezoelectric scanners for scanning a probe over a surface with and perpendicular x-direction and y-direction scan motions, comprising: operating said instrument at a first scan size; precycling said instrument in a scanning motion for a plurality of scan lines less than a number of scan lines in a full scan, said x- and y-direction scanning motions being carried out simultaneously; and operating said instrument at said second scan size.
Claim 23
Dependent Claim
27 words
A method as recited in claim 19, wherein said step of precycling comprises scanning said probe over substantially an entire diagonal dimension of said second scan size.
Claim 24
Dependent Claim
32 words
A method as recited in claim 19, wherein a scanning rate during said precycling step is higher than a y-direction scanning rate used to image an area at said second scan size.
Claim 25
Dependent Claim
21 words
A method as recited in claim 19, further comprising determining a precycling scanning rate in accordance with said second scan size.
Claim 26
Dependent Claim
26 words
A method as recited in claim 19, further comprising determining a precycling scanning rate in accordance with terrain of a sample encountered in a previous scan.
Claim 27
Dependent Claim
33 words
A method as recited in claim 19, wherein said step of precycling comprises precycling in a scanning motion having a direction at an angle with respect to said x- and y-direction scan motions.
Claim 28
Dependent Claim
12 words
A method as recited in claim 24, wherein said angle is 45°.
Claim 29
Dependent Claim
19 words
A method as recited in claim 19, comprising lifting said probe from said surface prior to said precycling step.
Claim 30
Dependent Claim
15 words
A method as recited in claim 19, comprising said instrument being a scanning probe microscope.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |