US5187771A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heat processing apparatus utilizing a plurality of stacked heater holders
Assignee: Tokyo Electron Ltd
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Filing: 1991-11-13
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Granted: 1993-02-16
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Expires: 2011-11-13
Abstract
Abstract A heat processing apparatus comprises a reactor tube in which matters to be processed are housed, a wire-shaped heating unit enclosing the reactor tube, a support device for supporting the heating unit at plural positions, and reinforcing members for reinforcing the support device. The support device includes plurality of holders stacked one upon the others, each of the holders has recesses on those two faces thereof which are contacted with faces of its adjacent ones, and when the holders are stacked one upon the others in a pole, the recesses of the two adjacent holders stacked form a hole through which the heating unit is passed. The support device has support members each supporting a pole of the holders stacked and each of the holders is engaged with its corresponding support member.
Inventors
- 👤 Yoshinobu Uchida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:54
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436; C; C23; C23C; C23C16/00; C23C16/44; C23C16/46; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B31/00; C30B31/06; C30B31/12; H05; H05B; H05B3/00; H05B3/62; H05B3/66; H10P72/0432; H10P72/0434
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
168 words
A heat processing apparatus comprising: a reactor tube in which objects to be heated are housed; a wire-shaped heating unit enclosing the reactor tube; support means for supporting the heating unit at plural positions, wherein said support means has a plurality of holders stacked one upon the others and each of said holders has recesses on those two faces thereof which are contacted with faces of its adjacent holders, and wherein when the holders are stacked one upon the others, the recesses of said two adjacent holders form a hole through which the heating unit is passed, and wherein said support means has support members each serving to support a pole of the holders stacked one upon the others, and each of the holders stacked one upon the others in a pole are engaged with their corresponding support member; and reinforcing means, which includes heat-resistant reinforcing columns each being interposed between the holders and the support member, for reinforcing each of the support members of the support means.
Claim 2
Dependent Claim
168 words
A heat processing apparatus comprising: a reactor tube in which objects to be heated are housed; a wire-shaped heating unit enclosing the reactor tube; support means for supporting the heating unit at plural positions, wherein said support means has a plurality of holders stacked one upon the others and each of said holders has recesses on those two faces thereof which are contacted with faces of its adjacent holders, and wherein when the holders are stacked one upon the others, the recesses of said two adjacent holders form a hole through which the heating unit is passed, and wherein said support means has support members each serving to support a pole of the holders stacked one upon the others, and each of the holders stacked one upon the others in a pole are engaged with their corresponding support member; and reinforcing means, which includes heat-resistant reinforcing columns each being interposed between the holders and the support member, for reinforcing each of the support members of the support means.
Claim 3
Dependent Claim
32 words
The heat processing apparatus according to claim 1, wherein each of said reinforcing columns is inserted into a recess formed on those faces of the stacked holders which face the support member.
Claim 4
Dependent Claim
30 words
The heat processing apparatus according to claim 1, wherein each of said reinforcing columns is passed through a through-hole which is formed passing through the holders stacked like a pole.
Claim 5
Dependent Claim
16 words
The heat processing apparatus according to claim 1, wherein said reinforcing columns are made of Inconel.
Claim 6
Dependent Claim
21 words
The heat processing apparatus according to claim 1, wherein each of said support members has a long channel C-shaped in section.
Claim 7
Dependent Claim
50 words
The heat processing apparatus according to claim 5, wherein each of the holders has grooves on the other two faces thereof and those rim ends of the channel of the support member which are opposed to each other are engaged with these grooves of the holders stacked like a pole.
Claim 8
Dependent Claim
16 words
The heat processing apparatus according to claim 1, wherein said support members are molded by ceramics.
Claim 9
Dependent Claim
53 words
The heat processing apparatus according to claim 1, wherein said holders are molded by ceramics and each of said holders stacked has engagements or stoppers on those two faces thereof which are contacted with faces of its adjacent ones, and these engagements of each holder are engaged with those of its adjacent ones.
Claim 10
Dependent Claim
36 words
The heat processing apparatus according to claim 1, wherein said wire-shaped heating unit is divided into plural zones, said apparatus further comprising an electrode to supply current to each of these zones of said heating unit.
Claim 11
Dependent Claim
24 words
The heat processing apparatus according to claim 1, further comprising an insulating member enclosing the reactor tube, the heating unit and the support means.
Claim 12
Dependent Claim
54 words
The heat processing apparatus according to claim 1, wherein said support means includes plural support members each supporting a pole of the stacked holders, said support members being positioned on a circle at a predetermined interval, and a pair of heat insulating rings between which said support members are held at their both ends.
Claim 13
Dependent Claim
21 words
The heat processing apparatus according to claim 11, wherein each of said heat insulating rings is made by hardening ceramic fibers.
Claim 14
Dependent Claim
136 words
A heat processing apparatus comprising; a reactor tube in which matters to be processed are housed; a wire-shaped heating unit enclosing the reactor tube; and support means for supporting the heating unit at plural positions, wherein said support means has a plurality of holders stacked one upon the others and columns and each of said holders has recesses on those two faces thereof which are contacted with faces of its adjacent ones, and wherein when said holders are stacked one upon the others, the recesses of said two adjacent holders form a hole through which the heating unit is passed, and wherein said holders stacked like a pole has a through-hole extending in a direction in which the holders are stacked one upon the others, and said column is passed through the through-hole of said holders.
Claim 15
Dependent Claim
136 words
A heat processing apparatus comprising; a reactor tube in which matters to be processed are housed; a wire-shaped heating unit enclosing the reactor tube; and support means for supporting the heating unit at plural positions, wherein said support means has a plurality of holders stacked one upon the others and columns and each of said holders has recesses on those two faces thereof which are contacted with faces of its adjacent ones, and wherein when said holders are stacked one upon the others, the recesses of said two adjacent holders form a hole through which the heating unit is passed, and wherein said holders stacked like a pole has a through-hole extending in a direction in which the holders are stacked one upon the others, and said column is passed through the through-hole of said holders.
Claim 16
Dependent Claim
15 words
The heat processing apparatus according to claim 13, wherein said columns are made of Inconel.
Claim 17
Dependent Claim
38 words
The heat processing apparatus according to claim 13, wherein said holders are molded by ceramics and each of said holders has engagements or stoppers on those two faces thereof which are contacted with faces of its adjacent ones.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-02-16 | 1996-08-17 | 1997-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-02-16 | 2000-08-17 | 2001-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-02-16 | 2004-08-17 | 2005-02-16 | $7700.00 | Window Closed / Lapsed |