US5196706A
Expired / Lapsed
US
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Extractor and deceleration lens for ion beam deposition apparatus
Assignee: International Business Machines Corp
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Filing: 1991-07-30
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Granted: 1993-03-23
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Expires: 2011-07-30
Abstract
Abstract A pair of lenses for an ion beam deposition device permit the formation of an ion beam with good beam characteristics and the variation of ion energy over an extremely wide range and at high perveance. An ion extractor is provided with a shield with a shape closely corresponding to the extraction electrode aperture to avoid sputtering and the introduction of contaminants into the material deposition process at low beam energies at the extractor. A three electrode deceleration lens allows high current beams to be decelerated to an energy of 25 eV for deposition, under some conditions. The combination of lenses allows the ion energy in the beam to be changed at particular regions along the beam so that optimal energies for focussing, mass analysis and deposition can be obtained.
Inventors
- 👤 John H. Keller
- 👤 James W. Robinson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 12:11
CPC Classifications
G; G21; G21K; G21K1/00; G21K1/08; G21K1/087; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/12; H01J37/30; H01J37/317; H01J37/3178; H01J2237/00; H01J2237/04; H01J2237/047; H01J2237/0475; H01J2237/04756; H01J2237/06; H01J2237/08
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
97 words
An ion beam apparatus including an extractor including a first extraction electrode having an aperture of predetermined dimensions and a shield positioned between said first extraction electrode and a plasma, said shield having an aperture substantially congruent with said aperture of said first extraction electrode, and a deceleration lens including an aperture defining an ion beam path perimeter of an ion beam at said deceleration lens, means for forming a meniscus lens substantially larger than said ion beam path perimeter to reduce aberration of said meniscus lens of said ion beam within said ion beam path perimeter.
Claim 2
Dependent Claim
97 words
An ion beam apparatus including an extractor including a first extraction electrode having an aperture of predetermined dimensions and a shield positioned between said first extraction electrode and a plasma, said shield having an aperture substantially congruent with said aperture of said first extraction electrode, and a deceleration lens including an aperture defining an ion beam path perimeter of an ion beam at said deceleration lens, means for forming a meniscus lens substantially larger than said ion beam path perimeter to reduce aberration of said meniscus lens of said ion beam within said ion beam path perimeter.
Claim 3
Dependent Claim
16 words
An ion beam apparatus as recited in claim 1, wherein said shield means is an insulator.
Claim 4
Dependent Claim
33 words
An ion beam apparatus as recited in claim 1, wherein said shield means is a conductor held at a potential approximately equal to a floating potential of a plasma within said ion source.
Claim 5
Dependent Claim
58 words
An ion beam apparatus as recited in claim 1, wherein said means for forming a meniscus lens includes a first electrode means recessed from said ion beam path perimeter, and a second electrode means forming a meniscus lens with said first electrode means by curvature of equipotential lines between said first electrode means and said second electrode means.
Claim 6
Dependent Claim
36 words
An ion beam apparatus as recited in claim 4, wherein said second electrode means includes an electrode recessed from said ion beam path perimeter by a smaller distance than said recess of said first electrode means.
Claim 7
Dependent Claim
24 words
An ion beam apparatus as recited in claim 4, wherein said deceleration lens further includes a third electrode means for decelerating said ion beam.
Claim 8
Dependent Claim
31 words
An ion beam apparatus as recited in claim 6, wherein said third electrode means is located with approximate symmetry to said first electrode means with respect to said second electrode means.
Claim 9
Dependent Claim
41 words
An ion beam apparatus as recited in claim 6, wherein said first and third electrode means each have an aperture larger and recessed further from an ion optical axis of said deceleration lens than an aperture in said second electrode means.
Claim 10
Dependent Claim
115 words
A deceleration lens for an ion beam apparatus, said deceleration lens including an aperture defining an ion beam path perimeter of an ion beam at said deceleration lens, a first electrode means recessed from said ion beam path perimeter, a second electrode means for simultaneously stripping electrons from said ion beam and forming a meniscus lens with said first electrode means by curvature of equipotential line between said first electrode means and said second electrode means to converge said ion beam by a predetermined amount, and a third electrode means for decelerating said ion beam, wherein said predetermined amount of convergence of said ion beam approximately compensates for spreading of said ion beam during deceleration.
Claim 11
Dependent Claim
115 words
A deceleration lens for an ion beam apparatus, said deceleration lens including an aperture defining an ion beam path perimeter of an ion beam at said deceleration lens, a first electrode means recessed from said ion beam path perimeter, a second electrode means for simultaneously stripping electrons from said ion beam and forming a meniscus lens with said first electrode means by curvature of equipotential line between said first electrode means and said second electrode means to converge said ion beam by a predetermined amount, and a third electrode means for decelerating said ion beam, wherein said predetermined amount of convergence of said ion beam approximately compensates for spreading of said ion beam during deceleration.
Claim 12
Dependent Claim
89 words
A deceleration lens for an ion beam apparatus, said deceleration lens including an aperture defining an ion beam path perimeter of an ion beam at said deceleration lens, a first electrode means recessed from said ion beam path perimeter, and a second electrode means forming a meniscus lens with a potential of said first electrode means between said first electrode means and said second electrode means, whereby said recess of said first electrode reduces aberration of said meniscus lens of said ion beam within said ion beam path perimeter.
Claim 13
Dependent Claim
89 words
A deceleration lens for an ion beam apparatus, said deceleration lens including an aperture defining an ion beam path perimeter of an ion beam at said deceleration lens, a first electrode means recessed from said ion beam path perimeter, and a second electrode means forming a meniscus lens with a potential of said first electrode means between said first electrode means and said second electrode means, whereby said recess of said first electrode reduces aberration of said meniscus lens of said ion beam within said ion beam path perimeter.
Claim 14
Dependent Claim
85 words
A deceleration lens for an ion beam apparatus, said deceleration lens including an aperture defining an ion beam path perimeter of an ion beam at said deceleration lens, a first electrode means recessed from said ion beam path perimeter, a second electrode means for simultaneously stripping electrons from said ion beam and forming a meniscus lens with said first electrode means by curvature of equipotential line between said first electrode means and said second electrode means to converge said ion beam by more than 25%.
Claim 15
Dependent Claim
85 words
A deceleration lens for an ion beam apparatus, said deceleration lens including an aperture defining an ion beam path perimeter of an ion beam at said deceleration lens, a first electrode means recessed from said ion beam path perimeter, a second electrode means for simultaneously stripping electrons from said ion beam and forming a meniscus lens with said first electrode means by curvature of equipotential line between said first electrode means and said second electrode means to converge said ion beam by more than 25%.
Claim 16
Independent Claim
36 words
A method of decelerating an ion beam including the step of converging said ion beam prior to decelerating said ion beam to approximately compensate for divergence of said ion beam during deceleration of said ion beam.
Claim 17
Independent Claim
36 words
A method of decelerating an ion beam including the step of converging said ion beam prior to decelerating said ion beam to approximately compensate for divergence of said ion beam during deceleration of said ion beam.
Claim 18
Dependent Claim
32 words
A method of decelerating an ion beam as recited in claim 12, including the further step of converging said ion beam, at least in part, subsequently to deceleration of said ion beam.
Claim 19
Dependent Claim
61 words
An extractor for an ion beam apparatus including a first extraction electrode having an aperture of predetermined dimensions and a shield means for shielding said first extraction electrode from sputtering positioned adjacent said first extraction electrode and between said first extraction electrode and a plasma, said shield means having an aperture substantially congruent with said aperture of said first extraction electrode.
Claim 20
Dependent Claim
61 words
An extractor for an ion beam apparatus including a first extraction electrode having an aperture of predetermined dimensions and a shield means for shielding said first extraction electrode from sputtering positioned adjacent said first extraction electrode and between said first extraction electrode and a plasma, said shield means having an aperture substantially congruent with said aperture of said first extraction electrode.
Claim 21
Dependent Claim
19 words
An extractor for an ion beam apparatus as recited in claim 14, wherein said shield means is an insulator.
Claim 22
Dependent Claim
36 words
An extractor for an ion beam apparatus as recited in claim 14, wherein said shield means is a conductor held at a potential approximately equal to a floating potential of a plasma within said ion source.
Claim 23
Independent Claim
46 words
A method of extracting an ion beam from a plasma including the steps of applying a relatively low potential to an apertured first extraction electrode, and shielding a major portion of said extraction electrode from sputtering of material from said ion source using an apertured plate.
Claim 24
Independent Claim
46 words
A method of extracting an ion beam from a plasma including the steps of applying a relatively low potential to an apertured first extraction electrode, and shielding a major portion of said extraction electrode from sputtering of material from said ion source using an apertured plate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-03-22 | 1996-09-21 | 1997-03-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-03-22 | 2000-09-21 | 2001-03-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-03-22 | 2004-09-21 | 2005-03-23 | $7700.00 | Window Closed / Lapsed |