Patent US5203981A successfully refreshed from Google Patents.
US5203981A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum-treatment apparatus
Assignee: Mitsubishi Electric Corp
•
Filing: 1992-02-14
•
Granted: 1993-04-20
•
Expires: 2012-02-14
Abstract
Abstract A vacuum-treatment apparatus employs a magnetically driven clamp which uses repulsive and attractive forces between magnets. The clamp mechanism is simplified, maintenance of the apparatus can be easily performed, and the surfaces which mechanically contact one another are decreased as much as possible so that a vacuum-treatment apparatus which generates less dust is obtained.
Inventors
- 👤 Moriaki Akazawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:44
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J2237/00; H01J2237/02; H01J2237/022
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
68 words
A vacuum-treatment apparatus comprising: a vacuum container; a specimen table, positioned in said vacuum chamber, for supporting a specimen; a clamp ring including an embedded permanent magnet for pressing a specimen disposed on said specimen table; and an electromagnet for generating a magnetic field for selectively lifting said clamp ring perpendicularly from said specimen table and urging said clamp ring against a specimen disposed on said specimen table.
Claim 2
Dependent Claim
68 words
A vacuum-treatment apparatus comprising: a vacuum container; a specimen table, positioned in said vacuum chamber, for supporting a specimen; a clamp ring including an embedded permanent magnet for pressing a specimen disposed on said specimen table; and an electromagnet for generating a magnetic field for selectively lifting said clamp ring perpendicularly from said specimen table and urging said clamp ring against a specimen disposed on said specimen table.
Claim 3
Dependent Claim
36 words
The vacuum-treatment apparatus as claimed in claim 1 wherein said vacuum container includes a gas-feeding entrance for introducing a reactive gas into said vacuum container and an exhaust port for exhausting gas from said vacuum container.
Claim 4
Dependent Claim
17 words
The vacuum-treatment apparatus as claimed in claim 1 wherein said electromagnet is disposed outside said specimen table.
Claim 5
Dependent Claim
17 words
The vacuum-treatment apparatus as claimed in claim 1 wherein said vacuum-treatment apparatus is a dry etching apparatus.
Claim 6
Dependent Claim
16 words
The vacuum-treatment apparatus as claimed in claim 1 wherein said vacuum-treatment apparatus is a CVD apparatus.
Claim 7
Dependent Claim
16 words
The vacuum-treatment apparatus as claimed in claim 1 wherein said vacuum-treatment apparatus is a sputtering apparatus.
References Cited (Backward Citations)
JPS53123669A
Cited
JPS5590228A
Cited
JPS56131931A
Cited
US4473455A
Cited
US4522697A
Cited
US4535834A
Cited
US4869801A
Cited
US5037262A
Cited
US4944860A
Cited
US5006536A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |