Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
50 words
An apparatus for measuring pressure fluctuations, comprising: a pressure-sensing membrane which undergoes deflections in relation to pressure fluctuations to be measured; a membrane deflection sensor; a backplate within said apparatus and adjacent said membrane; and a voltage source for creating a predetermined voltage potential between said backplate and said membrane.
Claim 2
Independent Claim
50 words
An apparatus for measuring pressure fluctuations, comprising: a pressure-sensing membrane which undergoes deflections in relation to pressure fluctuations to be measured; a membrane deflection sensor; a backplate within said apparatus and adjacent said membrane; and a voltage source for creating a predetermined voltage potential between said backplate and said membrane.
Claim 3
Dependent Claim
54 words
The apparatus of claim 1, wherein said deflection sensor comprises an optical fiber probe, a surface of said membrane facing said optical fiber probe is reflective, and said backplate includes an opening which permits at least one of said optical fiber probe and light from said optical fiber probe to pass through said backplate.
Claim 4
Dependent Claim
31 words
The apparatus of claim 2, wherein said optical fiber probe is at least partly encased in a conductive sheath, said sheath is electrically connected to said backplate and said voltage source.
Claim 5
Dependent Claim
18 words
The apparatus of claim 2, further comprising a housing electrically connected to said membrane and said voltage source.
Claim 6
Dependent Claim
15 words
The apparatus of claim 2, wherein said membrane is under tensile stress while at rest.
Claim 7
Dependent Claim
55 words
The apparatus of claim 2, further comprising a housing electrically connected to said membrane and said voltage source, wherein said optical fiber probe is at least partly covered in a conductive sheath, said sheath is electrically connected to said backplate and said voltage source, and wherein said backplate and sheath are insulated from said housing.
Claim 8
Dependent Claim
23 words
The apparatus of claim 6, wherein said sheath is electrically connected to said backplate by an annular coil spring located in said opening.
Claim 9
Independent Claim
57 words
A method for calibrating in situ an apparatus for measuring pressure fluctuations wherein first deflections of a pressure sensing membrane responsive to said pressure fluctuations are measured, comprising electrostatically actuating said membrane with a predetermined voltage using an electrode within said apparatus to cause second deflections of said membrane, and comparing said second deflections to predetermined standards.
Claim 10
Independent Claim
57 words
A method for calibrating in situ an apparatus for measuring pressure fluctuations wherein first deflections of a pressure sensing membrane responsive to said pressure fluctuations are measured, comprising electrostatically actuating said membrane with a predetermined voltage using an electrode within said apparatus to cause second deflections of said membrane, and comparing said second deflections to predetermined standards.
Claim 11
Dependent Claim
19 words
A method according to claim 8, wherein said electrode is a backplate adjacent to said membrane within said apparatus.
Claim 12
Dependent Claim
17 words
A method according to claim 8, wherein said first deflections are measured with an optical fiber probe.