US5204288A
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US
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Method for planarizing an integrated circuit structure using low melting inorganic material
Assignee: Applied Materials Inc
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Filing: 1992-03-04
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Granted: 1993-04-20
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Expires: 2012-03-04
Abstract
Abstract A planarizing process for planarizing an integrated circuit structure in a CVD apparatus is disclosed using a low melting inorganic planarizing material which comprises flowing white depositing a low melting inorganic planarizing layer such as a boron oxide glass over a layer of insulating material such as an oxide of silicon, then dry etching the low melting inorganic planarizing layer to planarize the structure, and then depositing a further layer of an insulating material to encapsulate any remaining portions of the low melting glass planarizing layer which may be hygroscopic. The method eliminates the need for separate coating, drying, and curing steps associated with the application of organic-based planarizing layers usually carried out outside of a vacuum apparatus. In a preferred embodiment, the deposition steps and the etching step are all carried out without removing the integrated circuit structure from the apparatus. In a particularly preferred embodiment, all of the steps are carried out in the same chamber of the apparatus. An additional etching step may be carried out after depositing the first insulating layer and prior to deposition of the planarizing layer to remove any voids formed in the insulating layer.
Inventors
- 👤 Jeffrey Marks
- 👤 Kam S. Law
- 👤 David N. Wang
- 👤 Dan Maydan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:55
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/662; H10P14/68; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6927; H10P14/694; H10P14/6943; H10P14/69433; H10P95/00; H10P95/06; H10P95/062; H10P95/064; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/092; H10W74/00; H10W74/10; H10W74/131; H10P14/6336; H10P14/69215; H10P14/6923; Y; Y10; Y10S; Y10S148/00; Y10S148/133; Y10S438/00; Y10S438/913
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
162 words
A process for planarizing an integrated circuit structure in a vacuum apparatus which comprises: (a) depositing a first layer of an insulating material over an integrated circuit structure in a chemical vapor deposition zone in said apparatus; (b) depositing over said insulating layer a low melting inorganic planarizing layer having a flow temperature of not greater than 500° C. in a chemical vapor deposition zone in said apparatus at a deposition temperature within a range of from about 300° C. to about 500° C. and sufficiently high within said range to permit said low melting inorganic planarizing material to flow as it is deposited; (c) dry etching said inorganic planarizing layer in an etching zone in said apparatus to remove at least a portion of said inorganic planarizing layer to planarize said structure; and (d) depositing a second layer of insulating material over said structure in a chemical vapor deposition zone in said apparatus to encapsulate remaining portions of said planarizing layer.
Claim 2
Dependent Claim
162 words
A process for planarizing an integrated circuit structure in a vacuum apparatus which comprises: (a) depositing a first layer of an insulating material over an integrated circuit structure in a chemical vapor deposition zone in said apparatus; (b) depositing over said insulating layer a low melting inorganic planarizing layer having a flow temperature of not greater than 500° C. in a chemical vapor deposition zone in said apparatus at a deposition temperature within a range of from about 300° C. to about 500° C. and sufficiently high within said range to permit said low melting inorganic planarizing material to flow as it is deposited; (c) dry etching said inorganic planarizing layer in an etching zone in said apparatus to remove at least a portion of said inorganic planarizing layer to planarize said structure; and (d) depositing a second layer of insulating material over said structure in a chemical vapor deposition zone in said apparatus to encapsulate remaining portions of said planarizing layer.
Claim 3
Dependent Claim
40 words
The process of claim 1 wherein said step of depositing said low melting inorganic planarizing layer having a flow temperature of not greater than 500° C. further comprises depositing a planarizing layer consisting essentially of a low melting inorganic glass.
Claim 4
Dependent Claim
36 words
The process of claim 1 wherein said step of depositing said low melting inorganic planarizing layer further comprises depositing an inorganic planarizing layer of a material having a flow temperature of not greater than 390° C.
Claim 5
Dependent Claim
65 words
The process of claim 3 wherein said step of depositing said planarizing layer of said material further comprises depositing a glass containing a compound selected from the class consisting of B 2 O 3 , B 2 S 6 , B 2 O 3 /SiO 2 mixtures, As 2 O 3 , As 2 S 3 , P 2 O 5 , and combinations thereof.
Claim 6
Dependent Claim
32 words
The process of claim 1 wherein said step of depositing said second layer of insulating material further comprises depositing another layer of the same material as deposited for said first insulating layer.
Claim 7
Dependent Claim
27 words
The process of claim 1 wherein said step of depositing said first insulating layer further comprises depositing a layer of silicon oxide over said integrated circuit structure.
Claim 8
Dependent Claim
20 words
The process of claim 1 wherein each of said steps is carried out in the same chamber of said apparatus.
Claim 9
Dependent Claim
37 words
The process of claim 1 wherein said step of depositing said first insulating layer further comprises depositing a layer of an insulating layer selected from the class consisting essentially of an oxide, nitride, and oxynitride of silicon.
Claim 10
Dependent Claim
43 words
The process of claim 1 wherein said step of depositing said first insulation layer comprises simultaneously depositing and etching said first insulation layer using a gaseous mixture of insulation material and etchant in a ratio of about 1 to 20 volume % etchant.
Claim 11
Dependent Claim
12 words
The process of claim 9 wherein said etchant comprises a fluorine-containing material.
Claim 12
Dependent Claim
44 words
The process of claim 1 including the further step of etching said first insulation layer prior to depositing said planarizing layer to remove one or more portions of said first insulation layer where voids may form between raised portions of said integrated circuit structure.
Claim 13
Dependent Claim
32 words
The process of claim 11 including the further step of depositing a layer of insulation material over said etched layer of insulation material prior to said step of depositing said planarizing layer.
Claim 14
Dependent Claim
194 words
A process for planarizing an integrated circuit structure which comprises: (a) depositing over an integrated circuit structure a first layer of an insulating material; (b) depositing a low melting inorganic planarizing layer having a flow temperature of not greater than 500° C. over said insulating layer in a chemical vapor deposition zone in an apparatus at a deposition temperature within a range of from about 100° C. to about 700° C. and sufficiently high within said range to permit said low melting inorganic planarizing material to flow as it is deposited; (c) anisotropically dry etching said low melting inorganic planarizing layer to remove at least a portion thereof to planarize said structure in an etching zone in said same chamber in said apparatus used to deposit said low melting inorganic planarizing layer; and (d) depositing a second layer of insulating material over said structure in said same chamber of said apparatus to encapsulate any remaining portions of said planarizing layer after said etching step; whereby said integrated circuit structure is maintained in the same chamber in said apparatus after deposition of said low melting inorganic planarizing layer to avoid exposing said structure to contaminants.
Claim 15
Dependent Claim
194 words
A process for planarizing an integrated circuit structure which comprises: (a) depositing over an integrated circuit structure a first layer of an insulating material; (b) depositing a low melting inorganic planarizing layer having a flow temperature of not greater than 500° C. over said insulating layer in a chemical vapor deposition zone in an apparatus at a deposition temperature within a range of from about 100° C. to about 700° C. and sufficiently high within said range to permit said low melting inorganic planarizing material to flow as it is deposited; (c) anisotropically dry etching said low melting inorganic planarizing layer to remove at least a portion thereof to planarize said structure in an etching zone in said same chamber in said apparatus used to deposit said low melting inorganic planarizing layer; and (d) depositing a second layer of insulating material over said structure in said same chamber of said apparatus to encapsulate any remaining portions of said planarizing layer after said etching step; whereby said integrated circuit structure is maintained in the same chamber in said apparatus after deposition of said low melting inorganic planarizing layer to avoid exposing said structure to contaminants.
Claim 16
Dependent Claim
60 words
The process of claim 13 wherein said step of depositing said planarizing layer of low melting glass further comprises depositing a glass containing a compound selected from the class consisting of B 2 O 3 , B 2 S 6 B 2 O 3 /SiO 2 mixtures, As 2 O 3 , As 2 S 3 , and combinations thereof.
Claim 17
Dependent Claim
106 words
A process for planarizing an integrated circuit structure which comprises: (a) depositing a first layer of an insulating material over an integrated circuit structure; (b) isotropically etching said insulation layer to remove one or more portions of said insulation layer where voids may form between raised portions of said integrated circuit structure; (c) thereafter depositing a lower melting inorganic planarizing layer over said insulating layer; (d) dry etching said inorganic planarizing layer to remove at least a portion of said planarizing layer to planarize said structure; and (e) depositing a further layer of insulating material over said structure to encapsulate remaining portions of said planarizing layer.
Claim 18
Dependent Claim
106 words
A process for planarizing an integrated circuit structure which comprises: (a) depositing a first layer of an insulating material over an integrated circuit structure; (b) isotropically etching said insulation layer to remove one or more portions of said insulation layer where voids may form between raised portions of said integrated circuit structure; (c) thereafter depositing a lower melting inorganic planarizing layer over said insulating layer; (d) dry etching said inorganic planarizing layer to remove at least a portion of said planarizing layer to planarize said structure; and (e) depositing a further layer of insulating material over said structure to encapsulate remaining portions of said planarizing layer.
Claim 19
Dependent Claim
61 words
The process of claim 15 wherein said step of depositing said planarizing layer of low melting glass further comprises depositing a glass containing a compound selected from the class consisting of B 2 O 3 , B 2 S 6 , B 2 O 3 /SiO 2 mixtures, As 2 O 3 , As 2 S 3 , and combinations thereof.
Claim 20
Dependent Claim
40 words
The process of claim 15 wherein a second layer of insulating material is deposited over said first layer after said first layer of insulation material has been deposited but prior to deposition of said inorganic planarizing layer on said structure.
Claim 21
Dependent Claim
134 words
A process for planarizing an integrated circuit structure which comprises: (a) forming a first layer of an insulating material over an integrated circuit structure; (b) depositing a low melting inorganic planarizing layer over said insulating layer in a chemical vapor deposition zone in an apparatus at a deposition temperature within a range of from about 100° C. to about 700° C. and sufficiently high within said range to permit said low melting inorganic planarizing material to flow as it is deposited; (c) dry etching said inorganic planarizing layer in an etching zone in the same apparatus used to deposit said low melting inorganic planarizing layer to planarize said structure; and (d) depositing a further layer of insulating material over said structure in said same apparatus to encapsulate any remaining portions of said planarizing layer.
Claim 22
Dependent Claim
134 words
A process for planarizing an integrated circuit structure which comprises: (a) forming a first layer of an insulating material over an integrated circuit structure; (b) depositing a low melting inorganic planarizing layer over said insulating layer in a chemical vapor deposition zone in an apparatus at a deposition temperature within a range of from about 100° C. to about 700° C. and sufficiently high within said range to permit said low melting inorganic planarizing material to flow as it is deposited; (c) dry etching said inorganic planarizing layer in an etching zone in the same apparatus used to deposit said low melting inorganic planarizing layer to planarize said structure; and (d) depositing a further layer of insulating material over said structure in said same apparatus to encapsulate any remaining portions of said planarizing layer.
Claim 23
Dependent Claim
37 words
The process of claim 18 wherein said step of depositing said first insulating layer further comprises depositing a layer of an insulating layer selected from the class consisting essentially of an oxide, nitride, and oxynitride of silicon.
Claim 24
Dependent Claim
27 words
The process of claim 19 wherein said step of depositing said first insulating layer further comprises depositing a layer of silicon oxide over said integrated circuit structure.
Claim 25
Dependent Claim
36 words
The process of claim 19 wherein said step of depositing said second layer of insulating material further comprises depositing another layer of the same material as deposited in said step of depositing said first insulating layer.
Claim 26
Dependent Claim
61 words
The process of claim 18 wherein said step of depositing said planarizing layer of low melting glass further comprises depositing a glass containing a compound selected from the class consisting of B 2 O 3 , B 2 S 6 , B 2 O 3 /SiO 2 mixtures, As 2 O 3 , As 2 S 3 , and combinations thereof.
Claim 27
Dependent Claim
35 words
The process of claim 18 wherein said step of depositing a low melting inorganic planarizing layer further comprises depositing a low melting inorganic planarizing material having a flow temperature of not greater than 500° C.
Claim 28
Dependent Claim
120 words
A process for planarizing an integrated circuit structure which comprises: (a) forming a first layer of an insulating material over an integrated circuit structure; (b) depositing a low melting inorganic planarizing layer over said insulating layer in a vacuum apparatus at a deposition temperature within a range of from about 100° C. to about 700° C. and sufficiently high within said range to permit said low melting inorganic planarizing material to flow as it is deposited; (c) dry etching said inorganic planarizing layer in an etching zone in a vacuum apparatus to planarize said structure; and (d) depositing a further layer of insulating material over said structure in a vacuum apparatus to encapsulate any remaining portions of said planarizing layer.
Claim 29
Dependent Claim
120 words
A process for planarizing an integrated circuit structure which comprises: (a) forming a first layer of an insulating material over an integrated circuit structure; (b) depositing a low melting inorganic planarizing layer over said insulating layer in a vacuum apparatus at a deposition temperature within a range of from about 100° C. to about 700° C. and sufficiently high within said range to permit said low melting inorganic planarizing material to flow as it is deposited; (c) dry etching said inorganic planarizing layer in an etching zone in a vacuum apparatus to planarize said structure; and (d) depositing a further layer of insulating material over said structure in a vacuum apparatus to encapsulate any remaining portions of said planarizing layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |